微晶

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

The main sedimentary facies types include shoal facies of platform margin, organic reef facies of platform margin, platform evaporate facies, open-platform facies, restricted platform facies and carbonate platform ramp facies, and the front three types of facies are the uppermost facies belt. The main sedimentary microfacies types include subordinate organisms dolomite microfacies, sparry grain(biogenic debris, sand cutting, alga chippings and so on) dolomite microfacies, detention gravel debris dolomite microfacies, boundstone microfacies, non-lamina dolomite mudstone microfacies, lamina dolomite mudstone microfacies, lamina lime mudstone microfacies, sparry grainstone microfacies and testaceous chippings limestone microfacies, and the front three types of microfacies are the uppermost microfacies type.

该区长兴组主要的沉积相类型有台地边缘浅滩相、台地边缘生物礁相、开阔台地相、局限台地相、台地蒸发岩相和碳酸盐台地缓坡相六个相带，主要的微相类型有生物粘结云岩微相、亮晶颗粒云岩微相、滞留角砾云岩微相、纹层纯云泥岩微相、非纹层纯云泥岩微相、生物粘结灰岩微相、纹层纯灰泥岩微相、亮晶颗粒灰岩微相和介屑灰岩微相九种微相类型。

It is obvious that, in the interface between substrate and diamond film,there exists the lattice strain effect resulting from lattice misfit because ofthe difference between the lattice constants.The lattice strain effect willcause some nonnegligible influences on the processes of diamond films′growth.

在本论文中，我们首次提出了在异质衬底上研究金刚石薄膜生长机理时必须引入晶格应变效应微扰修正的物理思想，并借鉴固体能带应变微扰理论，首次在分子轨道理论框架下建立起计算晶格应变微扰效应的理论，其中包括提出了计算单个化学键应变张量的方法和由分子轨道波函数计算应变微扰Hamilton矩阵元的方法。

Grain boundary slidings happen in this alloy at the creep temperature of 200 ℃ and the deformation of this alloy is coordinated by intragranular slip and grain boundary sliding.

结果表明：在125~200 ℃蠕变温度下，当蠕变寿命接近100 h时，2024铝合金的蠕变应力随着温度的升高明显下降；与125 ℃相比，150 ℃时合金的蠕变应力下降9.3%，在175 ℃时合金的蠕变应力下降30.3%；当蠕变温度为200 ℃时，该合金的蠕变应力下降幅度达到45.8%；在125~175 ℃下，合金在蠕变过程中的变形机制主要为位错在晶内的滑移；在200℃时，合金晶界开始发生滑移，合金变形由晶界滑移与位错在晶内的滑移协调完成；在合金蠕变断面上存在大量微孔，随着蠕变温度的升高，微孔的尺寸明显变大，当微孔尺寸超过3 μm时，微孔对合金的断裂机制有显著影响；在125和150 ℃下，合金的蠕变断口呈现韧窝型穿晶断裂特征；在175和200 ℃下，合金的蠕变断口呈现沿晶断裂特征。

Results indicate that the mass ratio of mesophase pitch to fiber had a great impact on conductivity and microstructure of the composites.

结果表明：中间相沥青与纤维质量配比对材料的导热、导电性能以及微晶参数有很大影响。

In this study the crystallite diamond directly depositerd on copper and copper directly used as a electrode, which can achieve the lower resistance ohmic contacts.

通过微晶金刚石在铜基底上的嵌布从而实现了金刚石与铜基底之间的低欧姆接触。

And the process is exceedingly fast: experimental devices have turned electrons on their heads in a few picoseconds.

不过直到最近，所有的自旋电子元件都得用铁磁金属才行，这和当前微晶片的制造技术并不协调。

Bonds become independent of the thickness and the crystallite sizes change negligible that the resistivity and surface energy of carbon films are about 14 Ω·μm and 28 mN/m, respectively.

厚度的变化不会使的键结改变且平均微晶大小变化不大，电阻率和表面能大约在14 Ω·μm和28 mN/m附近。

In order to disclosure the reason why the electrocatalysis activeness and selectivity droped after being used several hundred hours continuously, the x-ray diffraction, scanning electron microscopy and energy dispersive spectroscope have been used to characterize the surface condition variations of Monel metal. The results indicated: Monel metal belongs to the Cu-Ni alloy around the electrolysis experiment.And after being used for 600hr, the surface layer element composition and geometry distribution of the alloy changed, namely in the alloy the Cu element /which superficial free enthalpy was smaller,"concentrated" to the alloy surface,and formed one kind of marble structure microcrystallite.Thus the electrode surface becamed rough a

为了揭示蒙乃尔合金阴极在连续使用数百个小时后电催化活性剂选择性下降的原因，采用X射线衍射仪、电子扫描电镜和电子能谱分析仪对电解实验所用的蒙乃尔阴极材料在电解实验前后的表面状态进行了表征，结果表明：所使用的蒙乃尔合金阴极材料在电解实验前后均属于Cu-Ni合金，使用600hr后，由于表面层元素组成和几何排布发生了变化，即合金中表面自由焓较小的Cu元素向合金表面&富集&，形成一种大理石结构的微晶，表面粗糙、不均一，这是造成其对硝基苯电还原的催化活性及选择性随着使用时间延长而逐渐下降的主要原因，同时也为此类电极的修饰改进提供了方向。

The fine-beam diffraction of ferroelastic twins has been studied in detailfor the first time,and we have demonstrated the spot splitting of the a-typeferroelastic twin of NdP5O14 in its Laue pattern.With the help of computersimulation,the twin symmetry and structures were determined from the char-acteristics of the spot splitting.

在同步辐射微衍射中，我们首次在NPP a-型孪晶界的微衍射Laue图中发现Laue斑点分裂现象，结合NPP的自发应变，借助于计算机模拟，我们确定了这种挛晶的对称性与结构，并发展了一套利用同步辐射微衍射研究晶体中取向孪晶对称性的方法。

Breath, muscle contraction of the buttocks; arch body, as far as possible to hold his head, right leg straight towards the ceiling (peg-leg knee in order to avoid muscle tension).

呼气，收缩臀部肌肉；拱起身体，尽量抬起头来，右腿伸直朝向天花板（膝微屈，以避免肌肉紧张）。

The cost of moving grain food products was unchanged from May, but year over year are up 8%.

粮食产品的运输费用与5月份相比没有变化，但却比去年同期高8％。