蚀刻

This thesis described the etching characteristics of silicon nitride passivation films in the thin-film transistor structure using an enhanced capacitive-coupled high-density plasma etcher. The main parameters used in these experiments were RF source power, RF bias power, chamber pressure, SF6, O2 and He gas flow rates.

中文摘要本研究以加强型电容耦合式高密度电浆蚀刻机台来研究蚀刻氮化矽结构，实验操作参数为射频电浆源功率、射频偏压源功率、SF6、O2、He气体流量和腔体压力。

Main process gases used in the metal etcher of the semiconductor industry are chlorine and boron chloride. Process gases are ionized in the reactor chamber to form free radicals by plasma, which etches off aluminum film from the wafer surface.

半导体金属蚀刻制程主要使用氯气及氯化硼等气体，以高能电浆离子化产生自由基后使其与晶圆表面之铝反应将多余之铝蚀刻而产生沟槽。

He was also developing his skill at etching, learnt initially in Berlin.

他的蚀刻技巧也在发展，蚀刻最初他是在柏林学习的。

The fabrication of SiNW was used by "electroless etching" which was when (100) c-Si was immersed in the solution containing silver nitrate and hydrofluoric acid. Si was etched by fluoric ion and released electrons to combine with silver ion to form Ag particles.

制作矽奈米线阵列的方式为无电镀蚀刻法，系将一p-type(100)之矽基板置入氢氟酸与销酸银的混合蚀刻液中，当溶液中之氟离子与矽基板接触后，矽即被解离成矽离子并放出一颗电子。

Lindsay etching is frontispiece; his last etching used as a book illustration.

林蚀刻是frontispiece ；他最后蚀刻作为一本书的例证。

Diamondite Glasswork Restorer removes water spots, very fine scratches and etchings, and improves the clarity of automotive glass.

蚀刻玻璃的水渍是因为矿物的沈积所造成，Diamondite玻璃抛光剂可以去除水渍和非常细微的刮痕与蚀刻并增进汽车玻璃的透明度，Diamondite玻璃抛光剂可以温和的抛除玻璃上细微的瑕疵并将玻璃复原至有如新品般的透明度

Etching metal: etching is a kind of chemical process, which means metal legibility created from copy board.

蚀刻金属：蚀刻是一种化学过程，即金属是从副本的板创造的易读性。

Germanium-silicon material is formed in the source region and drain region to fill with the etched source region and an etched drain region.

硅锗材料形成于源极区域和漏极区域中，以填充蚀刻的源极区域和蚀刻的漏极区域。

From these result of the experiment, the dynamic modeling can be simulated effectively, when the move speed of tip is faster the shear force in the tip is bigger. In the lithography process the motion of tip influence by the pile up, it leads to the serration surface of the groove, is like the surface of actual material of the cutting process.

由加工成形与磨耗结果回馈，可有效做探针动态建模，并模拟出，当探针移动的速度越快时，针尖所承受的剪应力越大，并且在蚀刻过程中，针尖受表面堆积物的影响，导致沟槽表面类似锯齿形的蚀刻表面与实际加工之情形相似。

We used ITO glass substrate and high purity（99.99%） titanium , put to use sputtering process, add to high purity O2 make it complete the best structure film and the thickness about 1400 . By way of 500℃ anneal could got a better anatase phase, this result could easy reaction with electrolyte to increase electron-transferred. Used as spin casting covering PR on ITO substrate, transferring patterns of array circular shapes on a mask to photography, used optimize temperature and time to hard bake. Finally used HCl to etching underexposed TiO2 area, and acetone to tripper top PR, make it to accomplish pillars shape TiO2 electrode.

本研究使用ITO玻璃基板为底材在以高纯度钛(99.99%)为靶材，利用溅镀方式通入纯氧使其行成高纯度TiO2镀於ITO基板上行成厚度约1400的薄膜，且经500℃高温烧结使其行成最强的锐钛矿结晶相，此晶相有利於与电解液反应进而增加电子的转移，提升太阳能电池最佳的效率，在以旋转涂布方式铺上光阻，以矩阵排列的圆孔光罩曝光、最佳的温度及时间来烘烤、显影后；使用盐酸以等向性湿蚀刻方式蚀刻未曝光之TiO2区域，最后利用鈵铜将最上层光阻去除，使其行成柱状TiO2的电极。

Neither the killing of Mr Zarqawi nor any breakthrough on the political front will stop the insurgency and the fratricidal murders in their tracks.

在对危险的南部地区访问时，他斥责什叶派民兵领导人对中央集权的挑衅行为。

In fact,I've got him on the satellite mobile right now.

实际上 我们已接通卫星可视电话了