薄膜的

The composite film appeared semitransparent and brown to yellow from optical microscopy. Results show that shorter time sol-heating results in thiner film with less surface roughness, less conglutination to base, and easily to disconnect, while longer time sol-heating results in thicker film with better conglutination to base and worse roughness. RDX distributes in the film everywhere on the whole but discretely on the scale of 2.4 μm according to EDS results. XRD curve of RDX/RF film shows the superposition of RF non-crystal bread curve and RDX crystals diffraction curve. RDX diffraction peaks are broadened and its crystal size is calculated to be lower to 43 nm.

实验所得薄膜半透明，呈棕红色至黄色；实验表明，溶胶恒温加热时间较短时，所得薄膜的单层厚度较小，较平整，但附着力小，干燥后易脱落；恒温加热时间较长时，所得薄膜的单层厚度较大，不易脱落，但表面平整性较差；能谱测试表明，薄膜中的RDX整体上分布较为均匀，但在测试点位间距为2.4μm的微观尺度上呈离散状分布；XRD测试表明，RDX/RF复合物薄膜表现为RF的非晶态馒头峰与RDX衍射峰的叠加，RDX衍射峰明显宽化，其晶粒度可低至43 nm。

The effects of annealing temperature and monolayer thickness on the structure and surface morphology of STO thin films were investigated.

研究了退火温度以及单层薄膜厚度对STO薄膜结构及表面形貌的影响。采用X-衍射表征薄膜的微观结构，利用原子力显微镜观察薄膜的表面形貌。

The mechanical properties were characterized with nanoindenter and the stress was calculated using Stoney equation.

利用纳米压痕仪和光谱椭偏仪测试薄膜的力学性能和光学性能，利用KLA-Tencor台阶仪测试硅衬底在薄膜沉积前后的曲率半径，并根据Stoney方程计算薄膜应力，利用可见光拉曼光谱和电子能量损耗谱研究了薄膜的微结构。

This project was established based on the first cooperative development of optical in situ real time detecting technique probing the atomic scale layer-by-layer epitaxy growth of oxide film. Over the last three years, we have given full play to the advantages and characteristics of both sides and have finished the assumptions and plans of this subject satisfactorily. 1. In Institute of Physics, we set up advanced oblique-incidence reflectivity difference equipment and wrote one data acquisition procedure that made the simultaneous detection of optical signal and RHEED signal into reality. 2. The first observation of sustained oscillations over hundreds of monolayers in both real and imaginary signals during the epitaxy growth of SrNb0.1Ti0.9O3 on SrTiO3 substrate in LMBE testifies that oblique-incidence is an excellent method to detect and monitor film epitaxy growth real time. 3. For the first time, we verify that oblique-incidence reflectivity difference method can be used to monitor the layer-by-layer growth mode during continuous growth through the correspondence between optical signals to atomic or molecular step edge density on the growth surface. 4. Phenomenological analysis shows that optical signals comprise three parts, the first is proportional to the average thickness of the film and depends on the bulk phase dielectric response; the second is proportional to the coverage of terraces and depends on the dielectric response of atoms or unit cells in the terrace; the third is proportional to the coverage of step edges and depends on the effective dielectric response of atoms or unit cells at step edges. This makes oblique-incident reflectivity difference technique a quantitative macroscopic method to monitor film growth.

中文摘要：本课题是在合作首次发展了氧化物薄膜原子尺度层状外延生长光学原位实时探测方法的基础上立项的，三年来，我们充分发挥双方的优势和特点，圆满完成了课题的设想和计划。1、在物理所建立了一套先进的光反射差法装置，编写了计算机系统的数据采集程序，实现了两路光学信号和RHEED数据的同步采集和显示。2、用激光分子束外延在SrTiO3基底上生长SrNb0.1Ti0.9O3薄膜，首次观测到连续外延几百个原胞层，周期振荡的光反射差实部和虚部信号，证明了光反射差法是一种能原位实时探测与监控薄膜层状外延生长的好方法。3、首次验证了通过对生长表面原子或分子台阶密度的响应，光反射差法可用于原位实时监测在连续生长条件下薄膜的层式生长模式。4、通过唯象理论的研究，证明光反射差信号由三项组成，第一项只与薄膜的平均厚度和宏观光学电介质常数有关；第二项与分子台阶面覆盖度和台阶面上分子层的光学电介质常数有关；第三项与台阶边缘的覆盖度成正比，并和在台阶边缘的分子的有效光学介电常数有关。

