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This thesis described the etching characteristics of silicon nitride passivation films in the thin-film transistor structure using an enhanced capacitive-coupled high-density plasma etcher. The main parameters used in these experiments were RF source power, RF bias power, chamber pressure, SF6, O2 and He gas flow rates.

中文摘要本研究以加强型电容耦合式高密度电浆蚀刻机台来研究蚀刻氮化矽结构,实验操作参数为射频电浆源功率、射频偏压源功率、SF6、O2、He气体流量和腔体压力。

In the new prism, the structure angles of the second half prism were modified so that extraordinary ray is incident with Brewster angle.

新棱镜改变了第二劈的结构角使e光以布儒斯特角入射第二劈入射面。

The Fraunhofer diffraction phenomenon on the complementary structure of Sierpinski carpet grating is discussed on the basis of FresnelKirchhoff theory and Fourier analytical method.

利用菲涅耳基尔霍夫光栅衍射原理和傅里叶分析方法,对具有分形结构互补Sierpinski地毯光栅的夫琅和费衍射现象进行了探讨。

The Fraunhofer diffraction phenomenon on the complementary structure of Sierpinski carpet grating is discussed on the basis of Fresnel-Kirchhoff theory and Fourier analytical method.

利用菲涅耳-基尔霍夫光栅衍射原理和傅里叶分析方法,对具有分形结构互补Sierpinski地毯光栅的夫琅和费衍射现象进行了探讨。

In order to analyze the effects of mesh structural parameters and tilted angle on the shape and distribution of diffraction spots at far field, an optical intensity distribution model of Fraunhofer diffraction is established for a tilted square metallic mesh using Huygens-Fresnel diffraction theory.

为分析金属网栅结构参数和倾斜角对网栅远场衍射斑形状和分布的影响,基于惠更斯-菲涅耳原理建立了倾斜金属网栅的夫琅和费衍射光强分布解析模型。

The cross-section morphology and microstructure of the coatings were studied by field emission scanning electron microscopy and glancing angle X-ray diffraction respectively,and the nano-hardness and friction behavior of the coatings were also characterized.

分别采用场发射扫描电子显微镜和小掠射角X射线衍射方法研究了涂层横截面的形貌和晶体结构,并对涂层的纳米硬度和摩擦性能进行了表征。

It is composed of a compact normal incidence multiplayer telescope and a grazing incidence Wolter-I telescope.

该望远镜是把小结构尺寸的卡塞格林型极紫外波段正入射望远镜放置在软X射线波段,并由常用的Wolter Ⅰ型掠入射望远镜的中心部分组成。

XRD,X-ray EDS analysis,AFM and Fourier transform infrared spectroscopy were employed to characterize PbSe thin films. The results show that all of the films were heteromorphy and the growth temperature has effect to the diffract peaks of the films. The contents of PbSe thin films by PLD consisted with the targets,and realizing thin films deposited with same constitutes; the films had rather flatness surface and compact structure; the peak-to-tail roughness of PbSe thin films surfaces was less than 200nm;they had sensitivity to light of a specified wavelength and obvious absorption edge at 5μm corresponding to band-gap width of PbSe thin films;light of wavelength less than 5μm was strongly absorbed.

通过脉冲激光沉积法在Si(111)和SiO2玻璃基片上制备了PbSe薄膜。X射线衍射、X射线能谱、原子力显微镜、傅里叶变换红外光谱仪测试结果表明:所有制备的薄膜都为多晶薄膜,发现薄膜生长温度对薄膜衍射峰有一定影响;PLD法制备的薄膜的成分与靶材的基本一致,实现了同组分沉积;所有薄膜表面比较平滑,表面不平整度小于200nm,结构比较致密;PbSe薄膜对红外光具有敏感的响应特性;在波长为5μm处存在有明显的吸收边,此吸收边对应于直接带隙PbSe材料的禁带宽度;对应于波长小于5μm的红外光,PbSe薄膜存在有明显的强吸收。

The molecular structure of this isomer has been determined by X-ray diffraction and it is the first time to report the crystal structure of this kind of isomer which was proposed erroneously in the literature.

采用X-射线衍射的方法测定了其中一个异构体的结构,这是对此类异构体单晶结构的首次报导,纠正了文献中存在的对此类化合物结构的错误认识。

Using 1,3-dicyanobenzene as a precursor, we have obtained two coordination polymer of rare earth metal bridged by isophthalato ligand, Eu complex (4) and Sm complexe coordinated (5). X-ray single crystal diffraction investigation confirms that complex 4 and 5 are isomorphous with near isostructural 〓 unit.

以1,3-苯二氰为前体,合成了两个新的稀土金属与间苯二甲酸根配体桥联的聚合物:间苯二甲酸根配体配合的铕和钐化合物,4和5.X-射线衍射结构分析表明化合物4和5均具有〓基本结构单元且两者结构类似。

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Breath, muscle contraction of the buttocks; arch body, as far as possible to hold his head, right leg straight towards the ceiling (peg-leg knee in order to avoid muscle tension).

呼气,收缩臀部肌肉;拱起身体,尽量抬起头来,右腿伸直朝向天花板(膝微屈,以避免肌肉紧张)。

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粮食产品的运输费用与5月份相比没有变化,但却比去年同期高8%。

However, to get a true quote, you will need to provide detailed personal and financial information.

然而,要让一个真正的引用,你需要提供详细的个人和财务信息。