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As a high inerratic aggregated system of the molecules, LB film can serve as an ideal film for research in the aspects of new materials, biology technology and the micro-electric study, and it is one of the hopeful new materials for the next century.

因而,LB膜作为高度有序的分子集合体,不论从新材料、生物技术还是从微电子学的角度来看,均不失为一种比较理想的分子超薄膜,是承担下一个世纪科学与技术革新被寄与厚望的功能材料之一。

Results show that when the thickness is less than 0.7 nm, Si3N4, normally amorphous in deposition state, could form a NaCl-type pseduocrystal structure due to the template effect of TiN crystal layer. Crystallized Si3N4 layers and TiN template layers grow coherently into columnar crystals with (111) preferred orientation. Correspondingly, the hardness of the films was enhanced to a maxim value of 38.5 GPa, showing a superhardness effect.

结果表明,在TiN调制层晶体结构的模板作用下,溅射态以非晶存在的Si3N4层在其厚度小于0.7 nm时被强制晶化为NaCl结构的赝晶体,多层膜形成共格外延生长的(111)择优取向超晶格柱状晶,并相应产生硬度显著升高的超硬效应,最高硬度达到38.5 GPa。

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