查询词典 susceptor

Rotating the susceptor with high speed results in stronger recirculations.

衬底高速旋转则更容易产生涡旋。

By modifying the reactor geometry into streamlined shape,the recirculation cells can be reduced even eliminated so that smooth and rectilinear flow prevails in the susceptor region.

通过改变反应器的结构和形状来优化反应器设计，从而消除衬底上方的涡旋，得到光滑而均匀的流场。

Theoretical analyses show the feasibility of this induction heating, and preliminary experimental results show that it takes only a few seconds to produce the gold -silicon eutectic phase,despite the fact that the thickness of the gold layer is less than a skin - layer depth and no additional susceptor is required.

理论上分析了该方法的可行性，初步试验结果表明，虽然金膜厚度低于感应趋肤深度，但在没有应用感应加热基座的情况下，几秒钟内就形成了金硅共晶相。

Some key problems whether the height and diameter of the reactor chamber can be further increased,how to optimize the temperature and concentration fields above the susceptor,etc.are explored.

模拟结果发现：(1)通过对反应器形状进行优化，使进口处流道趋向于流线的形状，可以大大地削弱甚至消除由流道扩张引起的涡旋；(2)在影响对流涡旋的几何参数中，反应腔高度起主要作用，而反应腔直径影响较小。

The technique can be extensively applied to manufacture equipments of optoelectronics and semiconductor industries such as the chamber, susceptor, and cooling plate.

中文摘要本实验采用真空硬焊制程来接合铝合金与无氧铜两种金属材质，其应用於腔体、加热器、冷却板等光电与半导体制程设备。

Further, the reactor includes a secondary edge reflector having a specular surface positioned beside the heating array for recovering misdirected thermal radiation directed generally to a side of the heating array and away from the susceptor.

此外还包括二次边缘反射器，它有一个位在加热行列旁边的镜面可用来回收一般导向加热行列的一侧并离开衬托器的误导的热辐射。

Thus, the secondary edge reflector heats the edge and reduces thermal gradients across the susceptor and the semiconductor wafer to inhibit slip dislocations in the wafer during epitaxial layer deposition.

这样，二次边缘反射器便可加热外边并减小横越衬托器和半导体晶片的热梯度，从而可在外延生长层沉积时阻止晶片内滑移位错的发生。

The reactor includes a reaction chamber sized and shaped for receiving the semiconductor wafer and a susceptor having an outer edge and a generally planar wafer receiving surface positioned in the reaction chamber for supporting the semiconductor wafer.

该反应器包括一个反应室，其大小和形状可用来接纳半导体晶片；和一个衬托器，它有一个外边和一个位在反应室内一般为平面的晶片接纳表面可用来支承半导体晶片。

A high-density plasma processing apparatus includes a processing chamber, having a susceptor for supporting an object to be processed positioned therein and a dielectric window positioned on the processing chamber to form an upper surface of the processing chamber.

本发明提供高密度等离子体加工设备，包括加工室、反应气体注入装置、感应耦合等离子体触角、波导和环形发送管。用于支撑所需加工的物体的衬托器安装在加工室内。

Because the domestic Hi-Tech industry develops fast in recent years, so a lot of processes with key technology need studying and developing including the wafer foundry or LCD industry, and even thin film solar cell industry. But the main problem that the requisite components (such as heater module, susceptor, shower head module, turbo-molecule vacuum pump, etc.) are almost from original factory but Taiwan is few. Because of the reason and one of the new government's policies is for environmental protection and green energy industry developing, we try to develop our own technology in Taiwan.

近年来因国内高科技产业快速发展，所以许多制程与关键技术也陆续被投入大量研发，但不论是半导体产业或者平面显示器产业，乃至於薄膜太阳能电池产业，在设备研发上存在极大的问题，大部份关键零组件的取得皆源自国外母厂(例如加热模组、气体扩散模组、涡轮分子帮浦等元件)，所以缺乏自主设计研发能量，也因此许多关键制程技术无法充分发挥。

The split between the two groups can hardly be papered over.

这两个团体间的分歧难以掩饰。

This approach not only encourages a greater number of responses, but minimizes the likelihood of stale groupthink.

这种做法不仅鼓励了更多的反应，而且减少跟风的可能性。