干涉测量的

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

The Gaussian properties of laser beams may cause the appearance of gradients in the interference pattern in the measuring volume and a broadening of Doppler spectrum....

本文定量地论述了高斯光束的各因素对测量精度的影响；给出了测量误差表达式，经过各种情况下的理论计算值的对比和分析，得出了两束腰分别在测量区两侧，等距离时，干涉条纹空间频率梯度引起测量误差最小的结论。

It measures the surface profile not by measuring phase but by measuring the parameters, which is relative to the white-light phase-shifting interferometric intensity and monotonic function of the depth of the tested surface in the given measurement range.

依据白光相移干涉中与干涉光强有关的一些特定参量与表面形貌之间的一一对应关系，提出了一种不直接测量相位、避开相位测量不确定性的新方法。

A new method of measuring thickness of optical thin film with dispersive white-light spectral interferometry is proposed.

设计了一套利用白光干涉理论测量薄膜厚度的系统，主要包括迈克耳孙白光干涉系统和光纤光谱仪。

The measurement technique of HCN laser interferometer/polarimeter is based on the optical beam interference principle and Faraday rotation effect induced from poloidal field.

HCN激光干涉/偏振测量仪的测量原理是基于光束的干涉和电磁波与磁场的法拉弟旋转效应。

The effects of phase offset deviation and intensity deviation on measurement, and the cut-off error of sinusoidal phase modulating function in phase shift interferometry are discussed and analysed.

本文将连续相移干涉技术、外同步控制技术和锯齿波相位调制技术，用于改造传统的光波干涉量法，实现了表面轮廓测量，成为一种有效的表面粗糙度评定和分析手段。

The results show that the measuring range for DIC is between 0 and 72μm, the mean measuring resolution is about 23. 74nm; for inputting image with video camera and scanner, the relative measuring resolution is 0.3μm and 0.1μm respectively.

分析表明，采用本文创建的微差干涉法测量离面位移，测量范围为（0～72μm），平均测量精度为23.74nm；对摄像机输入图象和扫描仪输入图象，采用特征点法测量面内位移的精度分别为0.3μm和0.1μm。

The device to be measured can preciser than that in measure system. By analysing the errors in measure system and the result of some fiber devices, it is showed that"white light"interferent system is of high precision in the measurement of coupling rate and coupling points.

对测量系统的误差分析，以及实测器件的测试数据分析表明，宽谱干涉光纤测量系统在测量光纤或光纤器件的偏振状态分布时，无论是在耦合率测试，还是在耦合点位置测试方面，均达到很高精度。

Traditionally, a surface is usually scatted in an array of 3D data points which are topologically connected by rows and columns to form a rectangular mesh. This method can't meet the requirement of description and measurement for some complex surfaces. On the basis of tracing border points, a new method is proposed to deliver 3D data points of surfaces, which are topologically constructed with optimum rectangular and triangular mesh. In order to measure surface efficiently and safely with NC machine, an optimization of measurement paths is proposed to avoid interference between the measuring tool and the surface with holes. The curve design is the basis of surface modeling.

数控测量技术的发展为测量自动化、集成化、智能化提供了可能，而对于复杂曲面的自动测量规划则是测量技术中的难点问题，平行截面等数目测点分布和四边拓扑测点分布规划方法，不论在测点分布的合理性上还是在网格结构的优化方面，均难以满足形状或边界较复杂曲面的离散化描述和曲面造型的要求，为了实现任意拓扑曲面的自动测量，本文对复杂曲面的合理离散化描述和自动测量问题进行了研究，提出了基于边界跟踪、优化网格的测点自动分布规划和四边、三角混合网格的生成方法：同时对具有孔洞或测量干涉凸台等非完整曲面的测量路径优化问题进行了研究，提出了路径优化方法。

Inthis paper, a new method is presented, in which we measure the thickness ofsurface film layer by means of measuring the distance between correspondingtwo dark lines in two groups of white light interference fringes that are res-Pectively produced by two beam reflected by two surface of the thin filmlayer and another beam coming from another arm in Michelson interferome-t...

本文提出一种新方法，它利用迈克耳逊干涉光路，通过对膜层前后两表面反射光束和来自另一臂的反射光束产生的两组白光干涉纹黑线间隔的测量，即可得到表面膜层的厚度、这种测量方法迅速、简便、设备简单、精确度高、不损伤膜层表面，适合在实验室和工厂广泛应用。

In the United States, chronic alcoholism and hepatitis C are the most common ones.

在美国，慢性酒精中毒，肝炎是最常见的。

If you have any questions, you can contact me anytime.

如果有任何问题，你可以随时联系我。