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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器,对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计,建立了器件的三维实体模型以及两维降阶模型,对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计,同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程,开展了一系列重要工艺步骤的单项工艺试验,对工艺流程与工艺参数进行了优化,针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析,并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合,建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

The main sedimentary facies types include shoal facies of platform margin, organic reef facies of platform margin, platform evaporate facies, open-platform facies, restricted platform facies and carbonate platform ramp facies, and the front three types of facies are the uppermost facies belt. The main sedimentary microfacies types include subordinate organisms dolomite microfacies, sparry grain(biogenic debris, sand cutting, alga chippings and so on) dolomite microfacies, detention gravel debris dolomite microfacies, boundstone microfacies, non-lamina dolomite mudstone microfacies, lamina dolomite mudstone microfacies, lamina lime mudstone microfacies, sparry grainstone microfacies and testaceous chippings limestone microfacies, and the front three types of microfacies are the uppermost microfacies type.

该区长兴组主要的沉积相类型有台地边缘浅滩相、台地边缘生物礁相、开阔台地相、局限台地相、台地蒸发岩相和碳酸盐台地缓坡相六个相带,主要的微相类型有生物粘结云岩微相、亮晶颗粒云岩微相、滞留角砾云岩微相、纹层纯云泥岩微相、非纹层纯云泥岩微相、生物粘结灰岩微相、纹层纯灰泥岩微相、亮晶颗粒灰岩微相和介屑灰岩微相九种微相类型。

The fracture mechanism of totally austenite TWIP steel (steel 5#) is: the moving of dislocations is blocked by twin boundary during deformation. Micro-voids nucleate at boundary of deformation twins by the interaction between deformation twins and dislocations. Micro-voids are formation, growth, coalescence and break by the stress concentration during deformation.

全奥氏体的TWIP钢(如5#钢)的断裂机制为:形变过程中位错的运动受孪晶界的阻碍,形变孪晶与位错的交互作用使微孔形核于孪晶界处,应力集中使微孔长大、聚合直至材料发生断裂。

The fracture mechanism of the whole austenite TWIP steel (steel 5#) was that the moving of dislocations was blocked by twin boundary during deformation, the microvoids nucleated at boundary of deformed twins by the interaction between deformed twins and dislocations, the microvoids grew, got together and broke by the stress concentration during deformation.

全奥氏体的TWIP钢(2#钢)的断裂机制为:形变过程中位错的运动受孪晶界的阻碍,形变孪晶与位错的交互作用使微孔形核于孪晶界处,应力集中使微孔长大、聚合直至材料发生断裂。

It is obvious that, in the interface between substrate and diamond film,there exists the lattice strain effect resulting from lattice misfit because ofthe difference between the lattice constants.The lattice strain effect willcause some nonnegligible influences on the processes of diamond films′growth.

在本论文中,我们首次提出了在异质衬底上研究金刚石薄膜生长机理时必须引入晶格应变效应微扰修正的物理思想,并借鉴固体能带应变微扰理论,首次在分子轨道理论框架下建立起计算晶格应变微扰效应的理论,其中包括提出了计算单个化学键应变张量的方法和由分子轨道波函数计算应变微扰Hamilton矩阵元的方法。

Both overlong or overshort bottom duration and overlong or overshort fluctuation period are unfavorable for reduction of non-diamond content. Only moderate ones have optimal effects on it.3 Compared with a smooth microwave, a fluctuating one can reduce the diamond nucleation density slightly.4 In fluctuating microwave, even if a higher CH〓 concentration chosen, diamond films with quality better than that of those deposited at a lower CH〓 concentration and in smooth microwave can be obtained.In smooth microwave, the influence of O〓 upon the diamond films'MWPCVD was investigated. It is found that:1 In the range of lower O〓 concentration, its increase is beneficial to improvement of quality of diamond films, but in that of higher one, its increase conversely deteriorates the quality of diamond films.

