分析试验

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

As we were getting the extra ,unseparated , duplet or splitted Peak in our analysis ( done in presence of Chinese people even with using their column and method ) these chromatograms are also exhibiting the unseparated, duplet,splited extra peak at the R.T. 2.42 and 2.54 having the equal basemarking width of only one peak compared to other peaks of the impurities.

初译：我们在分析时得到了额外的未分离的峰、对峰或裂峰（在中方人员面前当场试验，甚至使用中方人员的色谱柱和分析方法时也是如此），这些色谱图在保留时间为2.42和2.54分钟时也呈现出额外的未分离的峰、对峰和裂峰，与杂质的其它峰相比，这些峰的峰底宽不相上下。

As we were getting the extra ,unseparated , duplet or splitted Peak in our analysis ( done in presence of Chinese people even with using their column and method ) these chromatograms are also exhibiting the unseparated, duplet , splited extra peak at the R.T. 2.42 and 2.54 having the equal basemarking width of only one peak compaired to other peaks of the impurities.

我们在分析时得到了额外的未分离的峰、对峰或裂峰（在中方人员面前当场试验，甚至使用中方人员的色谱柱和分析方法时也是如此），这些色谱图在保留时间为2.42和2.54分钟时也呈现出额外的未分离的峰、对峰和裂峰，与杂质的其它峰相比，这些峰的峰底宽不相上下。

Have analyzed causes, property and countermeasure of electromotor Axle-voltage through investigation, statistical analysis and simulation test.

用调查、统计分析和模拟试验的方法具体分析了电机轴电压的产生原因、性质以及防治措施。

Deflection and strain of the given section are analysed through dead-load field test, Hanger endogen force, autooscillation character, impactor factor, damage ration of the main span and approch span are analysed.

在荷载试验方面，对测试截面的挠度和应变进行了分析，同时对吊杆内力及主桥和引桥的自振特性、冲击系数、阻尼比进行了分析。

Assuming that the temperature distribution close to the concrete surface is the quadratic function of the coordinate, the back-analysis equations of thermal conductivity, heat transfer coefficient and absorption coefficient of solar radiation are derived based on one dimension Fourier equation of heat conduction and thermal boundary conditions.

为了选取更接近实际的热工参数，采用试验和反演分析相结合的方法，计算影响日照条件下混凝土结构温度场和温度效应分析结果的热工参数。

The mechanism of cohesiveness is discussed between modified asphalt and aggregate in this paper,which is based on the test results of chemical constituent、ESCA、absorptive capacity and cohesion.

在沥青组分分析、表面能谱分析、吸附和粘结力试验结果的基础上，论述了聚合物改性沥青和矿料的粘附作用机

The excrescence during the helium replacement in satellite gas store case was tested and analyzed by using gas chromatography of GOW-MAC and Agilent company.

用美国GOW-MAC公司的气相色谱仪和Agilent公司的气相色谱仪对某卫星气体贮箱在氦气置换化验过程中发现的未知杂质进行试验分析，经分析未知杂质的来源可能是所用气体贮箱处理时的残留物。

This paper presents a new type control method-the mixture trending law,which based on the exponential trend law,variable rate trend law and the saturated function.

在分析2种控制不足的基础上，提出了基于指数趋近-变速趋近-饱和切换函数的混合趋近控制律，并进行了对比仿真试验分析和实验研究。

The algorithm RSA is complicated and difficult in implementing, because it has to do modular exponentiation on largenumbers more than 512 bits.

分析了RSA算法的软件实现难点为大数的幂模运算，提出了将大数的幂模运算转换为小数幂模运算乘积的高效方法，并实现了RSA算法，该方法在理论分析和试验方面都具有较好的效果。

This one mode pays close attention to network credence foundation of the businessman very much.

这一模式非常关注商人的网络信用基础。

Cell morphology of bacterial ghost of Pasteurella multocida was observed by scanning electron microscopy and inactivation ratio was estimated by CFU analysi.

扫描电镜观察多杀性巴氏杆菌细菌幽灵和菌落形成单位评价遗传灭活率。