热阴极

Compared with the conventional cold cathode glow discharge, the hot cathode glow discharge is a new type of gas discharge. It has many new characters, one of which is that the discharge current is quite high-about

相对于常规冷阴极辉光放电而百，热阴极辉光放电是一种新型放电形式，具有许多新的特性，其中重要一点是具有较高的放电电流(6.0~10.0A)。

Tantalum is an ideal material for hot cathode. It has a low electronic work function, high melting-point, low evaporativity, and good mechanical, high-temperature, chemical properties. Especially in a PCVD ambient for diamond film deposition, its surface is transformed into tantalum carbide which has a much higher melting-point, lower evaporativity and better properties of electron emission.

钽是一种理想的热阴极材料，它具有电子逸出功低、熔点高、蒸发率小、良好的机械性能、高温性能、化学稳定性等优异特点，尤其是在辉光放电PCVD制备金刚石膜的特殊气氛中形成的碳化钽表面层，具有比钽更高的熔点、更低的蒸发率和更好的热电子发射特性。

Comparing with the conventional cold glow discharge, the hot cathode glow discharge is a new type of gas discharge.

相对于常规冷阴极辉光放电而言，热阴极辉光放电是一种新型放电形式，对于它的工作特性，我们以前知之甚少，对于放电特性与制备工艺之间的关系也没有掌握，影响了沉积工艺的优化，没有达到最佳沉积效果。

Here, in this paper, the special properties of hot cathode glow discharge are studied from the view of hot cathode and glow discharge plasma. The relation between deposition process with discharge properties is also studied in order to optimize the deposltion process.

本文从阴极、辉光放电等离子体等角度研究热阴极辉光放电的工作特性，并系统研究放电工作特性与金刚石膜沉积工艺的关系，进而指导制备工艺的优化。

Here, in this paper, the special properties of hot cathode glow discharge are studied from the view of hot cathode and glow discharge plasma.

相对于常规冷阴极辉光放电而言，热阴极辉光放电是一种新型放电形式，对于它的工作特性，我们以前知之甚少，对于放电特性与制备工艺之间的关系也没有掌握，影响了沉积工艺的优化，没有达到最佳沉积效果。

Comparing with the conventional cold glow discharge, the hot cathode glow discharge is a new type of gas discharge. The discharge characteristics and their relation to diamond film deposition process are almost unknown to us.

相对于常规冷阴极辉光放电而言，热阴极辉光放电是一种新型放电形式，对于它的工作特性，我们以前知之甚少，对于放电特性与制备工艺之间的关系也没有掌握，影响了沉积工艺的优化，没有达到最佳沉积效果。

HCD is a thin film deposition process based on hollow hot cathode ion-electron beam and ion plating techniques.

空心阴极放电离子镀技术，是在空心热阴极离子电子束技术和离子镀技术的基础上发展起来的一种薄膜沉积工艺。

Large current glow discharge has a strong tendency to transform to arc discharge. This paper focuses our attention on the factors affecting the stability of large current hot cathode glow discharge. The research results show that the cathode temperature, the cathode surface state and the size and place disposition between cathode and anode have influences on the stability of glow discharge, respectively.

大电流辉光放电具有较强的向弧光放电转化趋势，本文研究了影响大电流热阴极辉光放电稳定工作的因素，结果表明，阴极温度、表面形貌、阴阳极位置和尺寸配置关系等对辉光放电的稳定性均有不同程度的影响。

The majority of light source comes from the fluorescent light tube, which is divided into two different types: Cold Cathode Fluorescent Lamp and Hot Cathode

光源以萤光灯管为主流，分为冷阴极管与热阴极管。构造上可分为直下型与侧光型。

The output power could be adjusted with the change of control voltage, and the reflecting power could be gotten by measuring the output voltage of attenuator and detector. 4.The thrust measurement device was calibrated, and the accuracy was 2%FS. At the same time the signal of thrust measurement was input to the computer. E-type chromel-constantan thermocouple was used to measure the temperature of MPT, and the accuracy was 5%FS.The vacuum measurement was realized by using ZDF-5427M vacuometer, and the accuracy was 3%FS.

4对推力测量系统进行了标定并实现了计算机采集，推力测量系统最大相对误差为2％FS；温度测量目前还只限于对MPT谐振腔壁温的测量，使用E型镍铬—康铜热电偶即可较容易实现，其测量精度为5％FS；真空测量采用ZDF-5427M微机型复合真空计，其由热偶计和热阴极电离计复合而成，该真空计测量控制精度为3％FS。

The absorption and distribution of chromium were studied in ryeusing nutrient culture technique and pot experiment.

采用不同浓度K2CrO4(0，0.4，0.8和1.2 mmol/L)的Hoagland营养液处理黑麦幼苗，测定铬在黑麦体内的亚细胞分布、铬化学形态及不同部位的积累。

By analyzing theory foundation of mathematical morphology in the digital image processing, researching morphology arithmetic of the binary Image, discussing two basic forms for the least structure element: dilation and erosion.

通过分析数学形态学在图像中的理论基础，研究二值图像的形态分析算法，探讨最小结构元素的两种基本形态：膨胀和腐蚀；分析了数学形态学复杂算法的基本原理，把数学形态学的部分并行处理理念引入到家实际应用中。