在脉动微波下进行了沉积金刚石膜的研究,得到下述结果:1)采用合适的脉动微波,能使金刚石膜的沉积质量显著提高,并能使金刚石膜中的微晶石墨得到几乎完全的抑制。2)过长或过短的平底时间或脉动周期均不利于金刚石膜中非金刚石相碳含量的降低,只有适中的平底时间或脉动周期才有最佳的降低非金刚石相碳含量的效果。3)脉动微波会使金刚石的形核密度有所下降。4)脉动微波下,即使选用较高的CH〓浓度,也能得到沉积质量比在平稳微波下采用较低的CH〓浓度所制备的金刚石膜的沉积质量要明显提高的金刚石膜。

In fluctuating microwave, deposition of diamond films was investigated and some significant results were obtained:1 An appropriate fluctuating microwave can distinctly improve the quality of diamond films, and can grow diamond films almost without microcrystalline graphite.2 Both overlong or overshort bottom duration and overlong or overshort fluctuation period are unfavorable for reduction of non-diamond content. Only moderate ones have optimal effects on it.3 Compared with a smooth microwave, a fluctuating one can reduce the diamond nucleation density slightly.4 In fluctuating microwave, even if a higher CH〓 concentration chosen, diamond films with quality better than that of those deposited at a lower CH〓 concentration and in smooth microwave can be obtained.

在脉动微波下进行了沉积金刚石膜的研究,得到下述结果:1)采用合适的脉动微波,能使金刚石膜的沉积质量显著提高,并能使金刚石膜中的微晶石墨得到几乎完全的抑制。2)过长或过短的平底时间或脉动周期均不利于金刚石膜中非金刚石相碳含量的降低,只有适中的平底时间或脉动周期才有最佳的降低非金刚石相碳含量的效果。3)脉动微波会使金刚石的形核密度有所下降。4)脉动微波下,即使选用较高的CH〓浓度,也能得到沉积质量比在平稳微波下采用较低的CH〓浓度所制备的金刚石膜的沉积质量要明显提高的金刚石膜。

Investigating the influences of processing parameters on the C/Si molar ratio of resulted nanosized SiC powders indicated that there was a direct pyrolytic reaction from DMS to SiC as well as the previous proposed two-step reaction. Under the optimized processing conditions, the silicon carbide powders of homogeneous particle size distribution, spherical shape and stoichiometrical C/Si molar ratio are obtained. The silicon carbide particle consists of β-SiC crystallite arranged randomly.

论文系统研究了工艺条件对产物粉体C/Si摩尔比、粉体颗粒尺寸和组成粉体的SiC微晶尺寸的影响;研究了粉体制备过程中可能发生的化学反应,提出了反应过程中除了分步进行的生成SiC的反应外,同时在高温区还存在一步完成的生成SiC的化学反应的观点;通过调整工艺参数,制备得到了粉体尺寸分布均匀、呈均匀球状、C/Si摩尔比符合化学计量比的颗粒尺寸为40nm的纳米SiC粉体。

Low-melting sealing glass-ceramic is an advanced sealing material, which is widely used in many fields due to its low melting temperature and sealing temperature, excellent mechanical strength and chemical stability.

低熔封接微晶玻璃是一种先进的焊接材料,由于其具有低的熔化温度和封接温度,优良的机械强度和化学稳定性,而在很多领域中得到广泛的应用,实现了玻璃、陶瓷、金属、半导体间的相互封接。

In order to disclosure the reason why the electrocatalysis activeness and selectivity droped after being used several hundred hours continuously, the x-ray diffraction, scanning electron microscopy and energy dispersive spectroscope have been used to characterize the surface condition variations of Monel metal. The results indicated: Monel metal belongs to the Cu-Ni alloy around the electrolysis experiment.And after being used for 600hr, the surface layer element composition and geometry distribution of the alloy changed, namely in the alloy the Cu element /which superficial free enthalpy was smaller,"concentrated" to the alloy surface,and formed one kind of marble structure microcrystallite.Thus the electrode surface becamed rough a

为了揭示蒙乃尔合金阴极在连续使用数百个小时后电催化活性剂选择性下降的原因,采用X射线衍射仪、电子扫描电镜和电子能谱分析仪对电解实验所用的蒙乃尔阴极材料在电解实验前后的表面状态进行了表征,结果表明:所使用的蒙乃尔合金阴极材料在电解实验前后均属于Cu-Ni合金,使用600hr后,由于表面层元素组成和几何排布发生了变化,即合金中表面自由焓较小的Cu元素向合金表面&富集&,形成一种大理石结构的微晶,表面粗糙、不均一,这是造成其对硝基苯电还原的催化活性及选择性随着使用时间延长而逐渐下降的主要原因,同时也为此类电极的修饰改进提供了方向。

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