流体静力学

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

ANSYS has friendly operating environment, strong functions and perfected post-processing. ANSYS can be applied to a lot of project fields and it can carry out structure analysis, nonlinear analysis, thermal analysis, electromagnetic field analysis, electric field analysis, fluid flow analysis and coupled field analysis etc.A combination beam is designed and on this beam simulation test using ANSYS and strength test using electrometric method are studied and contrasted. The result of the test shows that the ANSYS is reliable and can be applied to the engineering design and calculation without accident.

ANSYS软件是融结构、流体、电场、磁场、声场设计计算于一体的大型CAE软件，经过30多年的发展，取得了辉煌的成绩，并形成很多独有功能；ANSYS使用环境友好，功能强大，后处理技术完善；ANSYS在各类工程领域均有应用，可进行结构分析、非线性分析、热分析、电磁场分析、电场分析、流体流动分析、耦合场分析等；设计制造了一个组合梁，分别对其进行了ANSYS静力学强度数值模拟和电测法应力试验，对结果进行了对比分析，试验结果表明：ANSYS功能强大，分析数据安全可靠，可放心用于工程设计与计算。

Cylinders and mobile tubes are hydrostatically tested upon manufacture and tested periodically thereafter at 5/3 times the service pressure, as specified by DOT regulations.

正如DOT规范所规定的，钢瓶和移动管道在制造时经过了流体静力学测试，随后还要在压力为工作压力的5/3倍时定时测试。

The difference of fluid statics between different infiltration modes was studied. It was found that it was necessary to apply pressure to assure the transverse infiltration even if the C/Mg composite is a wettable composite system.

研究了不同浸渗方式的流体静力学差异，发现即使对于润湿的复合材料体系，外加压力也是保证横向浸渗顺利进行的必要条件。

Finally, the floating ice region of the whole ice stream was illustrated according to hydrostatic equilibrium theory.

最后按流体静力学平衡条件对该流域的漂浮冰部分重新进行了标定。

The concept of equivalent rotationally rigidity is offered and the formula of rotationally rigidity is obtained.

主要做了如下几个方面的工作：对伸臂位于顶部的单层框架—筒体模型进行分析，提出了等效转动约束的概念和转动约束刚度的表达式。

Male cats normally do not need aftercare with the exception of the night after the anesthetic.

男猫通常不需要善后除了晚上的麻醉。