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Compared with the film produced under the normal incidence, the number of the large particles for films fabricated at the deposition angle of 30° decreases greatly and the nano-particles with better distribution and more uniform particle size are formed after high temperature treatment.

经过高温热处理,相比于垂直沉积的纳米薄膜, 30°倾斜沉积制备的薄膜微观结构中大晶粒的数量显著下降,形成颗粒分布较好的纳米颗粒薄膜。

The invention allows to replace the aforementioned bristles or filaments having nondirectional mechanical properties, i.e. properties that are identical in all directions at an angle to the longitudinal axis, with film strips as the cleaning elements, said strips being produced from a sheet of film by suitable methods of separation.

代替具有不定向(即,在与纵轴相交的所有方向上相同)机械特性的这种硬毛或长丝,本发明提出使用薄膜条(4)作为清洁元件(3),所述薄膜条是通过成型方法的合适的分离而由一片薄膜制成的。

Cu doped ZnO thin film can detect 100 ppb propyl alcohol vapor, while Mn doped ZnO thin film exhibits high sensitivity to NH3 and H2O vapor.Furthermore, the photoluminescence properties of ZnO and Tb doped ZnO thin films, heat-treated in different atmospheres, were carried out.

薄膜气敏性研究表明,Ti的掺杂使ZnO膜电阻降低;Cu的掺杂使薄膜对正丙醇的选择性增高,可检测痕量(100 ppb)的正丙醇:Mn掺杂薄膜显示出很好的氨敏和湿敏性能。

The results indicated that the composite films exhibited much improved gas sensing performance.The phthalocyanine and its a-Fe2O3 embedded nano-particulate LB filmswere prepared by Langmuir-Blodgett technique. The films were characterized by AFM, UV-Vis and FT-IR spectra. The results indicated that the embedded LB films were composed of a-Fe2O3 nanoparticles and isopropoxyphthalocyanine molecules. The gas sensitivity of such prepared composite LB films was greatly improved. The film could detect 5ppm of propyl alcohol at room temperature. The composite films could be considered as gas-sensors for alcohols.

利用LB技术制各了异丙氧基酞菁铜LB膜和酞菁铜包埋球形α-Fe_2O_3纳米粒子的杂化LB薄膜,对其AFM、紫外和红外光谱的研究表明,利用LB技术可以实现酞菁与α-Fe_2O_3纳米粒子的有序组装,而且杂化薄膜对醇类气体的灵敏度有较大幅度提高,如对浓度为5ppm正丙醇的灵敏度为3.85,因此,杂化薄膜可以作为室温下醇类气体传感器进行开发研究。

In this thesis, the method of nanoindentation experiment is adopted to conduct research on silicon dioxide thin f.

本文采用纳米压入实验的方法,分别对集成电路工艺中常用的二氧化硅薄膜、氮化硅薄膜和铜互连布线中常用的Cu/Ta/SiO_2/Si结构的多层薄膜进行了研究。

Vanadium oxide thin films deposited on slide glass substrates are prepared by facing-target magnetron sputtering.The effect of sputtering conditions on temperature coefficient of resistance is analyzed by orthogonal experiment,and the optimum process recipes are achieved,including Ar∶O2=48∶0.4,gas pressure is 2 Pa,substrate temperature is 27 ℃,sputtering power is 180 W.

利用对靶磁控溅射法在玻璃基片上制备VOx薄膜,采用正交实验方法研究了镀膜条件对VOx薄膜电阻温度系数的影响,得到优化的镀膜工艺参数,主要包括Ar∶O2为48∶0.4、工作压力恒定为2 Pa、基底的温度为室温27℃、溅射功率保持在180W,在此基础上,进行不同温度条件的真空退火,得到薄膜TCR在-2.5%~-4.5%范围。

AFM images revealed that as the sputtering time was prolonged, the film thickness increased, the film became compacter, and the specific area of the film also increased, thus, the release rate of silver ions increased, which led to improved antibacterial properties. EDX test results indicated that increase in film thickness led to increase in silver weight percentage per unit surface, causing improved antibacterial properties. Moreover, when the film thickness was 1 nm, the inhibition percentage of Staphylococcus aureus and Escherichia coli were 100%.

结果表明:随着薄膜厚度的增大,样品抗菌性能提高;溅射时间延长,薄膜厚度增大,膜层的致密性改善,单位面积上的银含量增加,膜层表面积增大,银离子释放几率增大,是提高抗菌性能的主要原因;当纳米结构银薄膜厚度为1 nm时,对大肠杆菌和金黄色葡萄球菌的抑菌率均达到100%。

When substrate temperature is below 650℃, the Ti〓N crystals are dispersively distributed in the amorphous TiN〓 film deposited by ion beam sputtering.

在离子束溅射制备的TiN〓薄膜中,当沉积温度在650℃以下时,Ti〓N晶体弥散分布在非晶的TiN〓薄膜中;而650℃以上沉积的薄膜中主晶相为TiN,沉积温度越高,TiN相的(111)织构越明显。

For the first time, conductive LaNiO〓 thin films have been successfully prepared by metalorganic decomposition using 2-ethylhexanoates of lanthanum and nickel as the metalorganic precursors.

近年来的研究表明:铁电薄膜与金属电极的界面失配和扩散是影响铁电薄膜器件疲劳特性的重要因素,具有与铁电薄膜同为钙钛矿结构的导电氧化物电极,对改善疲劳现象具有显著的作用(疲劳寿命从10〓提高到10〓)。

From FT-IR we think that the hydrogen bond between the polar oxygenous group on the thin film surface treated with plasma and acetone molecules would enlarge the distance between the carbon black particles, resulting in the addition of the electrical resistance, then the response behavior of the thin film to acetone was improved greatly.

我们通过FT-IR研究认为,等离子体处理后,薄膜表面引进的极性含氧基团与丙酮分子之间氢键的形成会增大炭黑粒子之间的距离,导致了薄膜电阻的极大增加,使薄膜对丙酮蒸气的响应得到很大改善。

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