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Furthermore, there is no residue on the pattern. The selectivity of etchant for the photosensitive resist mask and Pt electrode is shown to be good.

所选腐蚀溶液对光刻胶和Pt电极材料的选择性好,该工艺适于加工线条分辨率达微米量级的PZT薄膜微图形。

The unevenness range of measuring instrument surface is 1~0.03micron, and 10~14cleanness is measured in the method of micrometer eyepiece and taking photos.

仪器测量表面不平深度范围为1-0.03微米,用测微目镜和照相方法来评定10-14光洁度的表面。

RESULTS: The diameter of the microsphere was under 20 μm. Scanning electron microscope demonstrated that Fe3O4 and berberine were compounded by gel into a round shape, and the mixture was expressed on micrometer.

结果:磁性药物微球的颗粒直径在20 μm以下,通过扫描电镜可以看出,Fe3O4粒子和小檗碱已经被明胶复合成堆积状的球体,达到微米级。

When no angiogenesis, solid tumor growth will Be inhibited so obviously that it is limited to carcinoma or tiny metastasis of several hundred micra; on the contrary, if having angiogenesis, tumor will grow rapidly, whacs more, its nature of soakage and metastasis will be enhanced greatly.

新生血管为肿瘤的生长、转移提供氧和营养物质,在无新生血管生成时,实体肿瘤的生长明显被抑制,只局限于原住癌或几百个微米的微转移;而一旦新生血管长入,肿瘤将迅速生长,且浸润和转移的能力大大加强。

In the field of Microelectromechanical Systems, with the request of improving device parameters, the device dimensions are scaling down to submicrons and even nanometers, which causes the appearance of a new concept based on MEMS technology-Nanoelectromechanical Systems.

在微机电系统领域,随着对器件参数要求的提高,器件尺寸进一步缩小至亚微米甚至是纳米尺度,从而出现了一个基于MEMS技术而出现的新概念——纳机电系统。

Microfiber Products detail: Microfiber refers to the so-called 0.4uM of the micro-diameter fibers, its fiber silk degrees only 1 / 10 special wedge-shaped cross-section to enable it to more effectively capture even a few microns of dust particles, decontamination, to oil the effect is very obvious. 75:25 of polyester / nylon ratio, making material is extremely soft, on the swab surface without any harm, even in the field of high precision, such as lens coating, large scale integrated circuit manufacturing process can also be assured that the use of its water volume, water absorption speed is ordinary cotton fabric for more than 5 times.

所谓超细纤维是指直径0.4uM的微纤维,其纤维度仅为真丝1/10特殊楔型横截面,使它能更有效地捕获甚至几微米的尘埃微粒,除污、去油的效果十分明显。75:25的聚脂/耐纶比,使得质料极其柔软,对被拭物表面无任何伤害,即使在高精密领域里如镀膜镜头、大规模集成电路生产过程中也能够放心使用,其吸水量、吸水速度是普通棉织物的5倍以上。

The experiment results showed that the Ultrasonic Motor can meet the high precision requirement of micrometer scale by using the Proportional-Integral controller.

本系统的实验结果表明:采用PI控制器对超声电机的控制,在微米尺度下可以达到较高的精度要求。关键词微机械臂;超声电机;DSP

In this dissertation, based on glass microspheres and submicron silicon dioxide, the silver-coated core-shell shielding particles were prepared by liquid phase chemical deposition and layer by layer packing technology. The influences of the preparation conditions on the structure of the synthesized core-shell particles were also systemically studied. The conclusions are enumerated as follow:(1) Monodispersed submicron silicon dioxide spheres in the size range of 250~550 nm are synthesized by Sol-Gel method using ammonia as catalyst.

本文在前人研究的基础上设计出以微米级玻璃微珠为基核,采用液相化学沉积法和层层包裹法制备表面包银的核壳粒子电磁屏蔽剂,并对液相化学沉积法和层层包裹法的制备工艺进行了系统研究,取得了以下主要结论:(1)以氨水作催化剂,采用溶胶-凝胶法制备了粒径分布在250~550 nm之间的二氧化硅微球。

In this study ,We have prepared ZrO_2 nanopowder by microemulsion technology. On the basis of this, nano-sized ZrO_2 is assembled on PS sphere and ordered structure of ZrO_2 in micrometer scale is deposited on glass base.

本文首先在微乳液体系中制备了纳米ZrO_2,以此为基础进行了纳米ZrO_2在PS球表面的组装和微米尺寸ZrO_2有序结构的自组装。

Micro-scale effect and multi-field coupling are characteristics of the design of micro-electro-mechanical system. However, the current macroscopic structure-oriented CAD systems have not been able to meet the increasing requirements for the design in micrometer scale. Therefore, a flexible design modeling methodology for MEMS based on Petri net is put forward.

微机电系统设计具有微尺度效应和多物理场耦合的特点,而现有的面向产品宏观结构的CAD系统难以满足微米尺度设计需求,为此提出一种基于Petri网的MEMS柔性设计建模方法。

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This one mode pays close attention to network credence foundation of the businessman very much.

这一模式非常关注商人的网络信用基础。

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