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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.
在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器,对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计,建立了器件的三维实体模型以及两维降阶模型,对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计,同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程,开展了一系列重要工艺步骤的单项工艺试验,对工艺流程与工艺参数进行了优化,针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析,并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合,建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。
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Series 709DCDA Double Check Detector Assemblies are designed exclusively for use in accordance with water authority containment requirements.
系列709DCDA双止回阀检测器总成专用于满足水主管部门的密封要求的应用场合。
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In the design of drip irrigation system, reasonable dripper discharge should be chosen and irrigation water should be supplied in order to make soil reach the designed moisture uniformity; the moisture uniformity of soil along the drip irrigation pipe should be controlled mainly.
文中提出了应用于工程设计中的滴头流量设计模式应满足的要求。在滴灌系统设计中,要使土壤达到设计的湿润均匀度就应选择合理的滴头流量,并设计出合理的灌水量,而且应主要控制沿滴灌管方向的土壤湿润均匀性。
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Integrating both advantages of hydrogen fuel cell and organic fuel cell, the fuel cell satisfies dual requirements of operating at low power and high power, providing features of low cost, simple structure and easy of implementation.
该电池集现有以氢为燃料和以有机燃料为燃料的电池的优点于一身,可同时满足低功率和高功率运行对电池的双重要求,不仅成本较低,而且结构简单,易于实施。
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However, in China, since secular durance from doctrine of soviet statistical index theory, researches on indices are apparently inferior to international advanced level, which results in the singleness and obsolescence of the methods in compilation of indices, inapplicable to satisfy the increasing analysis demands in market economy.
但在中国,由于长期受到前苏联统计指数理论教条的禁锢,相关的研究明显落后于国际先进水平,由此导致实践中运用的指数编制方法单一、笨重,时效性较差,适用面较窄,不利于满足市场经济条件下日益增长的多种分析需要。
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Is our accelerated software development and business optimization process, giving our client organizations the power to focus on core services and have peace of mind. worksoft offers scale, efficiency, quality and an expert pool of international talent and management to deliver a high degree of performance to clients worldwide.
我们将解决方案定位于商务和科技完美结合的动态环境中,从而为客户提供高质量的服务,满足客户在规模、效率、质量、专业能力等全方位的要求,帮助企业客户勾画并实现技术驱动的商业变革和创新。
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This is a kind of evolutionary elliptic free boundary problems, in which the free boundary changes with time and at each fixed time the unknown function satisfies a boundary value problem for an equation of elliptic type.
详细本文分两部分。第一部分讨论拟定常电加工问题。这是一类发展型的椭圆自由边界问题,其自由边界依赖于时间的变化而不断演化,在每一固定时间,未知函数满足椭圆型方程的边值问题。
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The Company in order to further adapt to the market and meet customers needs, in September 2003 in Tong County, Hubei Province, Xishan Town Industrial Park Youjuan invest more than 1 million to establish a branch; mainly produce and sell enameled wire, enamelled wire, headphones line series and semi-finished products.
本公司为了进一步适应市场而满足广大客户需要,于2003年9月在湖北省通城县隽水镇锡山工业园投资一千余万元成立了分公司;主要生产销售漆包线、漆包绞线、耳机线成品系列及半成品。
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We should do our best to protect and improve our ecological environ
我们要努力保护和改善生态环境,使经济发展既满足当代人的需要,又造福于子孙后代。
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For this method, integeral was proceed by triangular Gaussian quadrature method in polygon domain, which can reduce computational time greatly. Neighbor nodes database was create which can reduce neighbor nodes searching time. Rock and soil cutting problem are two complicated problems, so a robust method is needed to treat essential boundary condition.
岩土掘削数值分析要求无网格法拥有高效而适应性强(来源:ABC论文f1网www.abclunwen.com)的本质边界条件处理方法,本文提出一种新的处理方法,该方法通过改变边界节点权函数使试函数通过边界节点,并采用对角元素改1法满足本质边界条件,该方法灵活性强,适用于各种岩土掘削问题。
- 推荐网络例句
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By the time of its fall, most of the prisoners were writers who had written against the corruptions of the government.
到它被攻陷的时候,里面多数的犯人是写了反对政府贪污文章的作家。
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The most obvious variation to ovum morphological character was that the color was changed from light green to sepiaceous in embryonic development, and all the ovums were almost hatched after 96h.
在胚胎发育过程中卵的形态特征最明显的变化是颜色从淡绿到深褐色,卵在发育96h后卵基本全部孵化。
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There was a conflict between plebs and patricians in ancient Rome in 494BC.
在公元前494年,罗马发生了一次平民反对贵族的斗争。