光刻的

High-precision prealigner is a crucial component in wafer transport device for modern photolithographer.

高精度的预对准是设计现代光刻机硅片传输系统需要解决的核心问题之一。

This avoids the need to align multiple photolithographic processing steps, thereby allowing greatly increased resolution and reduced lead spacing.

这避免了需要对准多个光刻处理步骤，由此允许大大提高的分辨率和减小的引线间隔。

Photolithographic technology of in-situ synthesis high density chip is also discussed in this thesis. The technology parameters of label are obtained, such as coating photoresists, exposure time, and so on.

本文还研究了原位合成高密度基因芯片的光刻工艺，确定适合制作原位合成高密度基因芯片标记化的最佳工艺参数。

Often unable guarantee of block of wood stability experiment bear fruit compatibility disturbing photolithographic system in initial stage , laser studying.

在研究初期，激光干扰光刻系统的不稳定性常常不能保证实验结果的一致性。

Back then, chip designers considered it risky to add two or three layers of metal on top of the silicon wafer because each new layer added hills and valleys that made it difficult to keep photolithographic patterns in focus.

当时的晶片设计者认为在矽晶圆上加上两三层金属有点冒险，会使晶圆表面凹凸不平，增加光刻过程中聚焦的困难。

Theexperi-ment method proposed here can be used for efficiently balancing and adjustingthe tuning fork manufactured by photolithography.

本文所用的实验方法也为光刻腐蚀音叉的平衡和调频提供了有效方法。

Defocusing effect on the patterns of microlens array imaging photolithography is analyzed, and tolerance of defocusing range of the system is given.

本文分析了离焦量对微透镜列阵成像光刻图形质量的影响，给出了系统离焦量的容差。

Calculating Method of Image Quality Correction Sensitive Matrix of Lithographic Projection System Based on Weight-Optimizing of an Artificial Neural Network.

基于人工神经网络权值优化的投影光刻机像质校正灵敏矩阵的计算方法。中国激光， 2006， 33(4)： 516～520

The accuracy increases approximately 30 percent and 1/3 measuring time is saved compared with the TAMIS technique. Using the technique, the coma of the projection lens on PAS5500 scanner of ASML is measured.

在ASML公司的PAS5500型步进扫描投影光刻机上，多次测量了投影物镜彗差，结果表明，该技术测量重复精度优于1.2 nm，能实现高精度的彗差原位测量。

Many partners IBM will follow the analogous graph of modernization lithographic technology.

许多合作伙伴IBM公司将遵循类似的图形现代化建设的光刻技术。

The basic concept of FOP can be summarized as to further optimize effective prescription according to the standard of curative effects and with the aid of modern science and technology and theories of traditional Chinese medicine.

其基本内涵可概括为：以确有疗效的中药复方为研究对象，以现代科学技术和传统中医药理论为技术支持，以该复方所治病证的药效响应为评价标准，以优化重组疗效更优的新复方为研究目的。

Ever since our world has been a world, native forests have been indiscriminately exploited by man.

自从我们的世界一直是世界原生森林被任意剥削人。