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The invention discloses a method to integrate single CMOS with bulk silicon microelectromechanical system, its technical project: 1 forming isolating groove: adopting deep-groove etching, and SiO2 and polycrystal silicon filling to realize the insulation of MEMS structure and CMOS circuit; 2 making standard CMOS circuit; 3 using SiO2 and Si3N4 as mask, etching silicon on the back until exposing SiO2 at the bottom of the isolating groove, to complete the thickness control for MEMS silicon structure layer; 4 completing metalizing the CMOS circuit and masking the MEMS structure: MEMS structure region uses Al as mask and CMOS circuit region uses thick photoetching glue as mask, using DRIE to release silicon structure.
本发明公开了一种将单片CMOS与体硅微机械系统集成的方法,其技术方案为:1形成隔离槽:采用深槽刻蚀,SiO 2 和多晶硅填充,实现MEMS结构和CMOS电路的绝缘;2完成隔离槽后进行标准CMOS电路的加工;3用SiO 2 和Si 3 N 4 作掩膜,从背面腐蚀硅,直至暴露出隔离槽底部的SiO 2 ,完成MEMS硅结构层的厚度控制;4完成CMOS电路金属化和MEMS结构掩膜:MEMS结构区用铝作掩膜,CMOS电路区用厚光刻胶作掩膜,用DRIE释放硅结构。用本发明方法不仅获得了较大的质量块,而且用本发明较高的深宽比制作出的结构电容,同时实现了体硅微机械与CMOS电路的集成,显著提高MEMS传感器的精度和稳定性,具有前沿性和重要实用价值。
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This study provided a new research way and predictive framework for interpreting the complex climate and vegetation of Taiwan, and raised some remedial suggestions. The climatic grid layers, plot-data transforming program, physiognomic classification scheme of vegetation, ecoclimatic indices, moisture-thermal distribution of plants, and PNV map resulted from this study could facilitate further the managements and researches of the natural resources.
本研究为了解台湾气候及植群类型之空间分布提供一种新的研究途径与预测架构,同时检讨研究限制并提出改善建议,研究过程所得之气象资料检定程序、气候网格图层、样区资料整合程序、植群形相分类方案、生态气候指标、树种水热境制、PNV图层等成果也有助於自然资源之经营管理与科学研究。
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Protease treatment of the plasma membranes could abolish the binding but NaIO_4 and glycosidase could not, indicating that nsLTP144 bound to plasma membranes protein without carbohydrate moiety. Using the homobifunctional cross-linking regent bissuberate (BS~3) and rice plasma membranes incubated with ~(125)I-Trx-nsLTP144, we identified, after SDS-polyacrylamide gel electrophoresis and autoradiography, a putative protein receptor on the rice plasma membranes with the molecular mass around 60 kDa. NsLTP144 can not trigger extracelluar alkalization in arabidopsis, but can abolish the extracellular alkalization effect of phytopathogen elicitor cryptogein, suggesting that cryptogein and nsLTP144 may bind to the same membrane protein. In vitro pull-down assay showed that nsLTP144 interacted with OsCaM1, a possible extracellular calmodulin, implying that nsLTP144 and OsCaM1 could function in the same signal transduction pathway. These results shed light on revealing the roles of nsLTP in vivo and make it promising to finally characterize the plasma membranes receptor of nsLTP.
发现~(125)I-Trx-nsLTP144、~(125)I-Trx-nsLTP110与水稻细胞质膜均具有特异性结合,而且结合是饱和性的、可被竞争的,符合配体-受体结合的典型特征,同时用于对照实验的蛋白质~(125)I-Thioredoxin没有此特性,表明水稻细胞质膜上存在nsLTP的受体;利用可氧化糖基的NaIO_4和水解糖基的N\'-糖苷酶F处理水稻细胞质膜,再进行结合实验,结合活性几乎不受影响;而利用胰蛋白酶处理细胞膜则使得结合能力几乎完全丧失,表明其受体为没有经过糖基化修饰的蛋白质;利用交联剂BS~3交联配体一受体后,再进行SDS-PAGE分离和放射自显影,结果显示水稻细胞质膜上的nsLTP受体中有一个60kDa的蛋白质可以与nsLTP144发生特异性的结合,可能是其受体;细胞外碱化实验表明,nsLTP144不能促使拟南芥原生质体细胞培养液的细胞外碱化反应,却能猝灭来自植物病原菌的激发子Cryptogein刺激拟南芥原生质体产生的细胞外碱化反应,表明nsLTP和Cryptogein结合细胞膜上相同的位点,保护了植物细胞免受Cryptogein导致的细胞程序性死亡,并诱导系统获得性抗性的产生;体外Pull-down实验表明,nsLTP144和水稻的OsCaM1具有相互作用,暗示了nsLTP144和OsCaM1可能同在一个信号通路上起作用。
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Province, Shijiazhuang, Baoding have been involved in two rounds of 61 cities nationwide survey and synthesis of MSM epidemic prevention and control work, 4-6 months of this year the third round of the survey will be carried out; the rest of the city of nine work-site investigations and Shijiazhuang, Baoding, the third round of the survey the same time, also in accordance with the national program of 61 pilot cities, the survey used a snowball method, sample size of 300 people, mainly MSM population survey of AIDS, syphilis, hepatitis C infection; Shijiazhuang, Baoding, the completion of the third round of the national survey At the same time, will also focus on the MSM population in rural areas of the outbreak investigation; in July 2009, municipalities to carry out data entry, upload, analysis and summary.
