测高

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

Compare the result with that of direct sequencing to draw the conclusion.

基因芯片检测结果与直接测序结果具有很高的符合率。

In this thesis, several key techniques used for the tractor drawbar and noise measuring system, i.e., parallel port communication interface techniques, high-accuracy wide-range speed measurement techniques and noise analysis approaches are studied.

文中采用了一些关键技术，如并行口通信接口技术、高精度宽量程的测速技术以及噪声分析方法等。

The new combination drilling dynameter is developed, which has the characteristics of high accuracy, little interference between forces and simple structure.

研制了测量精度高、相互干扰小、制造简单的新型组合式钻削测力仪和钻削力测量系统，对新刃形钻头的钻削机理进行了实验研究。

To change the pick type, the cutting depth etc, so as to observe their influences on the deformation and destruction law of coal body; To adopt octagonal ring dynamometry made by ourselves and signals picking up system of multi-channel, low frequency and high-accuracy so as to monitor the cutting force in coal cutting course; To adopt the high-speed photography method, so as to shoot the cutting course and analyze the law of shaping.

改变截齿类型、截割深度等，观察对煤体变形破坏的影响；采用自制的八角环测力仪和多通道低频高精度信号拾取系统对截齿截割煤体过程中的截割力进行了在线监测；采用高速摄影的办法拍摄截割过程，分析变形破坏的规律。

An integrated geophysical technology,combing the main method of ground high resolution electric sounding and ground stable Ray wave technology and the supplement method of ground shallow seismic prospecting and discharge monitoring technology,is used in Huangling fast mural water project.

使用地面高分辨电测深法与稳态瑞利波法为主，浅层地震和流量监测为辅的快速综合物探技术，对黄陵一号井小煤窑突水通道进行多方法、多参数、多方位聚焦快速综合探测，克服了单项物探多解性的缺点，大大提高了探测准确度。

The stress-strain curves of Cu-Zn-Al alloys at different temperatures have been plotted on the tensile machine with the aid of electrometry. The main results were as follows: 1. When specimens were deformed within the range of M_s and M_d, the critical stress for inducing martensitic transformation increased with the temperature, and there existed a linear relationship between them. 2. When specimens were deformed above Af, complete pseudoelasticity might be obtained theoretically, which might be damaged, h...

在拉力试验机上用电测法测绘了Cu-Zn-Al合金在马氏体相变点上下各温度的σ-ε曲线，所得主要结果如下：(1)试样在M_s与M_d之间加载，随着温度升高，诱发马氏体相变所需临界应力增大，且加载温度与临界应力之间存在着线性关系；(2)在A_f点以上加载，理论上可获得完全的伪弹性，但加载温度过高或应变量过大，均会损害伪弹性；(3)试样在M_s点上下温度区域变形，得到的伪弹性回复和形状记忆回复之和在80%以上，但在M_s点附近总回复量出现一极小值，且伪弹性回复在M_f点以下又有所回升。

With widely used of electromotor in industry field, higher and higher requirements are put forward to reliability of its measurement and control circuit which decided by many kinds of factors.

随着电动机在工业领域中的广泛应用，对其测控电路的可靠性提出了越来越高的要求。

Through point-by-point scanning measurement for elliptic cylinder by phase method, the height difference between neighbouring isohypses is:△z≈4.5mm, and measuring accuracy is±1mm.

用相位法对椭圆柱面样品进行逐点扫描测量，测得相邻等高线高差△z≈4.5mm，测量精度为±1mm。

A Fabry-Perot etalon with high spectral resolution is used as the frequency discriminator in the direct detection wind lidar.

在直接探测测风激光雷达中，多普勒频移由高分辨率的Fabry-Perot标准具检测得到。

Breath, muscle contraction of the buttocks; arch body, as far as possible to hold his head, right leg straight towards the ceiling (peg-leg knee in order to avoid muscle tension).

呼气，收缩臀部肌肉；拱起身体，尽量抬起头来，右腿伸直朝向天花板（膝微屈，以避免肌肉紧张）。

The cost of moving grain food products was unchanged from May, but year over year are up 8%.

粮食产品的运输费用与5月份相比没有变化，但却比去年同期高8％。