双动

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

Based upon the different syntactic structures, the types of semantic transitivity relations are described in detail.

接着分析双动谓语句的句法结构的理解因素，并拟定一些理解原则。

Conant Controls' complete line of Precision Selector Valves, Stack Valves, and Control Valves has been

Conant Controls公司设计出了全系列的精密旋钮阀、双动滑阀、控制放空阀等产品，从而给系统设

Through the research,it is found that both the Chinese causatives and the English causitives have double-core structrure at the deep layer.The two groups of causatives present similar features in the process of transforming from the deep layer to the surface layer.

通过研究发现，汉英致使句在深层都是双动核结构，从由深层向表层的转换过程中，两组句子表现出了相似的特点。

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Power Station where the main products are: the former pool water level monitor, oil mixing with water signal devices, oil mixing with water monitor, two two-FirstCall / 2 three / two four-way double-acting self-sustaining valve, speed monitoring devices, bearings oil level signal devices, flow, head efficiency monitoring device, the displacement angle of transmission controllers, intelligent two-way transfer of water supply valves, intelligent pressure transmission controllers, automatic self-cleaning water filters, small-caliber recoil-type filter, guided Leaf position switch, automatic qi device, float liquid level controller, temperature indicator, water level monitor, solenoid valve, electric butterfly valve, magnetic flap level gauge, linear displacement transducer, temperature data logging devices, shear sell-off signal devices, vibration, degree of monitoring devices placed, programmable speed monitoring devices, gate opening apparatus such as hundreds of professional instrumentation and automatic control device!........

其中电站主要产品有：前池水位监测仪、油混水信号器、油混水监测仪、二位二通/二位三通/二位四通双动自保持球阀、转速监测装置、轴承油位信号器、流量水头效率监测装置、位移角度变送控制器、智能双向供水转阀、智能压力变送控制器、全自动自清式滤水器、小口径反冲式滤水器、导叶位置开关、自动补气装置、浮球液位控制器、温度显示仪、水位监测仪、电磁阀、电动蝶阀、磁翻板液位计、直线位移变送器、温度巡检仪、剪断销信号装置、振动摆度监测装置、可编程转速监测装置、闸门开度仪等上百种专业仪表与自动控制装置！。。。。。。。。

Our products mainly include: the use of Qiecai machines, food-productive, crowded vegetable machine, the series of electric pasta machine, rolling machine, and machine face, double-action and noodle machine, Mixing Machine, stirred-machine, the first-Man,, And other major series, more than 40 kinds of specifications models, formed a diversified series, matching the pattern of products, with annual sales volume reached 10,000 sets.

我们的产品主要有：多用切菜机、刹菜机、挤菜机，系列电动面条机、轧片机、和面机、双动和面机，揉面机、搅面机、镘头机、等几大系列，40余种规格型号，形成了多元化、系列化、配套化的产品格局，年销售总量达到上万台套。

Wquipment Manufacture Branch,And succesfully produce PE*250*1000 new energe saving double pushing jaw crusher,Pf high grade gathering material machine for road,PCf-II compound crusher,4PCG circle S bed special gathering machine and 2pgy-2 roller pressure machine etc.series products,which provide a series of relible equipment to replace the wearing machine.

历时五年2005年成立徐州宏达耐磨材料有限公司设备制造分公司，成功研制了PEX250X1000新型节能双动颚破碎机PE型等高等级公路专用集材料机、PCF-II型复合破碎机、4PCG型循环硫化床专用集料机，2PGY-II型锟压机等系列先进产品。为以破代替磨提供了一系列节能、稳定、可靠的首选理想设备。

To improve the response speed of on-off solenoid valve of big flux,detailed analysis on poppet valve is given and an on-off solenoid valve with movement of both spool and cover is designed.

通过对锥阀特性的分析，设计了一种阀芯、阀套同时运动的芯套双动高速开关阀，该阀增大了高速开关阀的开口度，提高了响应速度和流量。

The system can complete plenty of testing program, such as indicator diagram, speed diagram, friction diagram, temperature attenuation diagram, fatigue life testing, single and double actuator testing, whole frequency testing and so on.

该系统可实现汽车减振器的示功试验、速度试验、磨阻试验、温衰试验、疲劳寿命试验、单双动试验和扫频特性试验，技术先进，功能强大。

The split between the two groups can hardly be papered over.

这两个团体间的分歧难以掩饰。

This approach not only encourages a greater number of responses, but minimizes the likelihood of stale groupthink.

这种做法不仅鼓励了更多的反应，而且减少跟风的可能性。