可测量的

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

High measure precision: High precision and low operation error can meet needs of various levels of operator, identical measurement results can be gained in spite of different practical experiment of operator.

测量精度高：不但测量精度高，且个人操作误差小，不同的测量人员，不管有无经验均可获得相同的测量值。●使用范围广泛：可测大型、重型工件某个部位的尺寸，也可适用于高温、放射性等恶劣环境条件下的测量。

It avoids the disturbance of the constant voltage source by imp roving the constant voltage source. It has high p recision and resolution, the measure resolution can be 0101℃, and p recision is ±011℃. The circuit has wide app lication with simp le structure, low cost, low power dissipation and small volume. It can be used in the p recise temperature measurement systems,such asmultip le thermal conductivitymeasurement.

用改进的电压测量电路间接测量热敏电阻的阻值，有效地克服了电压源的干扰，测量精度高，测量分辨率可达0101 ℃，测温准确度可达±011 ℃；并且该电路结构简单，成本低、功耗小、体积小，具有很高的实用价值，可用于需要精密测温的系统，如热导率测量仪的温度测量中。

Measure character: Frequency limits: CH1:dResolution of C ～ 225MHz frequency: 10 / second time-interval resolution : N/A measures speed: Can amount to 200 times measure / the second mixes in limits of the voltage on GPIB sensitivity : DC ～ 100MHz: 200MHz of ～ of 5Vac+dc 100MHz of 20mVrms ～±: 225MHz of ～ of 5Vac+dc 200MHz of 30mVrms ～±: Input of 5Vac+dc of 40mVrms ～± adjusts:(CH1 chooses) impedance, coupling: 1M Ω or 50 Ω, ac or Dc are low connect filter: 100kHz, but switch attenuation:× 1 or reference of × 10 exterior time base inputs: 1, 5, 10MHz sparks: CH1, to rising / drop the edge sparks, the percentage that uses signal n or absolutely voltage install n, setting sensitivity mixes to low, medium or tall gate start: Automatic, the hand is moved (setting gate time or resolution digit); Exterior, defer interface: Standard GP-IB(IEEE 488.1 and 488.2), take; of SCPI compatible language to say RS-232 power source only: 10 ％ of 100-120VAC ±, 50, 60 or 10 ％ of 400Hz ± 10 ％ of 220-240VAC ±, 50 or 10 ％ of 60Hz ± are suttle: 3kg dimension: 348.3mm of × of 212.6 × 88.5H

测量特征：频率规模：CH1：dc～225MHz 频率分辨率：10位/秒时候距离分辨率：N/A 测量速度：可达200次测量/秒在GPIB上电压规模和灵敏度： DC～100MHz： 20mVrms～±5Vac+dc 100MHz～200MHz：30mVrms～±5Vac+dc 200MHz～225MHz：40mVrms～±5Vac+dc 输入调节：(CH1选择)阻抗，耦合： 1MΩ或50Ω，ac或dc 低通滤波器： 100kHz，可切换衰减：×1或×10 外部时基参考输入： 1，5，10MHz 触发： CH1，对回升/回升沿触发，用信号电平的百分数或相对电压设置电平，设置灵敏度至低、中或高闸门和启动：主动，手动(设置闸门时候或分辨率位数)；外部，延迟接口：尺度GP-IB(IEEE 488.1和488.2)，带SCPI兼容说话；只讲RS-232 电源：100-120VAC±10％，50，60或400Hz±10％ 220-240VAC±10％，50或60Hz±10％净重：3kg 尺寸：212.6×88.5×348.3mm

This paper describes the assembly method of the Aeromagnetic Gradiometric System which can be used not only in horizontal (including transverse and longitudinal plane) but also in vertical gradient survey on the Y-5 fixed-wing aircraft with the single engine and the double wings. The method and the results of applying AADCⅡ Automatic Aeromagnetic Digital Compensator are also preliminarily discussed.

介绍了在单阀双翼的运五飞机上安装既可进行垂直梯度测量，又可进行水平梯度测量（包括横向和纵向水平梯度测量）的航磁梯度测量系统的方法，初步探讨应用航空地球物理综合测量系统自动航空磁力数字补偿仪的方法，并对补偿结果进行评价。

