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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

The women's aerobic fitness (peak absolute oxygen consumption) was measured using a cycle ergometer.

应用蹬车测力器测定她们的有氧适能。

Robot wrist sensor is used to measure the force torque between the grasper at the robot's arm end and environment, and is very useful for robot to accomplish the task such as assembly, contour-following, teaching, polishing, etc.

机器人六维腕力传感器测力系统被用来测定机器人手臂末端的夹持器与外界接触时产生的力和力矩，在机器人从事装配、轮廓跟踪、示教、研磨等作业中有着重要的应用价值。

To realize its effect, this study implemented force transducer to measure hand force, and foot pressure sensor to measure weight bearing of lower extremity when patient wearing traditional PARAPODIUM. Additionally, the physiological cost index and walking speed were evaluated simultaneously.

为了解其效能，本研究透过力感测器量测传统的PARAPODIUM使用时手部力量大小，利用足压感测器测量下肢在传统PARAPODIUM的承重状态，并量测生理能量消耗（Physiological Cost Index，PCI）、走路速度及作用力矩。

Proton generated from a Cockroft-Walton accelerator in the energy range of 30-100 keV were appropriately collimated and made to pass through a 10 g/cm^2 carbon foil. After Rutherford scattering, proton uniformly irradiated TLDs which were placed at the 20° behind and 20 cm away from the carbon foil. We used a channeltron behind TLD holder as the proton detector.

由Cockroft-Walton加速器提供之质子源，能量在30~100keV间，经准直后通过一10 g/平方公分之碳膜做拉塞福散射，散射后之质子均匀打在置於其后20°的压克力置装器内的热发光剂量计，利用压克力置装器后之一电子倍增器作为量测质子工具。

The main testing equipments: clean table, spectrophotometer, water insulation thermostated incubator、biological microscope、pressure steam sterilizer、electric drying apparatus、lasting pressure testing、insulating resistance testing, pipe testing and etc. The 100,000 level epuration workshop, first level produce management, perfect test equipment and biochemistry experiment equipment. It can ensure use safty.

主要检测设备有：超净工作台、分光光度计、隔水式恒温培养箱、生物显微镜、压力蒸汽灭菌器、电热干燥箱、耐压测试仪、绝缘电阻测试仪、管型测力器等。10万级净化车间，一流的生产管理模式，完善的检测设备和生化实验设施，可确保您的使用安全。

The company's product line is mainly divided into: strain force / weight sensors, strain gauge torque / force many sensors and transmitters, strain sensors and fluid pressure-type transmitter and sensors with high precision strain gauge resistive products such as .

公司的产品线主要分为：应变式测力／称重传感器、应变式扭矩／多分力传感器及变送器、应变式流体压力传感器及变送器和传感器用高精度电阻式应变计等产品。

Our products are high precision load cell, little non-linearity and Hysteretic, little creep, have little temp. effect on zero. have high defend grade, they ensure products Longley stability.

称重传感器、压力传感器、称重系统小型衡器传感器称及变送器，测力称重传感器主要特性是高精度，非线性及滞后误差小、蠕变小、零点温度影响小、防护等级高，保证了产品的长期稳定性。

Our products are high precision load cell, little non-linearityHysteretic, little creep, have little temp. effect on zero. have high defend grade, they ensure products Longley stability.

称重传感器、压力传感器、称重系统小型衡器传感器称及变送器，测力称重传感器主要特性是高精度，非线性及滞后误差小、蠕变小、零点温度影响小、防护等级高，保证了产品的长期稳定性。

The hammer with the force sensor strikes the static rotor correction plane to send the excitation signals measured by the force sensor to the charge amplifier and to the signal collector.

由带力传感器的力锤敲击静态转子校正平面部位，将力传感器测得的激励信号送入电荷放大器，经放大后送入信号采集器，由电涡流传感器测得转子多个校正平面部位的位移响应信号，经电涡流测振仪放大后送入信号采集器，根据传递函数和影响系数之间的关系，可获得转子校正部位的影响系数。

According to the clear water experiment, aeration performance of the new equipment is good with high total oxygen transfer coefficient and oxygen utilization ratio.

曝气设备的动力效率在叶轮转速为120rpm～150rpm时取得最大值，此时氧利用率和充氧能力也具有较高值。

The environmental stability of that world - including its crushing pressures and icy darkness - means that some of its most famous inhabitants have survived for eons as evolutionary throwbacks, their bodies undergoing little change.

稳定的海底环境─包括能把人压扁的压力和冰冷的黑暗─意谓海底某些最知名的栖居生物已以演化返祖的样态活了万世，形体几无变化。