电刻

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

H. Koyanagi."Novel High Density, Stacked Capacitor MOS RAM",IEDM Tech..1978,348-351.[5]H. Arima."A Novel Stacked Capacitor Cell with Dual Cell Plate for 64Mb DRAMs",IEDM Tech.

堆迭电容器DRAM在1Gb 以上必须使用的新介电材料，会迁动一连串新设备的开发，包括蚀刻、清洗、及沉积设备。

The success rate of porous conductive membrane preparation on fused silica capillary was greatly improved by control of voltage bias and electroosmosis effect.

通过控制电压偏置方向，利用电渗流效应使毛细管多孔导电膜的刻蚀成功率得到显著提高。

The process of preparing a printing surface for electrotyping by first engraving on a wax-coated metal plate.

蜡模，蜡刻制版法一种通过先在涂蜡金属板上''。'刻字'。''来准备电版印刷''。'平面'。''的工序

Companies TSMC and UMC will begin to use a immersion lithograph of the within the framework 45 nm technical process or even earlier.

公司台积电和联华电子将开始使用沉浸光刻的框架内与45纳米技术的过程中或什至更早。

As an important step of microelectronic process, etching technology has gained much attention. It will play an important role in microfabrication such as new-made microeletronics mechanism and photoelectrics integration system.

刻蚀工艺不仅作为微电子工艺中的关键技术一直受到人们的关注，而且在新兴的微机电系统，光电集成系统等微细加工中也将得到重要应用。

The pyrography is one of Chinese traditional craftwork, which is to say using the technics of sketch , rub , dot-dye , burning-carving , baking , embellishing and so forth to draw characters , landscape , pavilions , flower-birds , worm-fishs etc at the materials of bamboo , silk , rice paper , gourd and so on with special electric pen.

烙画是中国传统工艺画之一，指运用勾勒、皴搓、点染、烫刻、烘晕、润色等技法，以火代笔，用专用的电烙笔在竹木、丝绢、宣纸、葫芦等材料上，以人物、山水、楼阁、花鸟、虫鱼等景物为题材进行创作的绘画艺术。

The titanium surface is treated by sandblast, mechanical abrasion, chemical corrosion, etc, and activated before brush plating, so as to effectively improve the cohesion between titanium substrate and silver coating.

采用无氰电刷镀银溶液，通过对钛基体进行喷砂、机械打磨、化学刻蚀等表面处理，电镀前再经过表面活化，可有效地提高钛基体与镀银层之间的结合力。

To make such a font, which is 8 "" design process, starting with the entire electrical conduction-shares field knives, hallyo-acidproof gold、silver "" 8 only on font style parts screen business card printing and membership card, and then use the acid etching, besidesyour is not business card printing and membership card making part of the transmission unit.

制作这种"8"字型图案的工艺，首先是在带有整个电传导股的场璃上，闲耐酸性油墨仅对"8"字形部分进行丝网制卡和会员卡制作，然后用酸蚀刻，除去未被制卡和会员卡制作部分的传导股。

Etching the low dielectric constant film includes exposing the substrate to carbon tetrafluoride, oxygen, nitrogen, and argon.

对低介电常数膜进行刻蚀包括使衬底暴露于四氟化碳、氧气、氮气和氩。

This one mode pays close attention to network credence foundation of the businessman very much.

这一模式非常关注商人的网络信用基础。

Cell morphology of bacterial ghost of Pasteurella multocida was observed by scanning electron microscopy and inactivation ratio was estimated by CFU analysi.

扫描电镜观察多杀性巴氏杆菌细菌幽灵和菌落形成单位评价遗传灭活率。