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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器,对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计,建立了器件的三维实体模型以及两维降阶模型,对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计,同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程,开展了一系列重要工艺步骤的单项工艺试验,对工艺流程与工艺参数进行了优化,针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析,并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合,建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

The five characteristics of the system are exploiting the ordered decomposition of problems in the structure of networks; using the Hasse graph to map the transfer network to the field of real numbers homomorphically; distinguishing the production rules as strong rules and weak rules; using the method of scheduling among stations to balance the search by weak rules in every station; searching in the best-first way both in the large and in the small, but with the different aims respectively, which can be regarded as a BF′-BF strategy in which the macro guides the micro.

该系统有五个特点:利用了一种网络结构的有序分解;采用Hasse图将中转站网络同态地映射到实数域上;将产生式规则区分为强规则和弱规则;采用站间调度的方法系统地平衡了各站弱规则的搜索;全局和局部都为最佳优搜索,只是目标指向不一样,是一种宏观引导微观的BF′-BF混合策略。

"Geomagnetics: Branch of geophysics concerned with all aspects of the Earth's magnetic field, including its origin, variation through time, and manifestations in the form of magnetic poles, the magnetization of rocks, and local or regional magnetic anomalies"

地磁学地球物理学的一个分支。研究范围涉及地磁场的各个方面,包括起源、随时间的变化和形成磁极的现象、岩石的磁化,以及局部或区域性地磁异常等。

"Geomagnetics: Branch of geophysics concerned with all aspects of the Earth's magnetic field, including its origin, variation through time, and manifestations in the form of magnetic poles, the magnetization of rock s, and local or regional magnetic anomalies"

地磁学地球物理学的一个分支。研究范围涉及地磁场的各个方面,包括起源、随时间的变化和形成磁极的现象、岩石的磁化,以及局部或区域性地磁异常等。

"Geomagnetics: Branch of geophysics concerned with all aspects of the Earth's magnetic field, including its origin, variation through time, and manifestations in the form of magnetic pole s, the magnetization of rocks, and local or regional magnetic anomalies"

地磁学地球物理学的一个分支。研究范围涉及地磁场的各个方面,包括起源、随时间的变化和形成磁极的现象、岩石的磁化,以及局部或区域性地磁异常等。

But, because of the policy of the Taiwanese authorities persistence "impassability pass, no inbound", although carried out a direct navigation of container transportation in partial scope, its still limited at transport cargo to go toward the third long range, the goods that with the purpose of trade with each other still need to pass through the third region.

但是,由于台湾当局坚持"不通关、不入境"的政策,虽然实现了两岸集装箱运输局部范围的直接通航,但仍局限在运输两岸中转运往第三地的远程货物,两岸间互为贸易目的的货物仍然要通过第三地中转。

The representative minority cultural relic-pottery relic of Buyi minority and the two wooden masks is taken as the research object. Firstly, Hiscanner laser scan detector was adapted for data collection, and then obtain point cloud data which could be recorded on disc for permanent saving was obtianed; Furthermore, the new popular reverse engineering software Geomagic for some disposals of point cloud data was adopted in data condensing, data mending, data filtering, feature line picking up to obtain NURBS surfaces; and then the error between the reconstructed CAD model and the point cloud data was evaluated to guarantee the precision of surface reconstruction to keep the relics keep its original appearance. In the end, the NURBS surfaces are imported to 3D software Solidworks and entities of CAD are generated by surface sewing, mold loft and ablating and other instructions.

选用有代表性的贵州少数民族文物―布依族酒壶、水壶以及木制傩戏面具作为研究对象,采用Hiscanner激光扫描测头对其进行数据采集,扫描得到的点云数据可刻录到光盘上作为文物数据永久保存;更进一步地,采用目前流行的逆向工程软件Geomagic studio对点云数据进行数据精简、数据滤波、数据修补、提取特征线等处理后得到NURBS曲面;为保证曲面模型重建的精度,在曲面重建模型后对其误差评价,通过控制误差的方式指导曲面模型重建,使重建的文物曲面模型能真实完整地反映原状;最后,在功能强大的三维造型软件Solidworks中导人重构的NURBS曲面进行曲面缝合、放样等,将其生成实体CAD模型,并对模型的局部特征进行适当的再设计以实现文物实体模型的优化。

Wavelet multi-scale analysis is applied to the research on lunar gravity field and the explanation of lunar inner structure. In this paper, the nearside of the Moon with higher quality data is chosen as the test area, and free air gravity data from "Clementine" mission are used as original data to decompose gravity of some specific mare basins. With the results of numerical test, we also explain the hierarchical structure of the Moon, analyze the thickness of mare fillings and the Moho topography under mare basins, and verify the results by comparisons.

本文将小波多尺度分析引入月球重力场的研究,选取测量数据质量较好的月球近区作为实验区域,以"Clementine"探测器获得的自由空气重力异常作为原始数据对主要月海盆地进行了局部的重力异常分解,解释了月球内部基本分层结构,并利用主要月海盆地的实验结果分析了月海下部质量异常以及莫霍面的起伏形态,与已有研究成果进行比较证明了方法的适用性及结果的合理性。

The simulation results show that this algorithm achieves resource load balancing, and it overcomes the shortcomings of genetic algorithm, and can be applied to the optimization of task scheduling successfully.

仿真实验结果表明,这种调度算法有效地实现了资源的负载均衡,克服了遗传算法容易陷入局部最优的缺点,可以成功地应用于网格任务调度中。

Some people more pay great attention to music the unified integrity, form a coherent whole, some people more consider the work partial between the difference and the contrast; Some people stress the technical method, some human of deviations music performance.

有人更多地注重音乐的统1完整、1气呵成,有人更多地考虑作品局部之间的差异与对比;有人侧重技术手段,有人偏向音乐表现。

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推荐网络例句

I am accused of being overreligious," she said in her quiet, frank manner,"but that does not prevent me thinking the children very cruel who obstinately commit such suicide.""

客人们在卡罗利娜·埃凯家里,举止就文雅一些,因为卡罗利娜的母亲治家很严厉。

Designed by French fashion house Herm è s, this elegant uniform was manufactured in our home, Hong Kong, and was the first without a hat.

由著名品牌 Herm è s 设计,这件高贵的制服是香港本土制造,是我们第一套不配帽子的制服。

Do not 'inflate' your achievements and/or qualifications or skills .

不要 '夸大' 你的业绩或成果,条件或者技能。