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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

For if he shall begin to fall into dotage, perspiration and nutrition and imagination and appetite, and whatever else there is of the kind, will not fail; but the power of making use of ourselves, and filling up the measure of our duty, and clearly separating all appearances, and considering whether a man should now depart from life, and whatever else of the kind absolutely requires a disciplined reason, all this is already extinguished.

因为他将在排泄、营养、想像和胃口或别的类似能力衰退之前，就开始堕入老年性昏聩，而那种运用我们自己的能力，满足我们义务标准的能力，清晰地区分各种现象的能力，考虑一个人是否应当现在辞世的能力诸如此类的能力绝对需要一种训练有素的理性，而这种性整个地已经衰退了。

For if he shall begin to fall into dotage, perspiration and nutrition and imagination and appetite and whatever else there is of the kind will not fail; but the power of making use of ourselves, and filling up the measure of our duty, and clearly separating all appearances, and considering whether a man should now depart from life, and whatever else of he kind absolutely requires a disciplined reason, all this is already extinguished.

因为他将在排泄、营养、想象和胃口或别的类似能力衰退之前，就开始堕入老年性昏聩，而那种运用我们自己的能力，满足我们义务标准的能力，清晰地区分各种现象的能力，考虑一个人是否应当现在辞世的能力等诸如此类的能力绝对需要一种训练有素的理性，而这理性整个地已经衰退了。

With go up comparing of phase of the moon, amount of IPO industry measure, financing and specified number of capital of average be in harmony drop in the round.

与上月相比，IPO企业数量、融资金额和平均融资金额全面下降。

The paper analyzes historical influence in studying of traditional earthquake forecast of earth tide, and compares geohysical charactistics of earthquake forecast with that of Geodyuamics by earth tide in vibrating frequency, measure of volume of vibrating source and transmit distance. It emphasizes that the setting up of fundamental conception is the most important in earthquake forecast by earth tide.

本文分析了现行固体潮地震研究中的历史影响，对比研究了固体潮地震预测研究和固体潮地球动力学研究二者在振动频率、振动源体积、传输距离与介质等方面的地球物理特点与本质区别，强调了固体潮地震预测研究中最根本的工作是建立地震预测的目标和基本概念。

Easier to measure is student enrolment, up by 11% after decades of decline.

更简单的测度是入学率，在几十年的下降后提高了11％。

And for good measure,because Michael Dell, No.9 on the list and moving up fast, is a

因为比尔盖茨，这个行星上最富有的人---就目前而言---是个退

A set of equipment including a special shunt and a special amplifier are made up to measure the post-arc fulgurite current from which the post-arc fulgurite resistance is obtained.

本文通过自制试验设备测量熔断器中弧后残躯电流随时间变化的关系曲线，从而得到不同熔体材料采用不同的填充方法的弧后残躯电阻曲线。

Asked to size up New York's third-base options, the GM grinned, resorting to a measure of gallows humor.

当时被问到三垒手的人选，现金男挤出化解僵局的幽默感，微笑地对记者说

Relatively gasses gush measure,geometric probability,multivariate linear programming; up forth

相对瓦斯涌出量，几何概率，多元线性规划

Singer Leona Lewis and former Led Zeppelin guitarist Jimmy Page emerged as the bus transformed into a grass-covered carnival float, and the pair combined for a rendition of "Whole Lotta Love".

歌手leona刘易斯和前率领的飞艇的吉他手吉米页出现巴士转化为基层所涵盖的嘉年华花车，和一双合并为一移交&整个lotta爱&。

This is Kate, and that's Erin.

这是凯特，那个是爱朗。