微系统

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

The simulation result shows the collection efficiency of TIR lens model is 67% when the angle of light is confined within 15°. And the uniformity on observation screen is improved in some degree. The optimal design of TIR lens further provides the development space of LED micro-projection display system.4 On the base of the theory research and the model simulation, four projection display systems which have LCOS as micro-display panel and which combine different optical devise for UHP and LED light source respectively are proposed in this dissertation. And the quality of projection display system is evaluated by thesimulation outcome.

模拟结果表明，优化后的TIR透镜可实现将LED大角度扩展光束中67％的光能压缩到15°范围以内，并使目标屏的照明均匀性得到一定的改善，这为LED光源微投影显示系统设计提供了新的发展空间。4在以上理论研究和模拟分析的基础上，将优化和改造得到的照明光学元件应用到微投影显示的照明系统设计中，分别采用UHP和LED光源，设计了四套单片式LCOS微投影显示系统模型，通过光线追迹模拟结果，对系统性能进行了评价分析和对比。

Longtium"" PC 104 motherboard in industrial control field based on ""Longtium"" S1 could run DOS and relevant applications.2. Systemically analyze the architecture of ""Longtium"" Cl microprocessor. The principle, characteristic of instruction system is discussed and its history is introduced. In addition, the microinstruction format of ""Longtium"" Cl microprocessor is defined and the microprogramming controller is designed.3. Present the design scheme of microprogramming developing platform. The microinstruction compiler and emulator are developed. Moreover, the relevant optimization and verification are conducted.4. The microprogramming developing platform is used in the developing of ""Longtium"" Cl. It enhanced the developing efficiency of microprogramming.

以"龙腾"C1为核心的SOC芯片——"龙腾"S1已经采用SMIC 0.18um COMS工艺流片成功，基于"龙腾S1"实现的"龙腾"PC104工控系统主机板能正确运行DOS操作系统和应用程序； 2、系统分析了"龙腾"C1微处理器体系结构，研究了指令系统的原理、特点以及指令系统的发展，确定了"龙腾"C1微处理器的微指令格式，并完成了微程序控制器设计； 3、提出了微程序开发平台的设计方案，开发了微指令汇编器和微指令仿真器，并进行了相应优化及验证； 4、将该微程序开发平台应用在"龙腾"C1微处理器的设计中，提高了微程序开发效率。

As the mine accidents happen frequently in recent years, the detecting technology for microseism becomes much more important. However, there is no advanced microseism detecting system at home. It's pretty important for microseisms denoising and Reversion. A wavelet denoising method is presented here to process microseism signal, and the microseism record can get high signal to noise ratio. Meanwhile based on the software of LabVIEW, s design of real-time detecting system for microseism based on virtual instrument is presented. The advantage of the virtual instrument was sufficiently exerted to achieve the real-time detecting and analyzing of the microseism.

以往基于DSP或其他单片机的微震系统，其资源的有限性很难达到理想的采集效果，同时也难以完成先进算法的实现，而对微震信号的去噪与还原在监测系统中起着很重要的作用；在深入分析小波变换的信号去噪方法基础上，对微震信号进行了处理，得到高信噪比的微震记录，实现了对噪声的有效抑止；同时在LabVIEW平台软件设计的基础上，实现了一种基于虚拟仪器微震实时检测的设计方案，充分发挥了虚拟仪器的优势，结果表明基于LabVIEW的微震系统能很好地完成实时监测及其分析。

On the base of the brief description of the drive and control system of micro-fluid and the experimental setting of the technology of micro-injection, a novel process of the hydrophobe treating used to mend the characteristic of the inner and outer surface on micro-pipette is designed, which can improve greatly the injected effect and eliminate the disadvantage such as seepage or regurgitation during injection. The author puts forward the way of measuring the inside diameter of the micropipette. The program of measuring micro injection amount is designed. The original data of the micro injection experiment are explained and interpreted at last in the thesis.

在简要描述微流体驱动控制系统和微注射技术实验条件的基础上，设计了改善微针内外表面特性的疏水化处理工艺，消除了微喷射过程中的渗流、回流现象，改善了微注射过程中的流动特性，提高了微注射效果，得到了数字化微喷射的实验结果；提出了精确测量微针内径的折射率法；设计了纳升级以下的微液滴量的检测方案；最后，论文对微注射技术实验中的原始数据进行了分析。

There are three platinum catalyst micro channels which have different width ,such as 1000 m , 400m and 40m. The platinum catalyst micro channel reactor is fabricated by MEMS technology. The reactor uses the exothermic reaction of hydrogen and oxygen on the platinum catalyst plate as the heat source and the platinum thin film resistance deposited on a glass chip by face micro machining process as catalyst and temperature sensor. The channel is bonded with a cover plate etched by bulk micromachining technology to become a mico- channel reactor.

