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The invention discloses a method to integrate single CMOS with bulk silicon microelectromechanical system, its technical project: 1 forming isolating groove: adopting deep-groove etching, and SiO2 and polycrystal silicon filling to realize the insulation of MEMS structure and CMOS circuit; 2 making standard CMOS circuit; 3 using SiO2 and Si3N4 as mask, etching silicon on the back until exposing SiO2 at the bottom of the isolating groove, to complete the thickness control for MEMS silicon structure layer; 4 completing metalizing the CMOS circuit and masking the MEMS structure: MEMS structure region uses Al as mask and CMOS circuit region uses thick photoetching glue as mask, using DRIE to release silicon structure.

本发明公开了一种将单片CMOS与体硅微机械系统集成的方法,其技术方案为:1形成隔离槽:采用深槽刻蚀,SiO 2 和多晶硅填充,实现MEMS结构和CMOS电路的绝缘;2完成隔离槽后进行标准CMOS电路的加工;3用SiO 2 和Si 3 N 4 作掩膜,从背面腐蚀硅,直至暴露出隔离槽底部的SiO 2 ,完成MEMS硅结构层的厚度控制;4完成CMOS电路金属化和MEMS结构掩膜:MEMS结构区用铝作掩膜,CMOS电路区用厚光刻胶作掩膜,用DRIE释放硅结构。用本发明方法不仅获得了较大的质量块,而且用本发明较高的深宽比制作出的结构电容,同时实现了体硅微机械与CMOS电路的集成,显著提高MEMS传感器的精度和稳定性,具有前沿性和重要实用价值。

Grains formed in the photosphere and convection layer at the bottom of connecting places.

米粒形成于光球底部与对流层相接的地方。

You can create the illusion of a string description of the collection is playing soft, sustained attention to the construction of the same height, and gradually decline also took note of the pianissimo not move your fingers - as long as the varying degrees of pressure to apply the key though at the bottom position.

您可以创建的幻想一个字符串集合正在播放轻柔的说明,持续的建设同样注意高潮,并逐渐衰落同样注意到了极弱不动你的手指-只要申请不同程度的压力的关键虽然在底部的位置。

The historic dive attracted worldwide attention and some controversy among marine biologists who disputed Piccard's claims to have observed flatfish, and a new type of shrimp at the bottom of the ocean.

具有历史意义的潜水吸引了世界个体的注意。一些海洋生物学家争论Piccard看到了比目鱼和海洋底部的小矮人。

The Swiss marine explorer and inventor Jacques Piccard has died at his home on the edge of Lake Geneva, at the age of 86. In 1960, Piccard and his co-pilot took a submersible vessel developed by his father to the bottom of the Mariana Trench in the western Pacific. Their 11km descent beneath the surface of the sea, remains the deepest ever carried out.

瑞士海洋探险家、发明家Piccard死在他住所附近的日内瓦湖边,享年86岁。1960年,Piccard和他的同伴乘坐他父亲制作的小船潜入西太平洋的马里亚纳海沟底部,在海面一下11公里,他还曾潜过更深的距离。

As he plowed his fields he concieved of drawing a picture with an electron beam just like he was plowing the field, one line at a time, from top to botton and side to side.

正如他自己领域的袭击,他concieved绘制的图片与电子束就像他是春耕外地,一次一行,从顶部向底部和侧面向一边。

I picked melons according to experience, should be able to select from the following aspects: guapi smooth surface, pattern clear lines clear underside yellow, is ripe melon; while the opposite surface of hair, shiny dark, piebald, and unclear lines, is unfamiliar with the melon.

答:我挑瓜,根据以往经验,应该可以选择从以下几个方面:瓜皮表面光滑,图案清晰的线条清晰的底部黄色,是熟瓜;而相反的头发表面,有光泽黑,花斑和界限不明,不熟悉的甜瓜。

Arrector Pili are tiny muscles attached to the base of the hair follicles.

竖毛肌是一些附着在毛囊底部的细小的肌肉。

And lastly there's a combination of the pillbox or singlestrip around the base and then the conical hat shape on top to form a castle turret.

最后一个是药盒的结合或单独的纸条绕在底部然后顶端是圆锥形的帽子形状形成了一个城堡的塔楼。

On the under side of the pincushion was secured a card, bearing in neat letters the name "Miss Amelia Minchin."

有一张名片贴在针插的底部,上面是一些正正经经的字样:"阿米莉亚·铭钦小姐。"

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In the United States, chronic alcoholism and hepatitis C are the most common ones.

在美国,慢性酒精中毒,肝炎是最常见的。

If you have any questions, you can contact me anytime.

如果有任何问题,你可以随时联系我。

Very pretty, but the airport looks more fascinating The other party wisecracked.

很漂亮,不过停机坪更迷人。那人俏皮地答道。