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Finally, a two-mask process was attempted to extend the same concept of the chip process. Here the mask of the contact aperture was replaced by the mask of the LED pad. After etching the SiO2 and ITO in the aperture region, a lateral etch of SiO2 was made to increase the ITO contact area. Although the forward voltage of the GaN LED shows a normal value, the process yield is still low and requires further study.

二道光罩制程延伸了三道光制程的理念,只是因为透明导电层的圆孔图形,是用电极的光罩去开的,所以蚀刻完二氧化矽膜及氧化铟锡膜后,必须再做二氧化矽膜的回蚀刻,让二氧化矽再内缩进去,以增加氧化铟锡和电极的接触面积,不会造成发光二极体的顺向电压提高,但因制程良率太低,所以还须要继续研究改善。

Another approach in enhancing the light extraction efficiency of AlGaInP LED was accomplished using a surface roughening process. In this process, the Au(170 nm)/AuBe(260 nm)/Au(170 nm) ohmic contact layers were first deposited on the GaP window layer. After the alloy annealing process (480°C for 10 min), the Be atoms will diffuse into the GaP top layer and form non-uniform clusters. The LED samples were then immersed into a mixture 3H3PO4:1H2O2:1H2O solution for 6 min, resulting in a rough GaP surface. The luminous intensity of the AlGaInP LED can increase from 42 to 50 mcd, that is, an 18% enhancement can be achieved via the present non-photolithography surface roughening process.Keywords: LED, AlGaInP, Cu substrate, Reflector, Surface roughening

在实验的第二部份是开发磷化镓窗口层之粗化制程,我们是藉由正面金/铍欧姆接触电极之熔合制程,使铍扩散至磷化镓层,同时利用铍渗入磷化镓造成之特殊组成,可形成不均匀之蚀刻阻挡,而在磷化镓表面形成粗化,我们发现480℃、10分钟的熔合制程,加上浸泡磷化镓蚀刻溶液6分钟,可将四元发光二极体之发光亮度由42 mcd 提升到50 mcd,经由此无光罩粗化制程可将亮度提升18%,明显提升磷化铝铟镓发光二极体之外部量子效率。

Black matrix is one of the key components in color filter application. Metal CrOx/Cr and polymer black resin material are often used as the BM. Effects of processing parameters on patterns and optical properties of BM, used with these two kinds material were studied.

中文摘要由於黑色矩阵是彩色滤光片关键的制程之一,因此本实验是针对彩色滤光片中的黑色矩阵常用的材料如CrOx/CrOy/Cr低反射铬膜和黑色树脂,研究制程参数对其图像和光学特性的影响。

The manufacturing of TFT-LCD involves four main processes: array, color filter, cell, and assembly processes.

薄膜液晶显示器的生产主要有四个制程:阵列制程、彩色滤光片制程、组立制程及模组制程。

This study is focused on the optimum parameters study of the stamper making process.

本研究是针对光碟微结构模仁的各项制程中,找出影响光碟模仁微结构与粗糙度的最佳各项参数,实验中分别比较V90与IP3650两种光阻剂在控制光阻涂布厚度、显影浓度、显影时间与离子清洗时间,探讨其改变各项制程参数对微结构成型与粗糙度的影响。

Composition of suspension will chang from titanium monoxide to titanium dioxide during standstill procedure. Experimental results show that the proposed method can successfully prepare the anatase phase of titanium dioxide .In the photocatalysis experiment, the prepared titanium dioxide nanofluid absorbs the Ultraviolet when light wavelength was 360 to 380 nm. Adsorption experimental results show that the efficiency of absorbing methylene blue using TiO2 is higher than that for TiO2 (Degussa P-25) or ZnO. Depigmentation of methylene blue experimental using TiO2 can depigmentize methylene blue reach 100% in 60 min.

悬浮液所含之奈米颗粒在静置过程中,成份方面会由似一氧化钛转变为二氧化钛;在结晶组成方面,所制备之二氧化钛颗粒之结晶组成为锐钛矿结构;在光催化方面,所制备之奈米二氧化钛悬浮液在光波长360nm~380nm时产生吸收紫外光现象,在吸附实验中本制程所制备的二氧化钛颗粒的吸附效果优於商用的二氧化钛及氧化锌,在亚甲基蓝的脱色实验中本制程所制备的二氧化钛颗粒能在60分钟内达到脱色率100%。

With careful control of environmental conditions, measurement precision to the nanometer scale or below is possible with PSI.

移相干涉术作为快速、非接触的精密测量手段,已经广泛地应用于光学零件、光学系统、精密表面检测和其它一些与光程差参数相关的物理量的测量。

The Fermat"s principle, Fresnel"s coefficients, Goos-Hanchen effect and Brewster angle at an interface between a PIM and a NIM were studied respectively. When the NIMs are introduced, the two traditional descriptions of Fermats principle are not consistent with each other and the least time principle do not hold true anymore.

随着负折射率介质的引入通过对费马原理的两种传统描述形式的研究可以发现,正—负折射率介质平界面处的最短时间原理已不成立,并进一步验证了使用光程表达的费马原理才是严格的正确的理论。

The aim of this research is to study the technology of photoelectric component, the high reliability process of 8 inch infrared ray absorption type of filter, and its market analysis. Filter is the key component of various optical systems. In general, color filter is fabricated by coating method. This study presents the novel method for filter fabrication by high temperature sintering of Si, B, Al2O3, and other materials. Compared with conventional filter, the absorption type of filter have more stable spectrum because of its properties of invisible light absorption.

中文摘要本研究是针对光电介面元件技术,高可靠度八吋红外线吸收式滤光片制程研究及其市场价值分析,光学滤光片为许多光学系统以及影像撷取系统不可缺少之重要元件,一般常见光学滤光片都是以镀膜方式,本实验针对矽、硼、三氧化二铝等材料以高温烧结方式制造光学滤光晶片,以材料特性吸收不可见光之光波,来得到所需光学滤光片之光谱特性,此吸收式光学滤光晶片之光谱稳定性高。

Concentration measurement of NO gas by folded BOXCARS

对 NO气体的特性进行了研究,在不同浓度下,得到了 NO气体对光的吸收谱和某一波长下 NO气体吸收率随气体浓度、光程的变化特性。

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