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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器,对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计,建立了器件的三维实体模型以及两维降阶模型,对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计,同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程,开展了一系列重要工艺步骤的单项工艺试验,对工艺流程与工艺参数进行了优化,针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析,并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合,建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

In this study a combined genetic-genomic approach was used to identify different patterns of gene expression associated with the sensitization and effector phase of EAU pathogenesis.

在本试验中还利用复合的遗传基因组方法确定了EAU发病致敏期和效应期中基因表达的不同模式。

This issue through the mortar bar test or production of the concrete channel to study the color, the color white concrete methods; the use of inorganic pigments and titanium dioxide composite technology, outstanding preparation in prison and a better color fair-faced concrete; by optimizing the aggregate gradation, the use of high-quality, stable mineral admixture to improve concrete performance, color, white water of the large concrete fluidization; PW 42.5 the use of white cement and a new type of polycarboxylic acid superplasticizer in concrete to ensure good performance at the same time, reducing the water consumption of concrete, the preparation of a white water high-strength concrete.

本课题通过砂浆棒试验或混凝土色板的制作,研究彩色、白色混凝土的配色方法;采用无机颜料与钛白粉复合技术,配制出色牢性较好的彩色清水混凝土;通过优化骨料级配、使用高品质、稳定的矿物掺合料,提高混凝土的工作性能,实现彩色、白色清水混凝土的大流态化;采用 P.W 42.5的白水泥与新型的聚羧酸减水剂,在保证混凝土良好工作性能的同时,降低混凝土的用水量,配制出高强白色清水混凝土。

And the last, the effects of fermented cottonseed-hull on dairy performance were studied with feed tests. In experiment 1, Cottonseed-hull and comminuted cottonseed-hull were fermented with complexing strains of microbials including EM and probiotics, using seven pairs of formulation have been formed by corn meal, molasses and fecula combined with urea and zein meal.

试验一利用EM菌液与益生素混合扩大培养后的复合菌液,选用玉米粉、糖蜜、淀粉三种炭源和尿素、玉米蛋白粉两种氮源共组成了7组发酵底物配方,将棉籽壳分成微粉样与原始样,发酵结束后对测定结果进行统计分析。

The transient air gap magnetic fields under different conditions are also calculated and analyzed. The novel finite element method directly using magnetic induction as unknown variable has many advantage. It is analyzed theoretically in detail. Nonlinear eddy current field equations and finite element equations using magnetic induction as unknown variable are developed.

直线电机的磁场是一非均匀、非线性的涡流场,文中对非均匀磁场及材料的非线性进行了分析,提出了相应的解决办法,采用以向量磁位为求解量的传统有限元法,对不同合闸角下筒式复合次级圆筒型直线感应电机的瞬态特性进行了计算与试验分析,对不同条件下瞬态气隙磁场进行了研究。

A new projectile-filling device was developed to realize the fracture perforating under the condition of high foramen density.

提出了一种新型装药结构并实现在高孔密条件下的复合射孔,所开发的产品进行了地面混凝土靶测试、地面动态压力-时间过程测试和现场应用试验。

The feasibility of composite material friction saw bit has been determined in theory, furthermore, the composite technology of material is tested and analyzed, which provides base for application and research of composite material friction saw bit in-depth.

从理论上论证了复合材料摩擦锯片的可行性,对材料的复合工艺进行了分析与试验,为复合材料摩擦锯片的深入研究及应用奠定了一定的基础。

This little two-seat Gyroplane was a compound aircraft flew in spring 1960 as an experimental machine, and a small production run followed.

这个小双座旋翼机是一种复合的飞机飞到1960年春季作为试验机,和一个小生产运行之后。

However the research that ICTUS experiments thinks, the ACS patient of positive of T of muscle calcic protein intervenes cure and the compound terminus that guard cure (courtyard of stalk of death, heart, reentry) without statistical difference.

然而ICTUS试验的探究认为,肌钙蛋白T阳性的ACS患者介入治疗和保守治疗的复合终点无统计学差异。

The experimental research on the lateral resistance system steel frame structure with sandwich-type infilling wall has been completed.

试验研究和理论分析表明,钢框架结构抗侧刚度较低,空腔砌块复合墙体能显著的提高钢框架的抗侧刚度,两者能很好地协同工作,成为钢结构住宅有效的抗侧力体系。

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推荐网络例句

By the time of its fall, most of the prisoners were writers who had written against the corruptions of the government.

到它被攻陷的时候,里面多数的犯人是写了反对政府贪污文章的作家。

The most obvious variation to ovum morphological character was that the color was changed from light green to sepiaceous in embryonic development, and all the ovums were almost hatched after 96h.

在胚胎发育过程中卵的形态特征最明显的变化是颜色从淡绿到深褐色,卵在发育96h后卵基本全部孵化。

There was a conflict between plebs and patricians in ancient Rome in 494BC.

在公元前494年,罗马发生了一次平民反对贵族的斗争。