可刻的

There may be one thing, such as carved in my heart I will never forget!

可有一件事，像是刻在了我的心里，使我终生难忘！

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

May have a thing, such as engraved in my heart, so that I will never forget!

可有一件事，像是刻在了我的心里，使我终生难忘！

Two or more cycles of deposition/etch may be performed.

可执行两次或更多的沉积/蚀刻循环。

There were equally excellent opportunities for vacationists in the home island, delightful sylvan spots for rejuvenation, offering a plethora of attractions as well as a bracing tonic for the system in and around Dublin and its picturesque environs even, Poulaphouca to which there was a steamtram, but also farther away from the madding crowd in Wicklow, rightly termed the garden of Ireland, an ideal neighbourhood for elderly wheelmen so long as it didn't come down, and in the wilds of Donegal where if report spoke true the coup d'oeil was exceedingly grand though the lastnamed locality was not easily getatable so that the influx of visitors was not as yet all that it might be considering the signal benefits to be derived from it while Howth with its historic associations and otherwise, Silken Thomas, Grace O'Malley, George IV, rhododendrons several hundred feet above sealevel was a favourite haunt with all sorts and conditions of men especially in the spring when young men's fancy, though it had its own toll of deaths by falling off the cliffs by design or accidentally, usually, by the way, on their left leg, it being only about three quarters of an hour's run from the pillar.

在故乡的岛屿度假的人们也有同样的良机。这里有令人赏心悦目、有助于恢复青春的森林地带，都柏林市内外以及风光绮丽的近郊，不仅富于无上魅力，而且还能促进身体健康。有一条蒸气火车铁轨一直铺设到噗啦呋咔瀑布。还有威克洛那越发远离尘嚣、对"爱尔兰庭园"这一称谓当之无愧的所在。只要不下雨，那一带是供年长的人们骑自行车的理想田园，再有就是多尼戈尔的荒野，倘若传闻属实，景色也极为壮观。不过，由于最后提到的这一地区交通不便，尽管此行可获益匪浅，前往的游客毕竟有限，收入也微不足道。相形之下，霍斯山凭借绢骑士托马斯、格蕾斯。奥马利和乔治四世留下的遗迹，以及遍布于海拔数百英尺高处的杜鹃花，使它成为男女老少不分贫富，人人爱去的地方。由纳尔逊纪念柱乘车前往，只消三刻钟就可到达。

Photolithography photoetching method and thermal ion-exchanging technology can be used for fabrication of planar microlens array in glass substrate whose elemental lens is graded-index element.

光刻离子交换技术可用于在玻璃基片上制备变折射率的平面微透镜阵列。

Meanwhile, a novel method with simple structure for zooming is proposed, which is able to be used in microlens array photolithography system for zooming.

同时提出了一种结构简单、可应用于微透镜列阵成像光刻系统调焦的新方法。

ALL PUNGS: In addition to a set of eyes, if a winning hand consists of sets of pung only and regardless of any other description, it is called All Pungs and awarded 3 fans.

对对胡：除了一组眼外，若一手胡牌的牌子组合只包含刻子而不论任何其它叙述，则可称为"对对胡"，得3番。

The Scanning tunneling Microscope established by G. Binnig and H. Rohrer in 1980's is not only used as the analytical means which investigates the variety performances of material surface but can be a nano-fabricating tool completing the micro/nano scale etching and modifying on many types of surfaces.

80年代发展起来的扫描隧道显微镜不仅可作为研究各种表面性质的一种分析手段，还可作为一种在纳米尺度上对各种表面进行刻蚀和修饰的微/纳加工工具。

There were equally excellent opportunities for vacationists in the home island, delightful sylvan spots for rejuvenation, offering a plethora of attractions as well as a bracing tonic for the system in and around Dublin and its picturesque environs even, Poulaphouca to which there was a steamtram, but also farther away from the madding crowd in Wicklow, rightly termed the garden of Ireland, an ideal neighbourhood for elderly wheelmen so long as it didn't come down, and in the wilds of Donegal where if report spoke true the coup d'oeil was exceedingly grand though the lastnamed locality was not easily getatable so that the influx of visitors was not as yet all that it might be considering the signal benefits to be derived from it while Howth with its historic associations and otherwise, Silken Thomas, Grace O'Malley, George IV, rhododendrons several hundred feet above sealevel was a favourite haunt with all sorts and conditions of men especially in the spring when young men's fancy, though it had its own toll of deaths by falling off the cliffs by design or accidentally, usually, by the way, on their left leg, it being only about three quarters of an hour's run from the pillar.

在故乡的岛屿度假的人们也有同样的良机。这里有令人赏心悦目、有助于恢复青春的森林地带，都柏林市内外以及风光绮丽的近郊，不仅富于无上魅力，而且还能促进身体健康。有一条蒸气火车铁轨一直铺设到噗啦呋咔瀑布。还有威克洛那越发远离尘嚣、对&爱尔兰庭园&这一称谓当之无愧的所在。只要不下雨，那一带是供年长的人们骑自行车的理想田园，再有就是多尼戈尔的荒野，倘若传闻属实，景色也极为壮观。不过，由于最后提到的这一地区交通不便，尽管此行可获益匪浅，前往的游客毕竟有限，收入也微不足道。相形之下，霍斯山凭借绢骑士托马斯、格蕾斯。奥马利和乔治四世留下的遗迹，以及遍布于海拔数百英尺高处的杜鹃花，使它成为男女老少不分贫富，人人爱去的地方。由纳尔逊纪念柱乘车前往，只消三刻钟就可到达。

The split between the two groups can hardly be papered over.

这两个团体间的分歧难以掩饰。

This approach not only encourages a greater number of responses, but minimizes the likelihood of stale groupthink.

这种做法不仅鼓励了更多的反应，而且减少跟风的可能性。