薄膜

It was shown that the improvement of electric properties in 1%Eu-PZT can be attributed to Eu donor doping, which decreases the concentration of defects such as oxygen vacancies and holes, while the degradation in fatigue and leakage current properties shown in the films with more than 1mol% Eu dopant results from the apparently dominant acceptor doping, which increases the concentration of oxygen vacancies and holes.

结果表明，1mol％Eu施主掺杂，可以减少氧空位以及空穴等缺陷浓度，因此1％Eu-PZT薄膜的极化疲劳和漏电流特性得到明显改善；高于1mol％Eu的受主掺杂作用使薄膜中氧空位以及空穴等缺陷浓度增加，导致PZT薄膜电学性能恶化。

Moreover, the micro-pattern etching of electrodes and PZT thin films have been investigated, and the fast and successful etchings have been actualized with new etchants and original methods. The technics and mechanism of anisotropic etching of monocrystalline silicon have been studied deeply, for example the influences of the concentration and temperature of tetramethyl ammonium hydroxide on the rate and effect of the anisotropic etching.

此外，结合PZT铁电薄膜热释电单元红外探测器的设计和制备，对电极和PZT铁电薄膜的微图形刻蚀工艺进行了研究，采用新的刻蚀液配方和具有独创性的方法，实现了对PZT铁电薄膜和上下电极快速、成功的刻蚀。

TiO_2 thin films prepared directly by Sol-gel method were amorphism; Anatase-type TiO_2 took place at calcination temperature 450℃. It was found that different substrates showed some difference of photocatalytic activities.

溶胶-凝胶法直接制备的TiO_2薄膜是无定形的，通过对不同基底的薄膜样品在450℃条件下退火处理后得到了锐钛矿型TiO_2薄膜。

XRD shows: when the value of x is between 0.1 and 0.3, the alloying thin film remains the structure of hexagonal wurtzite and the angle of (002) diffraction peak becomes bigger as the value of X increases; The photoluminescence spectra at room temperature shows that the PL spectra of the alloying thin film is composed of the stronger UV emission band and weaker visible band, and UV emission peak will have the blue shift with the content of Mg increasing and the visible emission weakened.

XRD衍射测试表明：在0.1＜x＜0.3范围内，合金薄膜仍然保持氧化锌六角型纤锌矿结构，(002)衍射峰位随x的增大向大角度方向移动，在X≥0.3的范围内，合金薄膜的结构则为氧化锌和氧化镁的混合结构；室温光致发光谱表明：ZnMgO合金薄膜PL谱都是由较强的紫外发射带组成，且随着Mg含量的增加紫外发射峰位发生蓝移，同时可见发射增强。

The characteristics of pentacene/perylene derivatives based organic solar cells are investigated in this thesis Donor and acceptor layers are pentacene and N N'-dioctyl-3 4 9 10-perylenetetracarboxylic diimide (PTCDI-2~13C) respectively Twelve organic solar cells with pentacene/PTCDI-2~13C heterojunctions were fabricated to study the influence of various alkylic perylene derivatives on the power conversion efficiency Under the sunlight simulator with AM1 5G filter and 100 mW/cm2 the solar cell of pentacene/PTCDI-7C heterojunction with cathode of Ag/Al bilayer has the best performance among the devices with pentacene/PTCDI-2~13C heterojunctions In PL spectrum analyses the pentacene/PTCDI-7C film had lower recombination rate than the other pentacene/PTCDI-2~13C films; therefore more excitons could reach the P/N junction and enhance short-circuit current Furthermore the PTCDI-7C film grown on the surface of penatcene was more matched than other PTCDI films analyzed by the PL peak shifts of 10 nm and 45 nm thick PTCDI-2~13C and images of atomic force microscope More lattice match between the films of pentacene and PTCDI resulted in fewer defects in P/N junction and more carries can reach electrodes Accordingly the power conversion efficiency approach 2% was obtained from the solar cell with the active layer of pentacene/PTCDI-7C

