微系统

ABSTRACT Micromanipulator used for bioengineering, medical engineering and precision processing is a new filed.

面向生物工程、医学工程和微细加工的微操作机器人是一个全新的领域，本文对微操作机器人及其显微视觉系统进行了深入的研究。

With the experiment system of microseism, microseismic characteristics of coal or rock during the process of expanding to demolish by soundless-demolish agent are studied.

运用建立的煤岩胀裂破坏微震观测实验系统，研究了煤岩试样在胀裂破坏过程中微震信号的特性规律。

In chapter 5, the concept of zero-span tension known in papermaking area is for the first time introduce to wood science area to explore in-tree variation of longitudinal tensile strength of tracheids and its main influencing factors. In chapter 6, composite micromechanics and classic laminated theory are used to make a comprehensive and detailed analysis of the main influencing factors of mechanical properties of tracheids cell wall. Some experimental results acquired in the foregoing chapters are explained successfully. Results were summarized as follows: Mechanical characteristics of wood at micron scale: 1 At micron scale, the longitudinal mechanicai behavior of wood microtome section differs greatly from that of wood with normal size.

论文的第2章首先研究了微米尺度下木材的力学特性，为后面运用木材微切片拉伸技术奠定一定的理论基础；在第3章，首次考虑到了微米尺度下木材力学性质的尺寸效应，并运用木材微切片正常间距拉伸技术研究了管胞纵向弹性模量的株内变异规律；在第4章，首次利用纳米压痕技术中最新发展起来的连续刚度测量法直接在管胞细胞壁上进行纳米级的压痕实验，测量次生壁S〓层的纵横向弹性模量和硬度，从而把细胞壁力学的研究提高到一个更高的水平；在第5章，首次把造纸领域的零距拉伸技术引入木材科学研究领域，研究了管胞纵向抗拉强度的株内变异规律及其主要影响因素；第6章则运用复合材料细观力学的基本理论和经典层板理论对影响细胞壁力学性能的主要因素进行了全面而系统的分析，并为前几章的一些实验结果提供理论上的解释。

It has great potentialities in such fields as micro-optics, integrated optics and optics communication.Firstly, based on the basic theory of GRIN optics the optical effects of the spherical symmetry GRIN micro-sphere lens were analyzed systematically.

本工作从梯度折射率介质光学的基本理论出发对球对称GRIN微球透镜的光学性能进行了系统分析；选择两种适当单体，采用悬浮扩散共聚法制备出聚合物梯度折射率微球透镜；测量所得透镜的折射率分布曲线和其他光学参数。

In this paper,taking microswitch as type mechanism of openable closed electromechanical components,on basis of constructing it s finite element model of the quick acting mechanism s static dynamic process and contact system s electrical contact process.

以微动开关作为机电元件的典型代表，通过构造其速动机构静态、动态全过程和接触系统全过程有限元模型，并以动态模型为桥梁，将静、动态过程与电接触过程这三类不同问题联为一体，构造了综合模型，仍以AK型微动开关为例，给出了计算机模拟的综合实

Modeling and Simulation of the magnetic field regenerated by the permalloy microelements was performed.

概述了磁珠微流控分离系统及在生物医学工程中的应用，总结了磁珠微系统化方面的研究进展，提出了自己的研究方案； 2。

The invention discloses a method to integrate single CMOS with bulk silicon microelectromechanical system, its technical project: 1 forming isolating groove: adopting deep-groove etching, and SiO2 and polycrystal silicon filling to realize the insulation of MEMS structure and CMOS circuit; 2 making standard CMOS circuit; 3 using SiO2 and Si3N4 as mask, etching silicon on the back until exposing SiO2 at the bottom of the isolating groove, to complete the thickness control for MEMS silicon structure layer; 4 completing metalizing the CMOS circuit and masking the MEMS structure: MEMS structure region uses Al as mask and CMOS circuit region uses thick photoetching glue as mask, using DRIE to release silicon structure.

本发明公开了一种将单片CMOS与体硅微机械系统集成的方法，其技术方案为：1形成隔离槽：采用深槽刻蚀，SiO 2 和多晶硅填充，实现MEMS结构和CMOS电路的绝缘；2完成隔离槽后进行标准CMOS电路的加工；3用SiO 2 和Si 3 N 4 作掩膜，从背面腐蚀硅，直至暴露出隔离槽底部的SiO 2 ，完成MEMS硅结构层的厚度控制；4完成CMOS电路金属化和MEMS结构掩膜：MEMS结构区用铝作掩膜，CMOS电路区用厚光刻胶作掩膜，用DRIE释放硅结构。用本发明方法不仅获得了较大的质量块，而且用本发明较高的深宽比制作出的结构电容，同时实现了体硅微机械与CMOS电路的集成，显著提高MEMS传感器的精度和稳定性，具有前沿性和重要实用价值。

The contacting press between the electrode and the pressboard can affect the measurement of moisture in transformer insulated pressboard .

针对绝缘纸板微水分测量中传感器电极与纸板的接触压力问题，利用绝缘纸板微水分介电测量系统，将绝缘纸板置于平板电容传感器中并施加压力，传感器在正弦驱动信号源的作用下，输出的感应信号经调理电路缓冲、滤波，并与驱动信号比较。

In view of the characteristic of radioisotope microbattery based on p-radio-voltaic effect, it gradually becomes a new direction on micro power system.

基于β辐射伏特效应的同位素微电池所具有的特点，逐渐成为微能源系统研究的一个新方向。

The inventive silicon based piezo-electricity socle girder miniature power supply device, pertains to the micro-energy sources field in the electronic technology Micro Electro-Me-chanical Systems field.

本发明一种硅基压电悬臂梁微型电源装置，属于电子技术和微机电系统领域中的微能源领域。

I can not make it blossom and suits me

我不能让树为我开花

When temperatures are above approximately 80 °C discolouration of the raceways or rolling elements is a frequent feature.

当温度高于 80 °C 左右时，滚道或滚动元件褪色是很常见的特征。