刻槽

This paper introduced principle, process, characteristics and controlling deep slot of spiral groove movable ring of photoetching in the liquid hydrodynamic seal.

主要介绍了流体动力密封螺旋槽动环光刻工艺的特点、原理、工艺过程、工艺流程、槽深控制方法以及应用情况，提出了采用高能束流刻蚀螺旋槽动环的新途径。

The invention discloses a method to integrate single CMOS with bulk silicon microelectromechanical system, its technical project: 1 forming isolating groove: adopting deep-groove etching, and SiO2 and polycrystal silicon filling to realize the insulation of MEMS structure and CMOS circuit; 2 making standard CMOS circuit; 3 using SiO2 and Si3N4 as mask, etching silicon on the back until exposing SiO2 at the bottom of the isolating groove, to complete the thickness control for MEMS silicon structure layer; 4 completing metalizing the CMOS circuit and masking the MEMS structure: MEMS structure region uses Al as mask and CMOS circuit region uses thick photoetching glue as mask, using DRIE to release silicon structure.

本发明公开了一种将单片CMOS与体硅微机械系统集成的方法，其技术方案为：1形成隔离槽：采用深槽刻蚀，SiO 2 和多晶硅填充，实现MEMS结构和CMOS电路的绝缘；2完成隔离槽后进行标准CMOS电路的加工；3用SiO 2 和Si 3 N 4 作掩膜，从背面腐蚀硅，直至暴露出隔离槽底部的SiO 2 ，完成MEMS硅结构层的厚度控制；4完成CMOS电路金属化和MEMS结构掩膜：MEMS结构区用铝作掩膜，CMOS电路区用厚光刻胶作掩膜，用DRIE释放硅结构。用本发明方法不仅获得了较大的质量块，而且用本发明较高的深宽比制作出的结构电容，同时实现了体硅微机械与CMOS电路的集成，显著提高MEMS传感器的精度和稳定性，具有前沿性和重要实用价值。

As a jeweler engraves signets, so shall you engrave the two stones with the names of the sons of Israel.

要用刻宝石的手工，彷佛刻图书，按著以色列儿子的名字，刻这两块宝石，要镶在金槽上。

Engrave the names of the sons of Israel on the two stones the way a gem cutter engraves a seal. Then mount the stones in gold filigree settings.

要用刻宝石的手工，彷佛刻图书，按着以色列儿子的名字，刻这两块宝石，要镶在金槽上。

Hurst parameters of data series of gold grade, derived from notch grooves in different exploratory lines, are calculated by the methods of incremental standard deviation, curve length transform and resealed range analysis, and the applicability of these methods is evaluated affectively.

以大尹格庄金矿不同勘探线刻槽取样所得的金品位序列为例，评价Hurst指数的几种估算方法在地质剖面数据分析中的适用性。

Ou shalt make them to be set in ouches of gold.

28：11 要用刻宝石的手工，彷佛刻图书，按着以色列儿子的名字，刻这两块宝石，要镶在金槽上。

With the work of an engraver in stone, like the engravings of a signet, shalt thou engrave the two stones with the names of the children of Israel: thou shalt make them to be set in ouches of gold.

11要用刻宝石的手工，彷佛刻图书，按著以色列儿子的名字，刻这两块宝石，要镶在金槽上。

With the work of an engraver in stone, like the engravings of a signet, shalt thou engrave the two stones with the names of the children of Israel: thou shalt make them to be set in ouches of gold.

28：11 要用刻宝石的手工，仿佛刻图书，按着以色列儿子的名字，刻这两块宝石，要镶在金槽上。

With the work of an engraver in stone, like the engravings of a signet, shalt thou engrave the two stones with the names of the children of Israel: thou shalt make them to be set in ouches of gold.

28：11 要用刻宝石的手工，彷佛刻图书，按着以色列儿子的名字，刻这两块宝石，要镶在金槽上。

The approximate analytic solution for the plane problem of semi infinite elastic solid subjected to a concentrated force at the midpoint of bottom of a groove is given by means of complex stress function.

运用复变函数方法，求出了半无限弹性体通过刻槽之底施以集中力的平面弹性应力场的近似解析解，并进行了光弹性试验，理论上求得的应力分布与试验结果相吻合

As she looked at Warrington's manly face, and dark, melancholy eyes, she had settled in her mind that he must have been the victim of an unhappy attachment.

每逢看到沃林顿那刚毅的脸，那乌黑、忧郁的眼睛，她便会相信，他一定作过不幸的爱情的受害者。

Maybe they'll disappear into a pothole.

也许他们将在壶穴里消失