光轴点

The measuring device is structured by including a He-Ne laser; a beam expander, a soft aperture slot and a off-axis parabolic mirror to be measured are arranged in turn along the direction of the emergent laser beam direction of the He-Ne laser; a standard cross hair and a micro objective are arranged in turn on the direction of the reflected beam of the off-axis parabolic mirror; the micro objective is arranged on the focus of the off-axis parabolic mirror; the focus is imaged on an area array CCD; the output end of the area array CCD is connected with a computer; the off-axis parabolic mirror is fixed on a five-dimensional electric adjusting frame.

一种离轴抛物面镜点聚焦能力测定装置和测定方法，测定装置的构成包括：一台He-Ne激光器，沿该He-Ne激光出射激光束方向依次设置扩束器、软边光阑和待测的离轴抛物面镜，在该离轴抛物面镜的反射光束方向依次设置标准叉丝和显微物镜，该显微物镜位于所述的离轴抛物面镜的焦点，所述的焦点成像于面阵CCD上，该面阵CCD的输出端接计算机，所述的离轴抛物面镜固定在一五维电动调整架上。

In this paper, a new method for data processing is presented based on amelioration of the traditional arithmetic,and the higher accuracy of measurement can be achieved in the larger axial distance. In the data processing ,the linear fitting method is adopted to process a series of discrete points.

文章介绍了一种新的数据处理方法，其先对各物点的轴向光强采样值进行线性拟合，再由拟合得到的直线确定最大光强所对应的轴截面位置，这样可以在较大的轴向采样间距下获得较高精度的三维轮廓信息。

Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

In a thin spherical lens, not all rays from infinity--incident parallel to the optical axis--are united at one point.

在一个薄球面透镜，并不是所有的射线无限-突发事件平行光轴-是美国在1点。

An object, which is located in the plane perpendicularly to the optical axis going through the main

一个垂直于光轴的物体通过主点H，在垂直于光轴的平面上形成一个放大一倍的像。

Using two symmetrical plano-convex lens system to fabricate grating was analyzed and the characteristic of diffraction wavefront aberration of the grating was summarized by ray tracing program using MATLAB siftware.

分析使用两个对称的单平凸透镜光路制作光栅并用MATLAB编写光线追迹程序分析了所制作的光栅的衍射波像差的特点，经计算得出在较小焦比D/F情况下其衍射波像差仅与两支光路点光源的调节偏差之差有关与单独的各个偏差无关；初级像差中球差很小几乎可忽略：彗差仅与垂轴调节偏差之差成线性关系；像散仅与轴向调节偏差之差成正比；且当平凸透镜的焦比D/F增大时，各像差项迅速增大。

An optical scanning device for scanning tracks of an optical record carrier using a radiation beam, the device including an optical head ( 16 ), defining an optical axis, for converging the radiation beam to a spot when scanning the record carrier; and a rotary arm ( 2 ) for moving the optical head across the record carrier.

一种光学扫描设备，用于利用辐射光束扫描光学记录载体的轨道，该设备包括光头(16)，其限定了光轴，用于在扫描记录载体时将辐射光束会聚为光点；和旋转臂(2)，用于在记录载体上移动光头。

Basing on electromagnetism theory characteristic of light wave, the formula of the relation of refringence e light is inferred under any axis location and any angle, when it is refracting.

基于平面光波在晶体中传播的电磁理论特性，推导了光波在晶体表面折射时，双折射光波中e光线透过晶体出射点的位置受到任意光轴取向、任意入射角影响的关系式；利用MATLAB对关系式进行了数值计算分析，绘出双折射e光与任意光轴取向、任意入射角关系曲线，并给出了对应的定量关系式；实验验证了该公式是正确的。

The following central point within a small local region of current tracing point can be obtained based on the influence of neighboring points as well as the smoothness and fairness principle. Finally, a sequential of central points can be traced out efficiently without any iteration and a parametric curve can be reconstructed by interpolating the central points.

该方法仅从当前跟踪点的邻近点集与曲线重建光顺准则出发，无须迭代，可快速、有效地跟踪得到无序点集的一个中轴点列，最后再由此点列拟合出参数曲线。

Of or relating to light emitted from a point source and reflected or refracted from a curved surface.

得到在相干光是点光源、均匀光源和高斯光源的情况下系统轴向光强。

As she looked at Warrington's manly face, and dark, melancholy eyes, she had settled in her mind that he must have been the victim of an unhappy attachment.

每逢看到沃林顿那刚毅的脸，那乌黑、忧郁的眼睛，她便会相信，他一定作过不幸的爱情的受害者。

Maybe they'll disappear into a pothole.

也许他们将在壶穴里消失