本研究探讨以五环素/骈苯衍生物异质接面太阳能电池之特性，利用pentacene作为电子施体有机材料，PTCDI -2C~13C作为电子受体有机材料，制作出异质接面为pentacene/ PTCDI-2C ~13C等12种有机太阳能电池，比较不同碳数的骈苯衍生物对於有机太阳能电池之光电转换效率之影响。在AM1 5G、100 mW/cm2的模拟太阳光下，以pentacene/PTCDI-7C异质接面太阳能电池具有短路电流9 882 mA/cm2、开路电压0 376 V、填充因数0 523及光电转换效率达1 945%，皆比其他pentacene/PTCDI-2C ~13C异质接面太阳能电池来的大。由薄膜分析可知PTCDI-7C在这12种太阳能电池中具有较低的电子电洞复合发光效率，可以让较多激子到达异质接面进行电荷分离，减少电子电洞对复合发光的机率；此外，由光激发萤光光谱之峰值位移配合原子力显微镜表面结构图，可以得知当PTCDI-7C成长在pentacene上时会顺著pentacene的结构成长薄膜，故较无缺陷产生在P/N接面处；而在其他结构下则无此现象产生，致使在pentacene/PTCDI-7C薄膜中的载子有较大的机会可以移动至电极，使光电流提高，进而使光电转换效率提高。

With the analysis of the bond structure of the film as deposited and annealed, we can infer that the increased content of cage structure comprised of Si-O-Si bond with bigger bond angle may be the reason of decreased dielectric constant.

薄膜经过400℃热处理后，其介电常数由3.85降低到2.85，对其FTIR谱的分析指出，薄膜中鼠笼式结构比例的增加可能是薄膜介电常数降低的主要原因。

1The nanocrystalline TiO2 film is prepared by sol-gel and appearance of the film is observed by SEM. The X-ray graph shows the film has lots of anatase and a few rutile TiO2, but does not have brookite TiO2. The average diameter of particle is 25nm according to Scherrer formula.

采用溶胶-凝胶法制备了纳米晶二氧化钛薄膜，通过扫描电镜观察了其形貌，X射线衍射表征显示出制备的薄膜具有大量的锐钛矿晶型和少量的金红石晶型，不含有板钛矿晶型，根据Scherrer公式计算出薄膜的晶粒的平均尺寸为25nm。

The structure of the thin film capacitor 1 of this invention is: form sequentially at least the bottom electrode layer 102, the high dielectrics constant oxide film 103 and the upper electrode layer 105 on the semiconductor substrate 101; said upper electrode layer 105 which is a film layer 104 formed by the electrical conductive material which is processable by reactive ion etching, or a multilayered film composed of two kinds of film layers 107 and 108, which are each formed of a conductive material which is processable by at least two kinds of reactive ion etching.

要约 薄膜电容器1是至少在半导体基片101上按顺序形成下部电极层102、高介电常数氧化物膜层103、上部电极层105而构成的薄膜电容器，该上部电极层105由一种仅由可用反应性离子刻蚀加工的导电性材料形成的膜层104，或至少两种由可用反应性离子刻蚀加工的导电性材料分别形成层状的多层膜层107和108构成；经历350℃的热试验之后，对该薄膜电容器1施加OV到2V的驱动电压的薄膜电容器漏电电流密度为1×10 －8 A/cm 2 以下。

At present, the company has completed the film with nano-level and engineering level of the development of nylon and successfully applied to the functional film and the field of urban water supply, developed a multi-layer barrier packaging films, stretch film, high-strength heat shrinkable barrier film series, as well as nano-meter nylon, plastic beer bottles series, films and nylon meter has formed the scale of industrialization.

目前，公司已完成膜用级和工程级纳米尼龙的开发，成功应用到功能性包装薄膜及城市供水领域，开发了多层阻隔包装薄膜、拉伸膜、高强度高阻隔热收缩薄膜系列以及纳米尼龙水表、塑料啤酒瓶系列，薄膜及尼龙水表已形成产业化规模。

The detail microstructure, composition and optical property of the films have been explored through RBS, XPS, Raman, XRD and IR spectroscopes. The negative bias dependent film growth on the influence of grain size, preferred orientation, and density within grain boundary and volume densification was a significant phenomenon for hetero-deposition.

用RBS，XPS，Raman和IR谱分析薄膜的微结构、成分和光学性质表明，a-CN〓薄膜包含石墨和类金刚石的相成分，加适当的负偏压可增加沉积原子的扩散度，改变薄膜固体结构，影响薄膜的多晶晶粒尺寸、晶面取向、晶界密度和体密度。

This one mode pays close attention to network credence foundation of the businessman very much.

这一模式非常关注商人的网络信用基础。

Cell morphology of bacterial ghost of Pasteurella multocida was observed by scanning electron microscopy and inactivation ratio was estimated by CFU analysi.

扫描电镜观察多杀性巴氏杆菌细菌幽灵和菌落形成单位评价遗传灭活率。