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From the experiment results,it is concerned that the thin film was composed of many small particles(most of them was with a size between 20 and 30 nm)uniformly deposited and intervein on the substrate surface. Some large particles were tightly embedded into the thin film.The deposition rate increased by increasing the precursor flow rate and the discharge power.

以上的分析结果表明:常压等离子化学气相沉积得到的薄膜是一种由众多小颗粒(其中主要为尺度在20-30nm的颗粒)的颗粒串联形成的网孔结构,并且在薄膜生长过程中一部分的颗粒被包埋在其中,薄膜颗粒分布较均匀。

With this EBT model, we successfully predicts how to optimize post annealing conditions and get the giant magnetooptic Ce-substituted YIG thin films for waveguide applications.

对Ce1YIG薄膜的溅射工艺及后续的晶化处理工艺进行了研究,得到了如下主要结论:成功地在非晶态的二氧化硅基片上用溅射法制备了非晶的Ce1YIG薄膜,并进行了后续晶化处理,得到了晶化的Ce1YIG薄膜

LNO films from metalorganic precursors have revealed some attractive advantages such as lower grown temperature (~530℃), dense and uniform surface morphology and excellent metallic conductivity.

薄膜热处理工艺的研究中首次发现:在热分解及LNO的晶化过程中,薄膜中的氧扩散是影响LNO薄膜的结晶温度和导电性能的关键因素。

For the first time, conductive LaNiO〓 thin films have been successfully prepared by metalorganic decomposition using 2-ethylhexanoates of lanthanum and nickel as the metalorganic precursors.

近年来的研究表明:铁电薄膜与金属电极的界面失配和扩散是影响铁电薄膜器件疲劳特性的重要因素,具有与铁电薄膜同为钙钛矿结构的导电氧化物电极,对改善疲劳现象具有显著的作用(疲劳寿命从10〓提高到10〓)。

In this study, we investigate the effect of post-annealing on magnetization damping in sputtering deposited NiFe thin films. The film thickness is ranged from 10 nm to 100 nm. Thin films were deposited at room temperature and a subsequent post-annealing was performed in vacuum better than 10-6 torr from room temperature to 700 0C for 30 minutes.

中文摘要本研究中,我们使用改变后退火效应来观察溅镀制程镍铁薄膜(Ni84Fe16)系列的磁性阻尼行为,溅镀薄膜厚度范围为10 nm ~ 100 nm,而镍铁薄膜后退火过程在真空度约10-7 torr中进行,达到标的温度(范围由室温至700 ℃)后定温30分钟,自然冷却取出。

From FT-IR we think that the hydrogen bond between the polar oxygenous group on the thin film surface treated with plasma and acetone molecules would enlarge the distance between the carbon black particles, resulting in the addition of the electrical resistance, then the response behavior of the thin film to acetone was improved greatly.

我们通过FT-IR研究认为,等离子体处理后,薄膜表面引进的极性含氧基团与丙酮分子之间氢键的形成会增大炭黑粒子之间的距离,导致了薄膜电阻的极大增加,使薄膜对丙酮蒸气的响应得到很大改善。

To improve the photoemissive sensitivity of nanoparticle composite photoemissive thin film and to fill the blank of rare earth application research in the field of photoemissive material, the rare earth elements are introduced into nanoparticle composite photoemissive thin film in the first time.

本文以纳米粒子复合光电发射薄膜需要进一步提高光电灵敏度为出发点,以稀土元素独特的性质及其应用研究在光电发射材料方面的空白点为切入点,首次将稀土元素引入到纳米粒子复合光电发射薄膜中,对现有的纳米粒子复合光电薄膜的光电发射性能进行改善和提高。

Polyimide films capped with nonreactive phthalimide end groups were synthesized with theoretical number average molecular mass of 10000 and 30000 calculated using the Carothers equation. The effect of end-capper on the thermal properties was studied by investigating the change of the glass transition temperature T(subscript g of films after cured at high temperature.

制备了经邻苯二甲酸酐封端的理论数均分子量为10000和30000的聚酰亚胺薄膜,通过差示扫描热分析测定薄膜高温热处理前后玻璃化温度的变化,研究了PA封端对ODPA/ODA聚酰亚胺薄膜热稳定性能的影响。

For the polysilicon gate, we proposed a new stacked polysilicon film process combines polysilicon with amorphous silicon films and found doped stacked poly-Si films with lower surface roughness and smoother poly-Si/polyoxide interface than doped a-Si and conventional poly-Si films.

针对多晶矽闸极,我们提出堆叠式多晶矽薄膜沉积方法,此方法是在多晶矽薄膜上沉积非晶矽薄膜

In this paper, I studied the present methods for analyzing the optical parameters of thin film purposively to solve the problem of semiconductor thin film. Among so many methods, I pick up the reflection method to combine with the genetic algorithm, which is entitled the modern optimizing algorithm. And a new method of simultaneous determination the multi-parameters of semiconductor thin film has been presented.

本文针对半导体薄膜光学参数的测定问题,对目前分析薄膜光学参数的方法进行了较为详细、系统的研究,从众多方法中选取反射光谱法与现代优化算法——遗传算法相结合,提出一种可以同时确定半导体薄膜多个光学参数的新方法。

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