氧化物薄膜

Because of these advantages of the lead oxide, the lead oxide thin films are widely used in the transparent conductive oxide thin films, camera tube, photoconductive detector, electrode materials, gas sensor and many other fields.

本文综合论述了金属氧化物薄膜的一些主要的制备方法，氧化铅的基本性质以及在现代技术中的一些应用和最新的进展，首次采用直流反应磁控溅射方法制备了氧化铅薄膜，并研究了工艺参数对氧化铅薄膜的晶体结构，光学性质的影响。

In this subject, we have successfully prepared ordered oxide films on the single metal crystals including aluminum oxide, vanadium oxide, cerium oxide, chromium oxide and magnesium oxide in nano size.

本项目在超高真空中制备了各种纳米有序氧化物薄膜（包括氧化铝、氧化钒、氧化铈、氧化镁和氧化铬）和氮化铈薄膜。

In the end, we sum up the current research in the manganite thin films (such as the influence of oxygen stoichiometry, lattice-misfit strain and angle distortion induced strain on the thickness effects) and some existent issues.

最后讨论了锰氧化物外延薄膜的制备方法，及影响锰氧化物薄膜结构和电磁性质的相关因素(如氧含量，晶格失配应变，薄膜厚度，角度畸变及热膨胀系数等)以及期待解决的问题。

In the end, we sum up the current research in the manganite thin films and some existent issues.

最后讨论了锰氧化物外延薄膜的制备方法，及影响锰氧化物薄膜结构和电磁性质的相关因素以及在制备薄膜时需要注意的问题。

This dissertation consists of five chapters. The arrangement of the chapters and the main contents in each chapter are presented as follows:In chapter 1, we make a brief introduction to all kinds of magnetoresistance effects; the basic properties of the perovskite-type manganese oxides, including research history, crystal structure, electronic structure, magnetic structure, and the electronic and magnetic phase diagrams; the strain relaxation of manganite thin films; and the research progress in application.

各章的主要内容分别概括如下：第一章简单介绍了各种磁电阻效应；钙钛矿锰氧化物的基本性质，包括研究历史、晶体结构、电子结构、磁结构和电磁相图；锰氧化物薄膜中应力弛豫；锰氧化物在应用方面的研究进展。

This project was established based on the first cooperative development of optical in situ real time detecting technique probing the atomic scale layer-by-layer epitaxy growth of oxide film. Over the last three years, we have given full play to the advantages and characteristics of both sides and have finished the assumptions and plans of this subject satisfactorily. 1. In Institute of Physics, we set up advanced oblique-incidence reflectivity difference equipment and wrote one data acquisition procedure that made the simultaneous detection of optical signal and RHEED signal into reality. 2. The first observation of sustained oscillations over hundreds of monolayers in both real and imaginary signals during the epitaxy growth of SrNb0.1Ti0.9O3 on SrTiO3 substrate in LMBE testifies that oblique-incidence is an excellent method to detect and monitor film epitaxy growth real time. 3. For the first time, we verify that oblique-incidence reflectivity difference method can be used to monitor the layer-by-layer growth mode during continuous growth through the correspondence between optical signals to atomic or molecular step edge density on the growth surface. 4. Phenomenological analysis shows that optical signals comprise three parts, the first is proportional to the average thickness of the film and depends on the bulk phase dielectric response; the second is proportional to the coverage of terraces and depends on the dielectric response of atoms or unit cells in the terrace; the third is proportional to the coverage of step edges and depends on the effective dielectric response of atoms or unit cells at step edges. This makes oblique-incident reflectivity difference technique a quantitative macroscopic method to monitor film growth.

中文摘要：本课题是在合作首次发展了氧化物薄膜原子尺度层状外延生长光学原位实时探测方法的基础上立项的，三年来，我们充分发挥双方的优势和特点，圆满完成了课题的设想和计划。1、在物理所建立了一套先进的光反射差法装置，编写了计算机系统的数据采集程序，实现了两路光学信号和RHEED数据的同步采集和显示。2、用激光分子束外延在SrTiO3基底上生长SrNb0.1Ti0.9O3薄膜，首次观测到连续外延几百个原胞层，周期振荡的光反射差实部和虚部信号，证明了光反射差法是一种能原位实时探测与监控薄膜层状外延生长的好方法。3、首次验证了通过对生长表面原子或分子台阶密度的响应，光反射差法可用于原位实时监测在连续生长条件下薄膜的层式生长模式。4、通过唯象理论的研究，证明光反射差信号由三项组成，第一项只与薄膜的平均厚度和宏观光学电介质常数有关；第二项与分子台阶面覆盖度和台阶面上分子层的光学电介质常数有关；第三项与台阶边缘的覆盖度成正比，并和在台阶边缘的分子的有效光学介电常数有关。

It was believed that the film gas sensors based on semiconducting ceramics will be one of the development trends in gas sensors research in the near future.

本文介绍了陶瓷型半导体薄膜气敏传感器常见的器件结构、薄膜材料的主要制备方法，部分主要的半导体金属氧化物薄膜气敏材料，以及近期相关的研究进展，并扼要分析了今后的发展方向。

On this bases, according to the electronic configuratiosn of antimony oxide and the principle of p-type doping in wide band-gap semiconductors oxides, we tried to develop a new transparent conducting tin-antimony oxide films with p-type conduction.

在此基础上，根据氧化锑的电子结构特征和宽禁带氧化物p型掺杂机理，尝试在氧化锑中掺入适量Sn元素以获取一种新型p型透明导电氧化物薄膜。

The vanadium oxide films were characterized by X-ray diffraction and X-ray photoelectron spectra . It is found that the formation of vanadium oxide films was affected by substrate temperature and annealing time, because high substrate temperature and annealing were favorable to further oxidation.

采用X-射线衍射和X-射线光电子能谱对钒氧化物进行了表征，发现钒氧化物薄膜的形成受衬底温度和退火时间的影响，因为衬底温度以及退火有利于进一步氧化。

By means of magnetically controlled reaction and sputtering process, metal tin is oxidized, and tin oxide film in nano level is formed on silicon chip and further oxidized and annealed to form the nano crystal particle tin oxide film. The nano crystal particle tin oxide film has the features of great specific surface area, homogeneous thickness, high surface smoothness, high sensitivity, high stability and others.

本发明采用磁控反应溅射方法使金属锡氧化，在硅片上生成锡的纳米量级氧化物薄膜，再进一步氧化、退火，即可制造出纳米晶粒氧化锡薄膜，该氧化锡纳米敏感薄膜具有氧化锡颗粒度小，比表面积大，厚度均匀等特点，且表面平整度高，在100倍显微镜下观察没有裂痕，有利于提高气敏传感器的灵敏度和稳定性，通过溅射时间严格地控制膜厚，可重复性高，适合于批量生产。

This one mode pays close attention to network credence foundation of the businessman very much.

这一模式非常关注商人的网络信用基础。

Cell morphology of bacterial ghost of Pasteurella multocida was observed by scanning electron microscopy and inactivation ratio was estimated by CFU analysi.

扫描电镜观察多杀性巴氏杆菌细菌幽灵和菌落形成单位评价遗传灭活率。