光刻的

But it is not accurate at off-axis area.

这样就可以计算整个光刻胶内的光强分布。

The mask applying to experiment is opened up and that the mask exposure's device is designed and done. The technologic flow of the MEMS unit's manufacture combining optical score, sacrifice layer, chymic deposit with the SL prototyping technology is researched and experimental sample is done. Taking 3D capacitance micro actuator done by RP technology as a example, the main point of the manufacturing technics is illuminated, the new way manufacturing complex micro mechanical structure is explored.

在介绍了微电子机械系统基本情况的基础上，首次提出了将RP技术应用于MEMS的思想以及平面掩膜式光固化快速成型方案；开发了实验用掩膜，设计并制作了平面曝光成型的实验装置该装置；首次研究了将光刻技术、牺牲层技术、化学淀积镀膜与光固化快速成型制造技术等相结合，来制作MEMS件的工艺流程，并制作了实验样件。

At the same time of theory research, the fabrication: photoengraving, sputtering, diffusion scraping and polishing surface, light testing and alignment of electrodes is studied by experiment deeply.

型电极结构来调制2×2光波导开关；在进行理论研究的同时，本文对光开关的工艺制作：光刻，溅射，扩散，抛磨端面，套刻电极等每一步工艺都进行了深入详细的实验研究。

The invention provides a method of decreasing big pattern hollow during metal and polysilicon chemical and mechanical rubbing, it mainly uses photoetching and etching technique, combining decorated chemical and mechanical rubbing method, avoids big pattern hollow when metal and polysilicon is rubbed.

本发明提供一种在金属和多晶硅化学机械研磨中减少大图案凹陷的方法，主要通过以光刻和蚀刻技术结合修饰性化学机械研磨的方法，避免对大图案的金属或者多晶硅进行研磨时出现过度凹陷。

Peripherin-kizami effect of holography: adoption of the photoetching machine computer programming walk-by-bit imaging technology and identifies the surface brightness, along with the change of the perspective that identifies the patterns occur within the rules of a beautiful animation, plus a hierarchical pattern can be a strong level of icing on the cake and more graphics and text content, the user thereby to protect their products from others phishing as well as the purpose of improving the products concerned and show their uniqueness and uniqueness, thus increasing the added value of coplasticizer products and enhancing brand image.

动感光刻成果激光全息：堵住光刻机电脑编程行位办理技艺成像，标志暗地亮度极佳，随着视角的保持，标志边的图案会呈不隐法规而标致的不静态成果，加上图案的不合层办理，更可获得很不弱的条理立体感和较众的图文边容，用户由此到达爱护自己的产物免遭他人仿冒的纲的，既能提矮产物档次，又表不隐其单共性和惟一性，从而补充日化产物的附加值和晋升品牌不隐象。

The present invention is process of separating and assembling metallic single wall carbon nanotube and semiconductive single wall carbon nanotube synchronously. The process includes the following steps: photoetching silica substrate to prepare Au electrode, cutting intervals in the electrode with focused ion beam, soaking the electrode in DMF solution of single wall carbon nanotube, and applying electric field of 2-8 V magnitude and 1-10 Hz frequency.

本发明的目的在于提供一种金属性和半导体性单壁碳纳米管的同步分离与组装方法，该金属性和半导体性单壁碳纳米管的同步分离与组装方法包括如下步骤：通过常规光刻在含二氧化硅的衬底上制备金电极的步骤；利用聚焦离子束在电极上刻出若干个间隙的步骤；将上述电极浸入到单壁碳纳米管的DMF溶液的步骤；施加大小为2～8V、频率为1～10Hz的电场的步骤。

By using the laser-lift-off technique followed by plasma etching process to roughen the surface, the VLEDs with n-GaN surface roughening has been fabricated.

另一部份，则是在垂直式氮化镓发光二极体的表面制造粗化的效果，以来增进光从发光二极体中萃取出的效率，利用乾式蚀刻将表面制造出粗化的效果，再利用标准的黄光微影制成技术，因此成功的制造出n型表面粗化的垂直式氮化镓发光二极体，至於出光强度的增强量会随者表面粗化情况的不同有著30%？

The whispering gallery modes from Rhodamine B doped sol gel microdisks under 532 nm pulsed laser pumping was studied. Microdisks of 15 μm～20 μm in diameter were fabricated by photolithography of light polymeriable sol gel thin films.

采用光聚合溶胶凝胶材料，通过光刻制备得到直径在15 μm～20 μm间的光学微盘谐振腔，在掺有若丹明B染料时，用脉冲532 nm激光抽运微盘，观察到回廊耳语模式，实验所得峰位与理论值相符。

The source and leak electrode metal layers and pixel electrode layer can be sedimented in the same or different sputtering equipments continuously, which improve the utility of sputtering equipment.

本发明通过将原来的5Mask工艺简化为3Mask工艺，共减少两次光刻过程，从而达到减少工艺步骤的目的；同时本发明通过合并源漏电极和像素电极光刻，使得源漏电极金属层和透明像素电极层可以在同一台溅射设备中连续沉积，从而提高溅射设备的利用率。

The design principle of refractive microlens arrays with different microstructures is proposed on the basic of refractive microlens arrays fabrication using thermal reflowing method and ion beam etching technique.

探讨了通过光刻热熔法及离子束蚀刻技术制作具有不同微面型结构的折射微透镜阵列的设计原则。

The basic concept of FOP can be summarized as to further optimize effective prescription according to the standard of curative effects and with the aid of modern science and technology and theories of traditional Chinese medicine.

其基本内涵可概括为：以确有疗效的中药复方为研究对象，以现代科学技术和传统中医药理论为技术支持，以该复方所治病证的药效响应为评价标准，以优化重组疗效更优的新复方为研究目的。

Ever since our world has been a world, native forests have been indiscriminately exploited by man.

自从我们的世界一直是世界原生森林被任意剥削人。