实验主要以微机电加工技术制作白金触媒微管道反应系统，利用微机电面型加工技术将白金薄膜电阻制作於基材为玻璃的晶片上，以此为反应所需的触媒及温度量测元件，并用体型加工技术蚀刻出微流道的上盖板相结合成微管道反应系统，本研究以1000μm、400μm及40μm的白金触媒微管进行测试，并利用微管道管壁上触媒表面降低反应活化能的特性来维持反应，此微反应系统利用氢气与氧气在白金触媒平板上的放热反应作为能量的来源。

The results from the experiment are: the amount of all micro-powders that grain sizes are less 0.044 mm should be less than 35% in weight, and the value of coarse q and attenuate q should be respectively 0.23 and 0.32, and the additive amount of active a-alumina and calcium alumina cement should be respectively 7% and 4% in weight, meanwhile, the best dispersant is PMAA-NH4 in the non-microsilica system; while the value of two q should be respectively 0.21 and 0.29, the amount of active a-alumina, microsilica and calcium alumina cement should be respectively 6%, 2% and 4% in weight, the best dispersants are sodium hexamer taphosphate and Na2P3Oio in the microsilica system.

依照上述实验方法得出刚玉自流浇注料所必备的条件：刚玉自流浇注料中的细粉(-0.044mm)总量应小于35％；在无硅微粉系统中的Andreassen公式的粗端q值和细端q值分别为0.23和0.32，氧化铝微粉、水泥的最佳加入量是7％、4％，且所使用的分散剂为改性聚丙烯酸钠最好，而在含硅微粉系统中的Andreassen公式的粗端q值和细端q值分别为0.21和0.29，氧化铝微粉、硅微粉和水泥的最佳加入量为6％、2％和4％，最好合用三聚磷酸钠和六偏磷酸钠作为分散剂。

Despite the strong impetus in advancement of fluid drives for microfluidic system in the past decade, as evidenced by the multitude of micropumps developed, integration of driving systems on the microfluidic chip as well as the development of reliable microfluid driving systems still remained to be a challenge.

尽管微流体驱动技术在过去的十余年得到了飞速发展，各种微泵种类繁多，但微流体驱动系统集成化和微流体驱动系统可靠性的提高仍然是微全分析系统的薄弱环节。

Since the force change during operation must be sensed more sensitively, stiffness of micro manipulator and force sensors must be repartitioned properly. The micromanipulation system developed is introduced in detail, including the working principle of micro gripper, micro vision system and micro force system.

基于上述原则，研制出具有宏微运动能力的双手结构微操作机器人系统，包括六自由度步进电机驱动宏动机器人、三自由度智能微操作手、微夹持器、显微视觉监视系统和微力觉系统。

So the technique of uncooled microbolometer infrared imaging has become one of the main points from now on. In the paper uncooled microbolometer infrared imaging system is studied from focal plane character, image dealing and application. The details are in the following: On uncooled microbolometer infrared focal plane aspect: first, the work principle of microbolometer, manufacturing technology of microbolometer infrared focal plane, temperature balance equation of microbolometer detector are analyzed. The performance of microbolometer detector is predicted by model. Second, the infrared focal plane is the core of infrared system, whose quality can determine the performance of the system. It is the precondition that the high quality of every detective unit maintains the qualification of the focal plane. The even degree of detective units has great influence on imaging characters if the other characters of detective units are normal.

本文以非致冷微测辐射热计红外成像系统为对象，从焦平面特性、图像处理和红外系统应用方面展开分析、研究，具体内容如下；在微测辐射热计红外焦平面方面，首先分析了微测辐射热计的工作原理、微测辐射热计红外焦平面的工艺制作、微测辐射热计探测单元的温度平衡方程，根据有关参数对其特性进行建模预测；其次，红外焦平面是红外系统的核心，它的质量的好坏直接决定系统性能，因此保证其各探测单元的高性能是维护焦平面品质的前提，在探测单元其它特性正常的情况下，各探测单元之间特性的均匀程度对系统成像性能有极大影响，为此本文提出自适应滤波多项式焦平面非均匀性校正算法从软件角度解决焦平面的固有的噪声问题。

I didn't watch TV last night, because it .

昨晚我没有看电视，因为电视机坏了。

Since this year, in a lot of villages of Beijing, TV of elevator liquid crystal was removed.

今年以来，在北京的很多小区里，电梯液晶电视被撤了下来。