Raman spectra of polythiophene and poly（para-phenylene） films electrochemically deposited on stainless steel electrodes by direct oxidation of thiophene and benzene in boron trifluoride diethyl etherate solution have been investigated by excitations with 633 and 785 nm laser beams, respectively.

聚噻吩和聚苯的薄膜通过在噻吩和苯的三氟化硼乙醚溶液中电化学氧化得到，它们分别使用633 nm和785 nm的激光进行拉曼实验，新制的聚噻吩薄膜的拉曼光谱和薄膜的厚度密切相关，同样的，新制的聚苯薄膜的拉曼光谱和薄膜的厚度密切相关。

Design the structure of high performance Low-E film including its material and thickness of every layer according to basic optical theory. Carry out an innovative work to calculate its optical performance by characteristic matrices and optical admittance. Compare the results with those we get by traditional measurement.3. Prepare Low-E films with RF magnetron controlled reactive sputtering. The result shows that in the visible region (380nm-780nm), the highest transmittance is 82.4% while the average value is 75%. In the NIR region (780nm-2500nm), the average transmittance is 16.2%. These characters can fit the demand of the glass used in architecture and cars, and also in other applications.4. We novelly use the material Titanium as protective layer to solve the problem that Ag layer would disappear when depositing the second TiO_2 layer. As the protective layer, Ti does not increase the number of targets so as to lower the costs. The thickness of the protective layer Titanium is adjusted by controlling of sputtering time. Results shows the Low-E films get the best optical character when the sputtering time of Titanium is 20 seconds5. We novelly proposed a new transmittance quality factor Q=_·(?_-__ to evaluate the performances of Low-E films, which makes it easier to judge the qualities of Low-E film.6. The photocatalysis of Titanium dioxides is researched and introduced into Low-E films. Sb-doped TiO_2 thin films are prepared. Its photocatalysis and hydrophilicity are measured.

论文的工作主要有：1、总结了低辐射薄膜的制备方法，性能，以及国内外最新研究进展和应用，并对两种类型的低辐射薄膜进行了比较。2、从光学基本理论开始，设计了离线低辐射薄膜的结构，包括每一层的材料和厚度，并创新性的用特性矩阵和光学导纳理论计算了该离线膜的光学性能，利用软件对其进行了仿真，与实际制备的薄膜所测量的性能相比较。3、完成在实验室仪器上制备低辐射薄膜，掌握其工艺条件，解决了超薄金属膜的制备问题，所制备的低辐射薄膜在可见光区(380hm-780hm)最高可达82.4%，平均透射率为75%；在近红外区(780nm-2500nm)的平均透射率为16.2%，其性能达到建筑物幕墙玻璃，汽车前挡玻璃等应用标准，并为进一步的大规模生产打下基础。4、针对中间银层在镀上层膜时易被氧化这一工艺难题，本研究创新性的提出用Ti膜作为保护膜，没有增加新的靶材，提高了生产效率，并节约了生产成本。

The interfaces electric circuit and the control program can be transplantated to other micro voltage control equipment very easily.Then we take the C_2H_5Br and the hydrogen (H_2) as the source gas to deposite the gradient bromating amorphous hydrogenated carbon film in the improved low-pressure plasma polymerization unit.