Design the structure of high performance Low-E film including its material and thickness of every layer according to basic optical theory. Carry out an innovative work to calculate its optical performance by characteristic matrices and optical admittance. Compare the results with those we get by traditional measurement.3. Prepare Low-E films with RF magnetron controlled reactive sputtering. The result shows that in the visible region (380nm-780nm), the highest transmittance is 82.4% while the average value is 75%. In the NIR region (780nm-2500nm), the average transmittance is 16.2%. These characters can fit the demand of the glass used in architecture and cars, and also in other applications.4. We novelly use the material Titanium as protective layer to solve the problem that Ag layer would disappear when depositing the second TiO_2 layer. As the protective layer, Ti does not increase the number of targets so as to lower the costs. The thickness of the protective layer Titanium is adjusted by controlling of sputtering time. Results shows the Low-E films get the best optical character when the sputtering time of Titanium is 20 seconds5. We novelly proposed a new transmittance quality factor Q=_·(?_-__ to evaluate the performances of Low-E films, which makes it easier to judge the qualities of Low-E film.6. The photocatalysis of Titanium dioxides is researched and introduced into Low-E films. Sb-doped TiO_2 thin films are prepared. Its photocatalysis and hydrophilicity are measured.

论文的工作主要有：1、总结了低辐射薄膜的制备方法，性能，以及国内外最新研究进展和应用，并对两种类型的低辐射薄膜进行了比较。2、从光学基本理论开始，设计了离线低辐射薄膜的结构，包括每一层的材料和厚度，并创新性的用特性矩阵和光学导纳理论计算了该离线膜的光学性能，利用软件对其进行了仿真，与实际制备的薄膜所测量的性能相比较。3、完成在实验室仪器上制备低辐射薄膜，掌握其工艺条件，解决了超薄金属膜的制备问题，所制备的低辐射薄膜在可见光区(380hm-780hm)最高可达82.4%，平均透射率为75%；在近红外区(780nm-2500nm)的平均透射率为16.2%，其性能达到建筑物幕墙玻璃，汽车前挡玻璃等应用标准，并为进一步的大规模生产打下基础。4、针对中间银层在镀上层膜时易被氧化这一工艺难题，本研究创新性的提出用Ti膜作为保护膜，没有增加新的靶材，提高了生产效率，并节约了生产成本。

If the system circumvolves,the tiltmeter can also get the accurate value of obliquity. So it can be used to measure the pose of airplane missile and any other aerocraft.

该方法可实现±180°范围内的倾角值测量，且当待测系统旋转时也可进行实时测量，故可用于飞机、导弹等飞行器的实时姿态测量。

Foundlings and advancement of this thesis: firstly, in China the entrepreneurial competency in small and medium sized catering enterprises is multi-dimensional, including opportunity competencies, organizing competencies, relationship

本文取得的研究成果与贡献：首先，中国背景下，中小餐饮企业企业家创业胜任力特征是一个多维概念，包括机会胜任力、组织胜任力、关系胜任力、承诺胜任力、战略胜任力和概念胜任力，本研究对基于行为测量的创业胜任力调查工具的开发做出了贡献；其次，企业家的创业胜任力可以通过相关的管理和技术训练、相关行业工作经验和创业经验得到显著提高，该结论为企业家的培训和发展提供了可借鉴的方法；第三，企业家创业胜任力与企业绩效有显著的相关关系和因果关系；最后，企业家创业胜任力与企业绩效之间的关系不同程度地受到企业经营模式、发展阶段和创业环境的缓冲调节作用。

The measuring data can be share with HMIS system. Wheel lathe and boring machine are used, which are controlled by microcomputer. They can centering and clamp automatically, and cut close.

采用车轴全自动测量机可自动完成车轴部分参数的自动测量，取代传统的人工测量方法，保证数据的可靠性；测量数据可与HMIS系统共享。

It has been proved by online testing that the system is free of testing uncertainty with more accurate results than traditional systems and is self-adjustable because of the association relations acquired from data mining.

经实际应用验证，该系统消除了人工气候室参数测量的不确定性，可获得比传统的算术平均值更准确的测试结果，并能依据各参数间的关联关系对测试的手段和方法进行有效的调整。

It has been put forward that there exists single Ball point and double Ball points on the symmetrical connecting-rod curves of equilateral mechanisms.

从鲍尔点的形成原理出发，分析对称连杆曲线上鲍尔点的产生条件，提出等边机构的对称连杆曲线上有单鲍尔点和双鲍尔点。

The factory affiliated to the Group primarily manufactures multiple-purpose pincers, baking kits, knives, scissors, kitchenware, gardening tools and beauty care kits as well as other hardware tools, the annual production value of which reaches US$ 30 million dollars.

集团所属工厂主要生产多用钳、烤具、刀具、剪刀、厨具、花园工具、美容套等五金产品，年生产总值3000万美元，产品价廉物美、选料上乘、质量保证，深受国内外客户的青睐