等离子体

Hydrogenated amorphous silicon nitride films have been deposited by helicon wave plasma enhanced chemical vapor deposition, the effect of SiH4/N2 rate on the properties of the samples is systematically studied, and the critical experiment condition is obtained under which a-SiNx:H films with different compositions are deposited.

本工作采用螺旋波等离子体化学气相沉积方法制备了氢化非晶氮化硅薄膜，系统地研究了不同反应气体配比对薄膜特性的影响，得到了沉积不同组分a-SiN_x：H的典型实验条件。

Helicon wave plasma; nc-SiC; energy gap characteristics

螺旋波等离子体；纳米SiC；能带特性

The epitaxial ZnO films are prepared on Al2O3 substrates by using helicon wave plasma assisted sputtering technique. The as-grown and annealed films showed different in-plane orientations.

采用螺旋波等离子体辅助溅射沉积法在衬底Al2O3的(0001)面上沉积ZnO薄膜，所生长的薄膜在未退火和退火时表现出不同的平面内取向。

Hexagonal nano-silicon carbide thin films doped and undoped with phosphorus which possess a characteristic of the ultraviolet photoluminescence have been deposited by helicon wave plasma enhanced chemical vapour deposition technique under the high hydrogen condition in this work. The optical and electric properties of the doped nano-SiC films together with the electric and photovoltage properties of the n-p nc-SiC/Si heterojunction is studied and analyzed.

本工作利用螺旋波等离子体化学气相沉积技术在高氢气条件下制备了具有紫外发光的六角晶型纳米碳化硅，对这种材料进行了不同比例的磷掺杂，并对这种掺杂的纳米碳化硅的光学、电学特性以及nc-SiC/Si异质结的电学特性和光电压特性进行了研究。

At the same time, to phenomenon that experiment inside creation also make certainly hermeneutic.

此外文章还阐述了低温等离子体在环境技术中的其他应用研究，提出了今后的发展方向。

The results show that the compound conductive fiber has typical structure of sheath-core consists of black greened polyaniline electric conductive deposition as the skin and the white polypropylene matrix fiber as the core, which makes the compound fiber preferable physical mechanical property. The intensity and the elongation ratio of the electric conductive fiber are decreased but the thermal stability is enhanced after modified. The compound fiber has the good acid resistance but poor base resistance. The thermal stability of the compound fiber prepared by 4-methyl-benzene sulfonic acid is better than that prepared by hydrochloride acid. Moreover, the compound fiber can be re-doped by other organic or inorganic acid after freed from the adsorbed acid. Furthermore, the electric conductivity of the compound fiber decreases with the temperature increasing but hardly changed with the humidity. The adsorptive ability and therefore the content of the polyaniline, the constant of electric conduction, and the durability of the compound fiber can be enhanced by thinning the diameter, section heteromorphosis, section heteromorphosis and plasma treatment of the surface or blending with COPET of the fiber.

结果表明：复合纤维是聚丙烯与聚苯胺的共混体系，具有典型的皮芯型结构，皮层为墨绿色的聚苯胺沉积层，形成连续的导电通道，芯层为白色的聚丙烯基质纤维，提供物理机械性能；导电改性后纤维的强度、强力和伸长率均有下降，但热稳定性得到提高；复合纤维的耐酸性比耐碱性好，以对甲苯磺酸做掺杂酸比盐酸掺杂聚苯胺热稳定性好，脱掺杂后的复合纤维，可用其它无机酸或有机酸进行再掺杂；复合导电纤维的电导率随温度升高降低幅度较大，但几乎不受湿度影响；基质纤维细旦化、截面异形化、表面等离子体处理或共混COPET等改性处理均能提高纤维的吸附性，进而提高复合纤维表面聚苯胺含量、电导率和耐久性。

The strong Hα emissions in both the HFS and LFS sides of plasma are observed.

在等离子体边缘区域强场侧和弱场侧都观察到很强的Hα线辐射。

Here, in this paper, the special properties of hot cathode glow discharge are studied from the view of hot cathode and glow discharge plasma. The relation between deposition process with discharge properties is also studied in order to optimize the deposltion process.

本文从阴极、辉光放电等离子体等角度研究热阴极辉光放电的工作特性，并系统研究放电工作特性与金刚石膜沉积工艺的关系，进而指导制备工艺的优化。

Hot cathode glow discharge plasma chemical vapor deposition is a new method to deposit high-quality diamond films with high deposition rate.

建立了快速沉积高品质金刚石膜的热阴极辉光放电等离子体化学气相沉积新方法。

Large current hot cathode glow discharge was used for plasma chemical vapor deposition of diamond films. It improved deposition rate and films quality efficiently.

大电流热阴极辉光放电用于等离子体化学气相沉积金刚石膜，有效地提高了沉积速率和膜品质。

However, as the name（read－only memory）implies, CD disks cannot be written onorchanged in any way.

然而，正如其名字所指出的那样，CD盘不能写，也不能用任何方式改变其内容。

Galvanizes steel pallet is mainly export which suits standard packing of European Union, the North America. galvanizes steel pallet is suitable to heavy rack. Pallet surface can design plate type, corrugated and the gap form, satisfies the different requirements.

镀锌钢托盘多用于出口，替代木托盘，免薰蒸，符合欧盟、北美各国对出口货物包装材料的法令要求；喷涂钢托盘适用于重载上货架之用，托盘表面根据需要制作成平板状、波纹状及间隔形式，满足不同的使用要求。