光刻的

This article studies the design of Alignment system based on video and confocal, Mask-Panel Alignment is one of the threes key technologies (projectionlens, aligner, wafer stage)in lithography.

针对目前我们研究的激光投影光刻机对高分辨力和高衬度的需要，设计了一套基于视频图像对准原理的激光投影光刻对准系统。

Alternating aperture phase shift mask is an advanced technology to enhance lithography resolution by adding phase shifters to the mask, which corrects the pattern distortion caused by diffraction of light in deep sub-wavelength lithography.

交替移相掩模是一种通过对掩模版进行相位偏移而提高光刻分辨率的先进工艺技术，用来解决深亚波长光刻下由于衍射效应引起的图形失真问题。

Not only implementing the normal condition litho rules, we also implement the process window rules by check-vector method. It is useful for evaluation the process window for chips shape.

本文，不但实现了一般光刻情况下光刻规则，而且利用测试矢量的方式实现了工艺窗口的验证规则，可用于验证版图中图形工艺窗口的大小。

Methacrylate photoresist was one of the tradition photoresist s and it had high transparent and resolution.

甲基丙烯酸树脂光刻胶是传统的光刻胶之一，具有高度的透明性及分辨率。

Methacrylate photoresist was one of the tradition photoresists and it had high transparent and resolution.

甲基丙烯酸树脂光刻胶是传统的光刻胶之一，具有高度的透明性及分辨率。

The photo resist finish is exposed to ultra violet light. The chemical reaction triggered by that process step is similar to what happens to film material in a film camera the moment you press the shutter button.

光刻胶层随后被曝光在紫外线之下，期间发生的化学反应类似按下机械相机快门那一刻胶片的变化，光刻胶经过紫外线曝光后会变得可溶解。

A photolithographic mask is used in a photolithography imaging system for patterning a semiconductor wafer.

一种在光刻成像系统中应用的用于形成半导体晶片的图形的光刻掩模。

Imprint lithography, as one of the next generation micro-fabrication processes,is regarded as an alternative to the traditional photolithography technologies.

压印光刻作为未来微细制造的工艺方法之一，被认为是解决传统光学光刻分辨率瓶颈的一种发展方向。

A transmission grating with an area of 1 mm × 1 mm, a pitch of 300 nm, and a gold thickness of 1 μm for X-ray imaging and microscopy is successfully fabricated by combining electron beam lithography, X-ray lithography, and electroplating.

利用电子束光刻、X射线光刻和微电镀技术，成功制作了面积为1 mm×1 mm，周期为300 nm，金吸收体厚度为1 μm的用于X射线显微成像的透射光栅。

The searching range of the pattern being photolithographed is automatically optimized,thus the computer operation time can be saved.

该算法可以自动优化光刻图案的寻找范围，节省计算机在寻找光刻像素时的运算时间。

The basic concept of FOP can be summarized as to further optimize effective prescription according to the standard of curative effects and with the aid of modern science and technology and theories of traditional Chinese medicine.

其基本内涵可概括为：以确有疗效的中药复方为研究对象，以现代科学技术和传统中医药理论为技术支持，以该复方所治病证的药效响应为评价标准，以优化重组疗效更优的新复方为研究目的。

Ever since our world has been a world, native forests have been indiscriminately exploited by man.

自从我们的世界一直是世界原生森林被任意剥削人。