我省石家庄、保定已参与两轮全国61个城市MSM疫情调查与综合防治工作,在今年4-6月份将开展第三轮调查;其余9市的现场调查工作与石家庄、保定的第三轮调查同步进行,同样按照国家61个试点城市方案、采用滚雪球法调查,样本量均为300人份,主要调查MSM人群艾滋病、梅毒、丙肝的感染情况;石家庄、保定在完成全国第三轮调查的同时,还将侧重于农村地区的MSM人群的疫情调查;2009年7月,各市进行数据录入、上传、分析和汇总。
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Additionally, the ocean and piscatorial experience show the spatial and humane characteristic of Nan-Fang-Ao settlement.
同时,回归至海洋性格与渔民生命经验,以试图呈现南方澳聚落的空间与人文特质。
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This study refers to the conditions of practical powder metallurgy manufacture process, and proceeds to experiments and gear precision measurements as well as investigation on the effects of two parameters, powders and pitch circle radius, on gear precision. The relationship between gear parameters and gear surface deviations was derived from the mathematical model for the involute helical gears and the analysis of gear surface deviations.
本论文将采用实际上粉末冶金螺旋齿轮的制程条件,进行试作实验与齿轮精度的量测,以探讨粉末及螺旋齿轮之节圆半径这两个制程参数对於齿轮精度的影响;同时应用齿轮创成原理所推导之螺旋齿轮数学模式,配合齿面变异分析,求得齿轮设计参数改变量与齿面变异量之关系。
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In this paper, we report the calculation of single line-image and double lineimage for various configuration of diffractive optical element, which were designed as one- dimensional plane configuration of bar- shaped pure- phase from the principle of the optical equal- path compensation.
报道以一维平面阶梯条形纯位相结构,用等光程补偿的物理概念出发,计算了单线与双线象的衍射光学元件的多种构形,获得了与理想衍射线象符合的光强分布;同时发现双线象时会出现噪音光强小峰,这在精确成象时仍是要设法避免的。
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One or more plane sections (8,9) and part cylinders (10,11) connecting to the plane sections (8,9) are formed at the outside (7) of the capillary using for fixing the fiber, all the part cylinders (10,11) are formed with a single center axis and the same radius, meanwhile a patchhole (3) of the inserting fixed fiber (2) is formed in the deflected position of the center axis and in the vertical direction of the first plane section (8) which is used as the standard.
在光纤固定用玻璃毛细管(1)的外面(7)形成有一个或多个平面部(8、9)和与该平面部(8、9)连接的一个或多个局部圆筒面(10、11),该所有的局部圆筒面(10、11)都是以单一的中心轴和相同半径形成的,同时在与作为基准的第一平面部(8)垂直的方向上从中心轴偏离的位置上形成有插入固定光纤(2)的插入孔(3)。
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Art and culture also play an important part in the development of social and economic.
同时,艺术与文化在社会与经济的发展进程中也越来越起到不可忽视的作用。
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And pointed out that there has no certain relation between this kind of management and the protection of plowland, and baffles the communication between countryside and town, increases the cost of social management, does no good to ease the contradiction between countryside and town.
本文还从宅基地法律关系调整的利益的角度,分析了严格限制宅基地交易与农民利益要求、城镇居民合理利益要求的冲突,指出这种法律调整与耕地保护之间没有必然联系,同时阻碍城乡交流,增加社会管理成本,无益于城乡矛盾缓和。
- 推荐网络例句
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We have no common name for a mime of Sophron or Xenarchus and a Socratic Conversation; and we should still be without one even if the imitation in the two instances were in trimeters or elegiacs or some other kind of verse--though it is the way with people to tack on 'poet' to the name of a metre, and talk of elegiac-poets and epic-poets, thinking that they call them poets not by reason of the imitative nature of their work, but indiscriminately by reason of the metre they write in.
索夫农 、森那库斯和苏格拉底式的对话采用的模仿没有一个公共的名称;三音步诗、挽歌体或其他类型的诗的模仿也没有——人们把&诗人&这一名词和格律名称结合到一起,称之为挽歌体诗人或者史诗诗人,他们被称为诗人,似乎只是因为遵守格律写作,而非他们作品的模仿本质。
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The relationship between communicative competence and grammar teaching should be that of the ends and the means.
交际能力和语法的关系应该是目标与途径的关系。
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This is not paper type of business,it's people business,with such huge money involved.
这不是纸上谈兵式的交易,这是人与人的业务,而且涉及金额巨大。