单块电路
- 与 单块电路 相关的网络例句 [注:此内容来源于网络,仅供参考]
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This paper theoretically studies the design of the negative coefficient fourfold differential circuit formed by single operational amplifier.
从理论上研究了单块集成运算放大器构成的负系数四次微分电路的设计,着重分析了该电路的直流误差,并给出了电路的设计公式。
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The invention discloses a method to integrate single CMOS with bulk silicon microelectromechanical system, its technical project: 1 forming isolating groove: adopting deep-groove etching, and SiO2 and polycrystal silicon filling to realize the insulation of MEMS structure and CMOS circuit; 2 making standard CMOS circuit; 3 using SiO2 and Si3N4 as mask, etching silicon on the back until exposing SiO2 at the bottom of the isolating groove, to complete the thickness control for MEMS silicon structure layer; 4 completing metalizing the CMOS circuit and masking the MEMS structure: MEMS structure region uses Al as mask and CMOS circuit region uses thick photoetching glue as mask, using DRIE to release silicon structure.
本发明公开了一种将单片CMOS与体硅微机械系统集成的方法,其技术方案为:1形成隔离槽:采用深槽刻蚀,SiO 2 和多晶硅填充,实现MEMS结构和CMOS电路的绝缘;2完成隔离槽后进行标准CMOS电路的加工;3用SiO 2 和Si 3 N 4 作掩膜,从背面腐蚀硅,直至暴露出隔离槽底部的SiO 2 ,完成MEMS硅结构层的厚度控制;4完成CMOS电路金属化和MEMS结构掩膜:MEMS结构区用铝作掩膜,CMOS电路区用厚光刻胶作掩膜,用DRIE释放硅结构。用本发明方法不仅获得了较大的质量块,而且用本发明较高的深宽比制作出的结构电容,同时实现了体硅微机械与CMOS电路的集成,显著提高MEMS传感器的精度和稳定性,具有前沿性和重要实用价值。
- 推荐网络例句
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Neither the killing of Mr Zarqawi nor any breakthrough on the political front will stop the insurgency and the fratricidal murders in their tracks.
在对危险的南部地区访问时,他斥责什叶派民兵领导人对中央集权的挑衅行为。
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In fact,I've got him on the satellite mobile right now.
实际上 我们已接通卫星可视电话了
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The enrich the peopling of Deng Xiaoping of century great person thought, it is the main component in system of theory of Deng Xiaoping economy, it is a when our country economy builds basic task important facet.
世纪伟人邓小平的富民思想,是邓小平经济理论体系中的重要组成部分,是我国经济建设根本任务的一个重要方面。