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Under the existing condition of the lab, a lot of experiments, analyzing and improving are made. Now, the problems in photoengraving, sputtering and diffusion etc. have been solved elementally. Excellent technological parameters are achieved and 2×2 LiNbO3 waveguide optical switch has been fabricated successfully. At the end of this paper, the losses of 2×2 LiNbO3 waveguide type optical switch are analyzed. The testing system is established. The V-grooves used for coupling have been designed.

我们在现有的实验条件下,经过反复实验,分析和改进,克服了光刻,溅射,扩散等各个阶段中的难题,总结出各部分最优的工艺参数,制备出了2×2定向耦合器型光波导开关,在本文的最后对制备出的光波导开关的各种损耗进行了分析,建立了测试系统,对光开关进行了通光测试,并对本2×2定向耦合器型光波导开关以后的耦合封装V型槽进行了设计。

Secondly, we deal with the ripple of start and end points to represent the flow effect of waterfall. Finally we add the spattering model in the system to simulate the ordinary cartoon spattering scene of obstacle and the obstacle with big frontispiece.

对瀑布起点和终点的波特别处理,表现出水的流动效果,同时增加了溅射模型,使系统能够更好地模拟出一般障碍物,以及正面大的障碍物溅水等常见的动画场景。

AlN MSM devices were fabricated on AlN epitaxial thin film deposited on GaN/Sapphire substrates using helicon sputtering system at the low temperature of 300°C. The device characteristic was found to be improved by in situ metallization of Al electrodes. The extremely low dark current (1.39pA at 20V), the ideal factor (1.0125) and the Schottky barrier height (0.916eV) are superior compared to those of AlN MSM in the literature. When the device was illuminated by the 150W D2 lamp, the ratio of the induced photocurrent to dark current is more than 2 orders of magnitude. The illumination effect also shows the linear relationship between the radiation power and the photo current for the MSM devices, indicating the potential applicability for deep UV sensors.

氮化铝金属-半导体-金属光侦测器则是用In situ metallization制程,利用低温回旋溅镀法在氮化镓/蓝宝石基板上沉积之氮化铝,再直接溅镀金属铝作为指叉电极,比较目前文献制作出来的氮化铝MSM元件,可得到很好的元件金半接面之理想因子1.0125,算出萧特基能障高度为0.916eV,并有很低的暗电流为1.39 pA,提升了元件的特性,使用150 W氘灯入射,光暗电流差距可到两个order,且元件之光电流与入射光功率呈线性,显示所制作之氮化铝MSM元件,很适合针对深紫外光波段侦测。

Firstly,nanostructure ZnO materials were controllably deposited by radio frequency magnetron sputtering method,with optimized Ar/O_2 ratio and sputtering power,choosing suitable buffer layers.

利用磁控溅射方法,通过优化制备过程中的氩氧比和溅射功率等工艺条件,选择合适的缓冲层材料,在硅衬底制备出了结构和尺度可控的ZnO纳米结构材料。

In this research, we prepared Mo doped ZnO thin films on glass a substrate using co-sputtering to improve the conductivity of ZnO. The incorporated concentration of Mo atoms in ZnO was controlled by adjusting the aperture size of a shutter palaced in front of the Mo target. Textured morphology of ZnO film could be formed by attaching a metallic mask on the substrate.

本研究,欲以钼(Molybedeun, Mo)金属掺杂来提升氧ZnO薄膜之导电性,使用一般玻璃做为基板,利用射频溅射ZnO靶材及直流溅射Mo靶材进行共镀,Mo掺杂浓度是藉由钼靶前之挡板中的开口大小来控制,实验中改变基板温度(50℃、100℃、200℃、300℃)并进行镀膜后低压退火处理,藉此探讨Mo掺杂对於ZnO薄膜光电特性之影响,并找出最佳化制程参数。

By means of magnetically controlled reaction and sputtering process, metal tin is oxidized, and tin oxide film in nano level is formed on silicon chip and further oxidized and annealed to form the nano crystal particle tin oxide film. The nano crystal particle tin oxide film has the features of great specific surface area, homogeneous thickness, high surface smoothness, high sensitivity, high stability and others.

本发明采用磁控反应溅射方法使金属锡氧化,在硅片上生成锡的纳米量级氧化物薄膜,再进一步氧化、退火,即可制造出纳米晶粒氧化锡薄膜,该氧化锡纳米敏感薄膜具有氧化锡颗粒度小,比表面积大,厚度均匀等特点,且表面平整度高,在100倍显微镜下观察没有裂痕,有利于提高气敏传感器的灵敏度和稳定性,通过溅射时间严格地控制膜厚,可重复性高,适合于批量生产。

Soil or stain with a splashed liquid.

溅出的液体弄脏或沾污。

Face hanging drops - I do not know the rain is the tears - flowing slowly in my face, along with the rain fall, draw down the final pieces in the grass splash a ripple.

脸上挂着的水珠--不知是雨是泪--慢慢地在我脸上流淌,与雨水一同滑落,划落,最终在草地上溅出一片片涟漪。

If DMSO is spilled, wash well with soap and plenty of water.

如果DMSO溅出,用肥皂和大量水清洗乾净。

If DMSO is spilled, wash well with soapand plenty of water.

如果DMSO溅出,用肥皂和大量水清洗干净。

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They weren't aggressive, but I yelled and threw a rock in their direction to get them off the trail and away from me, just in case.

他们没有侵略性,但我大喊,并在他们的方向扔石头让他们过的线索,远离我,以防万一。

In slot 2 in your bag put wrapping paper, quantity does not matter in this case.

在你的书包里槽2把包装纸、数量无关紧要。

Store this product in a sealed, lightproof, dry and cool place.

密封,遮光,置阴凉干燥处。