流体静力学的

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

ANSYS has friendly operating environment, strong functions and perfected post-processing. ANSYS can be applied to a lot of project fields and it can carry out structure analysis, nonlinear analysis, thermal analysis, electromagnetic field analysis, electric field analysis, fluid flow analysis and coupled field analysis etc.A combination beam is designed and on this beam simulation test using ANSYS and strength test using electrometric method are studied and contrasted. The result of the test shows that the ANSYS is reliable and can be applied to the engineering design and calculation without accident.

ANSYS软件是融结构、流体、电场、磁场、声场设计计算于一体的大型CAE软件，经过30多年的发展，取得了辉煌的成绩，并形成很多独有功能；ANSYS使用环境友好，功能强大，后处理技术完善；ANSYS在各类工程领域均有应用，可进行结构分析、非线性分析、热分析、电磁场分析、电场分析、流体流动分析、耦合场分析等；设计制造了一个组合梁，分别对其进行了ANSYS静力学强度数值模拟和电测法应力试验，对结果进行了对比分析，试验结果表明：ANSYS功能强大，分析数据安全可靠，可放心用于工程设计与计算。

Analysing the reasons of floating for objects in the reference system of non-inertia, the paper discusses the relationship between the depth and time, as well as the floating object and its acceleration, these relationships will provide convinient to explain some questions of the hydrostatics.

摘要通过分析浮体在非惯性参考系中浮沉的原因，探讨浮沉的深度与时间的关系、浮沉体积与加速度的关系，这些关系将给解释一些流体静力学问题带来方便。

The stability criteria on the hydrostatics theories are used to estimate whether aship in the heavy seas capsize or not,this method ignores the time domaincharacteristics, frequency characteristics and the randomicity of ship motions. Thecapsizing accidents occur now and then although ships are designed according tostability criterion. So, it is also the important problem for human beings to investigatethe nonlinear characteristics of ship motions and evaluate the survival ability of ships.

目前的稳性标准是根据流体静力学理论来评判船舶在风浪中的安全行为，这种方法忽略了船舶运动的时域特性、频域特性及随机性，按照目前稳性规范设计的船舶仍然时有倾覆发生，因此研究船舶的非线性运动特性和评估船舶航行的生存能力，仍然是人类面临的重大课题。

It's form is the contribution of the Reynolds stress tensor and magnetic fluctuating tensor.

主要的表现是：第一，Reynolds stress 张量和磁扰动张量的径向分量贡献给压强，引起太阳内部流体静力学平衡方程和太阳内部热力学变量的改变，从而导致温度、密度、内能、绝热指数以及绝热温度梯度等的变化。

Plunder melds and run with this jewel!

掠夺melds和运行与此宝石！

My dream is to be a crazy growing tree and extend at the edge between the city and the forest.

此刻，也许正是在通往天国的路上，我体验着这白色的晕旋。