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热阴极

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The cathode fall region of hot cathode glow discharge is a very narrow area close to the cathode surface.

工作在高压强下的热阴极辉光放电的阴极区是一个紧靠阴极表面、极其狭窄的区域,对于金刚石膜PCVD的沉积工艺不产生直接影响,然而,它是维持辉光放电所必需的关键区域。

Especially, cathode temperature has a strong influence on the discharge property of cathode fall region via its influence on electron emission process. This is one of the most typical properties of hot cathode glow discharge.

特别是阴极温度对放电特性的影响,它是通过热阴极的温度对热电子发射过程的影响来实现的,也是区别于常规冷阴极辉光放电的一个重要放电特征。

Comparing with cold cathode glow discharge. the cathode fall region of hot cathode glow discharge has a higher cathode potential fall.

相对于常规辉光放电,热阴极辉光放电的阴极区具有较高的阴极位降,因而存在很高的电场强度。

The key difference between hot cathode glow discharge and conventional cold cathode glow discharge is that the cathode is in a hot state with the temperature about 700~1600℃ in a hot cathode glow discharge.

热阴极直流辉光放电区别于常规冷阴极辉光放电的关键之处在于,在辉光放电过程中,阴极处于700-1600℃的"热"状态,并且放电电流大,工作气压高。

The thermionic emission properties of rare earth doped molybdenum cathode and impregnatedcathode with sub-micron scandia doped tungsten matrix, and the secondary emission property of rare earth dopedmolybdenum cathode have been studied in this paper.

稀土掺杂钼热阴极发射特性和浸渍与亚微米斯坎迪亚掺杂钨阴极基体,以及稀土掺杂二级排放特性钼阴极进行了研究,在此文件。

Ferroelectrics cathode is a high-density electron beam pulse source. It has many advantages when comparing with traditional thermionic cathode.

铁电阴极是一种强流的脉冲电子束源,同传统的热电子阴极相比具有许多独特的优点,因而在高能物理、电子学、真空微电子等领域有可能取代普通热阴极及场发射阴极。

Also the discharge current and gas pressure are both high. The study of the cathode properties such as its material, reaction with gases in a PCVD ambient, temperature, surface state, etc, comes to the conclusions which are much different with that of the cold cathode glow discharge.

由此导致了对于阴极材料的选择、阴极在PCVD气氛中的反应、阴极的工作温度、表面状态等涉及到阴极性质的研究工作,均得到有别于常规冷阴极辉光放电的具有热阴极特征的结论。

The key difference between hot cathode glow discharge and conventional cold cathode glow discharge is that the cathode is in a hot state with the temperature about 700~1600℃ in a hot cathode glow discharge.

热阴极直流辉光放电区别于常规冷阴极辉光放电的关键之处在于,在辉光放电过程中,阴极处于700-1600℃的&热&状态,并且放电电流大,工作气压高。

The diamond film deposition experiments with hot cathode glow discharge PCVD shows that the cathode temperature has no apparent influence on deposition rate and film quality. With the increase of gas pressure, the gas density, electron temperature, gas dissociation rate in the plasma region change differently.

热阴极辉光放电PCVD沉积金刚石膜中,适当的阴极温度是保证大电流、高气压辉光放电稳定工作的必要条件,它影响着辉光放电阴极位降区的放电性质,但对金刚石膜的沉积速率和膜品质基本没有影响。

Hot cathode glow discharge chemical vapor deposition is a new method to deposit high quality diamond films with high deposition rate.

中文题名热阴极辉光放电及其等离子体化学气相沉积金刚石膜研究副题名外文题名 Study of hot cathode glow discharge and its plasma chemical vapor deposition of diamond films 论文作者白亦真导师金曾孙教授学科专业凝聚态物理研究领域\研究方向学位级别博士学位授予单位吉林大学学位授予日期2001 论文页码总数139,10页关键词金刚石膜薄膜制备热阴极辉光放电等离子体化学气相沉积馆藏号BSLW /2003 /TB43 /1 热阴极辉光放电等离子体化学气相沉积是我们建立的快速沉积高品质金刚石膜的新方法。

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