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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器,对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计,建立了器件的三维实体模型以及两维降阶模型,对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计,同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程,开展了一系列重要工艺步骤的单项工艺试验,对工艺流程与工艺参数进行了优化,针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析,并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合,建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

To investigate the ultrastructure and the connection structures between primarily cultured neuroglial cells, the atomic force microscopy was used.

本研究利用原子力显微技术观察原代培养的神经胶质细胞及其相互间的纳米连接结构。

Of the recording media using scanning probe microscope, including scanning tunneling microscope, atomic force microscope, scanning near-field optical microscopy, etc., nanometer-scale data storge can be successfully achieved, and this technology has been considered as one of the best way to promote the storage density.

扫描探针显微技术通过改变材料的光、电、磁等局域特性可以实现纳米尺度的信息存储,成为提高信息存储密度的最有效手段之一。

The result showed that inoculated with plants were increased obviously while that of control.

应用显微技术探讨铁皮石斛与菌根真菌之间的相互作用。

BE careful during manicuring the HA to avoid impairing it. It may evidently diminish the incidence of the complications of HA by using MVT. It is effective and safe to use coagulant factors and hemostasis drugs appropriately. It may not increase the incidence of therombosis in the HA.

原位肝移植中供肝的肝动脉变异较多见,修剪肝动脉时应加以注意,避免误伤;正确采用血管外科显微技术,可明显减少肝动脉并发症的发生;适当应用凝血因子、止血药物安全有效,不增加肝动脉血栓形成等并发症。

With the assistance of molecular probes for reactive oxygen species, the production and localization of ROS derived from embryo, starch and aleurone layer of maize seeds with different ages were investigated under a laser scanning confocal microscope and a luminescence spectrometer.

摘 要:借助活性氧发光分子探针,利用荧光光谱和激光共聚焦扫描显微技术,在不同年份的玉米种子吸胀早期,对其胚、淀粉和糊粉层细胞活性氧生成进行了定量和亚细胞定位分析。

First of all, it's necessary to find the responds of biofilm development by electrochemical method or biological method.

本文利用电化学方法和荧光显微技术对六种金属材料微生物附着的电化学特征进行了研究。

The use of microscopy of phase-contrast is very useful for very thin cuticles as it shows greater contrast.

对于已经获取到的角质层,利用相差光学显微技术可以增加反差。

We described here the first attempt to apply electrophysiological and optical methods to monitor exocytosis and endocytosis in primary cultured C.

我们首次应用电生理和荧光显微技术来监测原代培养的线虫细胞的胞吐和胞吞。

The present study is involved in the expression of vitronectin , a ligand of integrin, on human spermatozoa and its role in fertilization; the expression of integrin α〓、α〓、β〓 sbunits on human and mouse oocytes and their relationship with maturation of oocytes; the reorganization of cytoskeletal protein, actin, of mouse oocytes mediated with RGD peptide binding with integrins; the roles and mechanisms of integrins in activation of mouse oocytes as trasmembrane signaling receptors, using the methos of cell culture, immunohistochemistry, flow cytometer, laser confocal microscope.

本课题采用细胞培养、免疫组化、流式细胞术、激光共聚焦显微技术进行以下四个方面的研究:整合素配体玻连蛋白在人精子的表达及其与精子功能状态及受精的关系:整合素〓在人、小鼠卵的表达及其与卵的成熟程度的关系:整合素介导小鼠卵内actin骨架蛋白的重组;整合素介导卵激活的早、晚期事件,包括卵细胞内钙离子浓度的变化及孤雌发育胚的形成,并探讨其机制。

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This one mode pays close attention to network credence foundation of the businessman very much.

这一模式非常关注商人的网络信用基础。

Cell morphology of bacterial ghost of Pasteurella multocida was observed by scanning electron microscopy and inactivation ratio was estimated by CFU analysi.

扫描电镜观察多杀性巴氏杆菌细菌幽灵和菌落形成单位评价遗传灭活率。

There is no differences of cell proliferation vitality between labeled and unlabeled NSCs.

双标记神经干细胞的增殖、分化活力与未标记神经干细胞相比无改变。