然后在改进的低压等离子体聚合装置中以溴乙烷(C_2H_5Br)和氢气(H_2)为源气体沉积了掺溴非晶碳氢薄膜和梯度掺溴非晶碳氢薄膜，用Perkinelmer Lambda12型紫外／可见分光光谱仪测量了样品的透光谱，并利用透光谱计算了薄膜的光学厚度和光学带隙：利用NICOLET MX—1E傅立叶变换红外光谱仪和XSAM800型X射线光电子能谱仪分析了薄膜的化学键和结合态以及薄膜中氧碳元素比和溴碳元素比。

The motive of this paper is to investigate the effect of processing parameters on the properties of silicon nitride and the coverage performance of insulator layer, and the effect of the film thickness of interface layer on the conduction current performance of thin film transistor.

本文旨在研究探索工艺参数对氮化硅薄膜的性能(如光禁带宽度、相对介电常数、折射率等)和钝化层氮化硅薄膜台阶覆盖性能的影响，以及栅界面层氮化硅薄膜厚度对薄膜晶体管导通电流性能的影响，制备性能优良的氮化硅薄膜。

The adding of anatase nano-crystalline TiO_2 to the deposition solution accelerates the depositing of TiO_2 articles from the deposition solution on the silica glass fiber. A well-combined and durable TiO_2 thin film on silica glass fibers surface obtained by controlling the deposition temperature, deposition time, deposition cycles, concentration of the deposition solution, relative concentration of the deposition materials, pH value of the deposition solution. The effect of the deposition conditions, the drying conditions and the annealing treatment conditions on the surface morphology, section morphology, growth patterns, thickness of the deposited TiO_2 thin films were investigated. Growth rate and particle size of the thin films were controlled by the deposition conditions.

实验结果表明加入微量的锐钛矿型纳米TiO_2诱导晶可以使沉积液中析出的TiO_2粒子更大程度的以锐钛矿型纳米TiO_2粒子的形式析出；通过对沉积温度、沉积液中组分浓度及相对浓度、沉积溶液的pH值的调节与控制，从而控制沉积溶液中化学反应平衡的移动，研究了以上条件对沉积速率、沉积溶液中[Ti6]2–与—OH、[Ti6]2–之间的脱水聚合反应速率的影响，总结出了获得均匀致密质量较好的TiO_2薄膜的一系列实验参数，并对薄膜的生长模式进行了系统的分析研究；通过对沉积时间及沉积次数的分析，可以有效的控制TiO_2薄膜的厚度及质量；通过对薄膜的干燥条件及热处理条件的控制，可以使利用液相沉积法获得的TiO_2薄膜进一步晶化；并分析了对薄膜引起缺陷的主要原因。

To present an adhesive sheet roll for wafer processing excellent in storage stability, radiation curing property, and low contamination to wafer.

一种保存稳定性、放射线固化性以及对晶圆的低污染性优异的筒状晶圆加工用粘合片，是将由基材薄膜、放射线固化性粘合剂层、以及脱模薄膜按顺序层叠而成的层叠薄膜，多重缠绕而形成的筒状晶圆加工用粘合片，所述基材薄膜和/或脱模薄膜的与放射线固化性粘合剂层接触的面的另外面侧表面的轮廓算术平均偏差为1μm以上，且所述放射线固化性粘合剂层中所含的自由基聚合抑制剂的重量低于1000ppm。

However, as the name（read－only memory）implies, CD disks cannot be written onorchanged in any way.

然而，正如其名字所指出的那样，CD盘不能写，也不能用任何方式改变其内容。

Galvanizes steel pallet is mainly export which suits standard packing of European Union, the North America. galvanizes steel pallet is suitable to heavy rack. Pallet surface can design plate type, corrugated and the gap form, satisfies the different requirements.

镀锌钢托盘多用于出口，替代木托盘，免薰蒸，符合欧盟、北美各国对出口货物包装材料的法令要求；喷涂钢托盘适用于重载上货架之用，托盘表面根据需要制作成平板状、波纹状及间隔形式，满足不同的使用要求。