刻

We investigate the effects of the configurations of the chamber and the coil of an inductively coupled plasma etcher and the process parameters on the homogeneity of plasma distribution.Using the modules of plasma,electromagnetic field,etc.in the commercial software CFD-ACE+,a two-dimensional discharge model of an ICP etcher was built.

为研究感应耦合等离子体刻蚀机腔室与线圈结构以及工艺参数对等离子体分布均匀性的影响，基于商业软件CFD-ACE+中等离子体与电磁场等模块建立了ICP刻蚀机二维放电模型。

This thesis described the etching characteristics of silicon nitride passivation films in the thin-film transistor structure using an enhanced capacitive-coupled high-density plasma etcher. The main parameters used in these experiments were RF source power, RF bias power, chamber pressure, SF6, O2 and He gas flow rates.

中文摘要本研究以加强型电容耦合式高密度电浆蚀刻机台来研究蚀刻氮化矽结构，实验操作参数为射频电浆源功率、射频偏压源功率、SF6、O2、He气体流量和腔体压力。

Main process gases used in the metal etcher of the semiconductor industry are chlorine and boron chloride. Process gases are ionized in the reactor chamber to form free radicals by plasma, which etches off aluminum film from the wafer surface.

半导体金属蚀刻制程主要使用氯气及氯化硼等气体，以高能电浆离子化产生自由基后使其与晶圆表面之铝反应将多余之铝蚀刻而产生沟槽。

A set of ICP etching system has been designed and manufactured through the analysis of the probe diagnosed results.

这些结论为设计ICP刻蚀系统的反应室、选择合适的刻蚀工艺提供了科学的根据。

He was also developing his skill at etching, learnt initially in Berlin.

他的蚀刻技巧也在发展，蚀刻最初他是在柏林学习的。

The method can be carried out in a direct plasma etching process or in a remote plasma etching process.

该方法可以在直接等离子体刻蚀处理中或远程等离子体刻蚀处理中执行。

Reactive ion etching, as one of dry etching technologies, was originated in the 1970's.

作为等离子体干法刻蚀技术的一种，反应离子刻蚀诞生于20世纪70年代。

The electroplated ferronickel shutter is suspended by a silicon spring The shutter is fabricated by the nonsilicon surface micromachining techniques. The planar coil is fabricated by high-aspect-ratio photolithography and mask-plating processes. And the silicon spring and the fiber alignment components are fabricated by the reactive ion etching and by the silicon anisotropic etching process.

电镀铁镍制作的挡光片被固定在一个硅弹簧上，该挡光片采用非硅表面微加工工艺制作，平面电感线圈利用高深宽比的光刻工艺和掩蔽电镀工艺制作，硅弹簧和光纤对准元件采用反应离子刻蚀和硅的各向异性腐蚀工艺制作。

The physical mechanism of pupil filleting to improve the photolithography resolution is discussed and several experimental results are given.

推导出光刻成像的计算机模拟公式，讨论了光瞳滤波提高光刻分辨率的物理机理，给出了几个实验结果。

If the user would like to provincial money, want to protect the disk, then burn, it may be compared to choose the kind of flexible, can be put on both sides of the plastic film disc recorder.

如果用户想省点钱，又想保护好刻录盘的话，不妨选择那种比较柔韧的、两面均可放刻录盘的塑料薄膜。

Breath, muscle contraction of the buttocks; arch body, as far as possible to hold his head, right leg straight towards the ceiling (peg-leg knee in order to avoid muscle tension).

呼气，收缩臀部肌肉；拱起身体，尽量抬起头来，右腿伸直朝向天花板（膝微屈，以避免肌肉紧张）。

The cost of moving grain food products was unchanged from May, but year over year are up 8%.

粮食产品的运输费用与5月份相比没有变化，但却比去年同期高8％。