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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器,对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计,建立了器件的三维实体模型以及两维降阶模型,对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计,同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程,开展了一系列重要工艺步骤的单项工艺试验,对工艺流程与工艺参数进行了优化,针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析,并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合,建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

Objective:To get objective evidence of the optimal stress condition in broken ends of scaphoid loins fracture,to provide biomechanical basis for the clinical choice of the different fixation postures after scaphoid loins fracture and further to offer theoretical instructions for the treatment after scaphoid loins fracture,stress distribution and shift rules after three types of fracture in scaphoid loins (transverse fracture, radialis oblique fracture and ulnar side oblique fracture) were studied using electrometric method and three-dimensional (3-D) finite element analysis.

目的:运用电测法和三维有限元法,研究腕舟骨腰部三种类型骨折后腕关节在各种不同体位固定下骨折端的位移情况及其所受应力的分布和变化规律,从而得到骨折后良好折端应力条件的客观证据,为临床上腕舟骨腰部骨折后腕关节固定体位的选择提供生物力学依据,进而为腕舟骨腰部骨折后的临床固定治疗提供理论指导。

The experiment of measuring principle stresses at one point by the strain gauge method is a basic experiment in mechanics of materials.

测量一点的主应力的电测实验是材料力学实验中的基本实验。

The universal research in microscopic tribological mechanism of contact, adhesion, friction, molecular-level solid-liquid interaction, tribochemistry, triboelectricity etc, in the interaction among goetmaterials or between goematerials and artificial materials during geomotion, were reviewed and analyzed.

2综述和分析了地质运动过程中普遍存在的微观摩擦机制如接触、粘着、分子级流体-固体相互作用、摩擦化学、摩擦电性等的研究概况,认为地质摩擦学的研究应具有宏观和微观两个层次,对地质运动的微观机制的研究将促进对地质材料的地球物理、化学和力学性质的研究,并有助于对各种尺度上的地质运动过程的理解

Zeta potential,density of surface carboxyl groups,the interaction between carboxyl groups and component in copolymerization emulsion,mechanical properties of films,state of water,particle diameter and distribution of particle diameter and theological behavior of emulsion were investigated by Zeta meter,the conductometric titration, particle size apparatus,dynamic mechanics analysis,differential scanning calorimmetry,scanning electron microscope,rheological apparatus,respectively, to study the mechanism on the water resistance of modified PVAc emulsion.

利用Zeta电位仪、电导滴定法、激光粒度仪、DMA、DSC、SEM、流变仪等手段从Zeta电位、表面羧基密度、羧基和乳液组分中的相互作用、羧酸改性后胶膜的力学性能、水的存在状态、粒径分布、流变性能和微观形貌方面探索了羧基提高乳液耐水性的机理。

At first, the nanometer level cage structure, good thermodynamical and chemical stability and inflaming retarding properties, and relative merits of sol-gel synthetic method of POSS are introduced.

重点介绍了POSS改性传统聚合物的作用:如提高聚合物的使用温度,降低聚合物的介电常数,提高改性体系的力学性能和阻燃性能。

For mechanical capability of busway, the magneto-structure coupling analysis is used and computation program is compiled by using apdl language of ANSYS in this paper, then the maximum dynamical force and displacement in X direction can be obtained under the condition of three phases short circuit to earth.

对低压母线槽的力学性能,本文运用了磁-结构耦合分析的方法,大量运用ANSYS的apdl语言,编制了计算程序,得出母线槽在三相对地短路情况下所受的最大电动力及X方向的最大位移,形成了磁-结构耦合分析模块。

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你知道吗,我需要你回来

Yang yinshu、Wang xiangsheng、Li decang,The first discovery of haemaphysalis conicinna.

1〕 杨银书,王祥生,李德昌。安徽省首次发现嗜群血蜱。

Chapter Three: Type classification of DE structure in Sino-Tibetan languages.

第三章汉藏语&的&字结构的类型划分。