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To improve the accuracy, as to the hardware, the quality of composite polymer films and adjustment of light path were controlled strictly, including cleanout of base, synthesis of solvent, filtering of solvent, preparation of the films and control of picturing. As to the process of picturing, adding gauge, foreground and background, many exposals in same angle were used, and the area of the films to measure was also chosen. As to software, picture analysis was mainly used to improve accuracy.

为了提高测量精度,在硬件方面严格控制复合聚合物薄膜的质量和光路的调整,包括:基片的清洗、溶液的配制、溶液的过滤、薄膜的制备、和摄像的控制等等,在采集图像的过程中,通过加标尺、测量前景和背景、同一角度下的多次曝光、薄膜测量区域的选择等等措施来消除误差;在软件方面提高测量精度方法主要采用图像处理的方法,并用自编的软件处理数据。

To improve the performance of the Ti〓O〓 film, some substances are doped in the film.

为了提高薄膜的性能,对薄膜进行了一些掺杂。

After 30 D of the Chen Fang in nitrogen, common film and compound and filmy relative intensity of fluorescence all dropped only 10%.

在氮气中陈放30 d后,普通薄膜和复合薄膜的荧光强度均仅下降了10%。

The SEM revealed that the size of silica particles became smaller and silica films got more porous and fleecy.

扫描电镜照片也表明,组成多孔氧化硅薄膜的颗粒在占空比增大时变得细腻并且薄膜整体变得蓬松多孔。

ZnO films naturally doped and codoped with N and Al are deposited by helicon wave plasma assisted sputtering method. Their photoluminescence properties have been studied at low temperature.

采用螺旋波等离子体辅助溅射技术制备了自然掺杂及N-Al共掺杂ZnO薄膜,对两种不同类型掺杂薄膜的低温光致发光特性进行了研究。

AIXTRON AG , AIXTRON AG 是一家生产沉积设备、半导体产业, The Company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials and more recently carbon nanostructures.Such components are used in display technology, signal and lighting technology, fiber communication networks, wireless and cell telephony applications, optical and electronic data storage, computer technology as well as a wide range of other high-tech applications.

这些组成部分被使用在显示技术、信号和照明技术、光纤通信网络、无线和手机电话应用、光学和电子数据的存储、计算机技术以及其它广泛的高科技应用,成立於1983年,该公司总部设在德国,在台湾也有分公司;用心在 MOCVD 的开发与研究中20多年, MOCVD 成长薄膜时,主要将载流气体通过有机金属反应源的容器,将反应源的饱和蒸气带至反应槽中与其它反应气体混合,然后在被加热的基板上面发生化学反应促成薄膜的成长,而这些光电半导体薄膜则是被应用在光电元件及微电子元件中;要进入工厂前还需要穿上头套、鞋套和实验衣,可见在对於防止灰尘或头发飘散在他们眼中是很重视的一环。

At the temperature as low as that at which the monomer cannot diffuse in large scale,adatom nucleation and island formation depends on the increase of adatom density.With the increase of temperature,the film growth mode depends on the competition between in-plane diffusion and inter-layer diffusion of monomers.

当薄膜生长温度低于单原子的扩散温度时,表面原子的成核和表面岛的生长主要是由沉积原子的空间随机性和表面原子密度增加而决定的,随着薄膜生长温度的提高,薄膜的生长模式则取决于单原子的层内扩散和层间扩散的竞争。

In this dissertation,Co-Cr2O3 and Fe-Cr2O3 granular films with superiorproperties have been successfully fabricated by RF co-sputtering technique underroom and 77K substrate temperatures for the first time.The microstructure,electrical transport and magnetic properties as well as their relation to TMR effectare systematically investigated by various techniques such as X-Ray diffraction,transmission electron microscopy,electrical diffraction,X-Rayphotoelectron spectroscopyand VSM,etc.,the change of electrical transportand magnetic properties in these films with their microstructure is also shown.Someinteresting and valuable results have been obtained after the theoretical fitting ofexperimental data with the existed theory.The temperature dependence of TMReffects in these films and the way to get larger TMR effect is also studied.Our mainprincipal results obtained are as follows:(1)Microstructure and Magnetism

在本论文中,我们采用射频共溅射方法,在室温及77K的衬底温度下首次成功地制备了性能优异的Co-Cr2O3及Fe-Cr2O3系列颗粒薄膜,并利用X-Ray衍射、透射电镜、电子衍射、X-Ray光电子谱及宏观电性及磁性测量等手段详细地研究了Co-Cr2O3颗粒膜的微结构、电性、磁性及它们与TMR效应之间的关系,系统地研究了薄膜的电性和磁性随薄膜微结构的变化,通过实验数据点的理论拟合,得出了一些有价值的物理信息,探讨了磁电阻效应的温度依赖性及获得较大TMR效应的途径,主要内容可概括如下

The simulated results show that the AO exposures strongly affect the microstructures and properties of the two film materials. For instance, as the AO exposure increases, the mass loss increases, the surfaces of the two types of films roughens, the optical transmittance of Kapton and reflectivity of Kapton/Al mirror degrade, but the solar absorptance of kapton/Al films increases.

结果表明:两种材料的质量损失随原子氧暴露剂量的增加呈线性增大;原子氧暴露后,试样表面呈&地毯&状形貌,且随暴露剂量的增加粗糙度变大;Kapton薄膜的光谱透过率、Kapton/Al薄膜二次表面镜的光谱反射率随原子氧暴露剂量的增加而降低,Kapton/Al薄膜二次表面镜的太阳吸收比Δα随暴露剂量的增加而增大。

The result of research indicates the In-doped mol proportion of 4% improves the structure of thin films effectively so as to increase its ultraviolet-visible light transmissivity remarkably; the Sb doping of 7% comes into being more free electrons to make its sheet resistance reduced; the P doping of 2% further enhances its conductance by reason of the forming of quasi-continuous doping energy band.

研究表明,4%的铟掺杂有效地改善了薄膜的内部结构,使得紫外-可见光的透过率显著增加;7%的锑掺杂释放出了更多的载流子,使薄膜的方块电阻降低,2%的磷掺杂因准连续杂质能带的形成进一步提高了薄膜的电导率。

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