刻

At first, laser interference lithography system, the uncertainty of experimental results often can not guarantee consistency.

在研究初期，激光干扰光刻系统的不稳定性常常不能保证实验结果的一致性。

Study on computer simulation of proximity lithography.

接近式光刻的计算机模拟研究。

This dissertation is carried out with the concentration of optical lithography technology based on surface plasmons.

本论文主要围绕着表面等离子体在光刻技术中的应用展开。

In order to improve the application of SPM lithography, SPM oxidation and its overlay lithography were studied.

为加强基于扫描探针显微镜的微细加工技术的应用，本文对扫描探针显微镜的阳极氧化加工及套刻对准进行研究。

This paper focuses on state-of-the-art lithography technology for advanced applications in compound semiconductor material processing.

重点讨论了化合物半导体材料加工中的先进光刻技术应用现状。

This paper describes solutions for automated lithography processing in terms of handling and pre-alignment technologies.

叙述了进行自动光刻加工中片子传递和对准过程的一些解决方法。

Proximity deep lithography is investigated in this thesis.

本文对接近式深度光刻进行了深入模拟研究。

The results show that the structure design is reasonable and the structural deformation and natural frequency can meet the requirement of the lithography.

仿真结果表明：结构设计合理，结构变形和固有频率均能满足光刻机的要求。

Recent years, with the rapid development of the lithography technology, conventional techniques of optical manufacture and measurement are faced with great challenge.

中文摘要近年来，随着光刻技术的不断发展，传统的光学加工检测技术面临着越来越多的挑战。

Since LIGA process is widely used in MEMS technology, Deep lithography is investigated in recent years.

随着LIGA技术在微电子机械系统加工工艺中的广泛应用，尤其是在生物科学技术领域的广泛应用，深度光刻技术也越来越成为研究应用的热点。

On the other hand, the more important thing is because the urban housing is a kind of heterogeneity products.

另一方面，更重要的是由于城市住房是一种异质性产品。

Climate histogram is the fall that collects place measure calm value, cent serves as cross axle for a few equal interval, the area that the frequency that the value appears according to place is accumulated and becomes will be determined inside each interval, discharge the graph that rise with post, also be called histogram.

气候直方图是将所收集的降水量测定值，分为几个相等的区间作为横轴，并将各区间内所测定值依所出现的次数累积而成的面积，用柱子排起来的图形，也叫做柱状图。