查询词典 etching

The invention discloses a method to integrate single CMOS with bulk silicon microelectromechanical system, its technical project: 1 forming isolating groove: adopting deep-groove etching, and SiO2 and polycrystal silicon filling to realize the insulation of MEMS structure and CMOS circuit; 2 making standard CMOS circuit; 3 using SiO2 and Si3N4 as mask, etching silicon on the back until exposing SiO2 at the bottom of the isolating groove, to complete the thickness control for MEMS silicon structure layer; 4 completing metalizing the CMOS circuit and masking the MEMS structure: MEMS structure region uses Al as mask and CMOS circuit region uses thick photoetching glue as mask, using DRIE to release silicon structure.

本发明公开了一种将单片CMOS与体硅微机械系统集成的方法，其技术方案为：1形成隔离槽：采用深槽刻蚀，SiO 2 和多晶硅填充，实现MEMS结构和CMOS电路的绝缘；2完成隔离槽后进行标准CMOS电路的加工；3用SiO 2 和Si 3 N 4 作掩膜，从背面腐蚀硅，直至暴露出隔离槽底部的SiO 2 ，完成MEMS硅结构层的厚度控制；4完成CMOS电路金属化和MEMS结构掩膜：MEMS结构区用铝作掩膜，CMOS电路区用厚光刻胶作掩膜，用DRIE释放硅结构。用本发明方法不仅获得了较大的质量块，而且用本发明较高的深宽比制作出的结构电容，同时实现了体硅微机械与CMOS电路的集成，显著提高MEMS传感器的精度和稳定性，具有前沿性和重要实用价值。

The figure of silicon tips etched in this novel etching solution is rocket tips on right rectangular pyramid rather than unsymmetrical eight sided pyramid etched in other etching solution.

更为重要的是该腐蚀液腐蚀的硅尖异于常规的不对称八棱锥，而是一种半锥角很小的"火箭尖"形状，因此可望获得更好的扫描特性和隧道效应。

A silicon based piezo-electricity socle girder miniature electric generating apparatus is provided with a silica fixing frame, an oxidizing layer, a platinum/titanium lower metallic layer, a piezo-electricity PZT layer, a platinum/titanium upper metallic layer, an electrode insulation protection layer, and a vibrating base; the structure of the silica fixing frame combines the monocrystal silicon wet method etching and dry-etching to process, whose structure is integrated as a whole, and the center part of the structure is in a socle girder shape, which includes a silicium socle girder and a free end mass block; the piezo-electricity power supply device uses a micro-machining technique to integrally machine, and can realize the integration of the power supply and the microelectronic devices.

一种硅基压电悬臂梁微型发电装置，有硅质固定框架1、氧化层2、铂/钛下金属层3、压电PZT层4、铂/钛上金属层5、电极绝缘保护层6、振动底座7构成；硅质固定框架1的结构是利用单晶硅湿法腐蚀和干法腐蚀相结合完成加工，其结构连为一体，其中心部分的结构为悬臂梁形状，包括硅悬臂梁a和自由端质量块b；压电电源装置利用微加工工艺集成加工，能够很好的实现电源、微电子器件集成。

Firstly, the theory and knowledge of sparking and burning are briefly introduced. The holistic project of this experiment is designed aiming to the experiment motive. And then the micro-process technique on silicon is chosen. According to the technique, the structure and size of the micro chamber, the spark device, the gas-fired channels are designed. The mask of lithography is produced based on the design. At last, the whole burning room is produced by the techniques of photolithography, deposition, dry etching, wet etching, lift off, etc.

本文首先介绍了点火燃烧的有关原理和基本知识，然后根据提出的实验研究目标，确定了微小空间内点火特性实验总体方案，之后结合拟采用的硅微加工工艺设计确定了微燃烧室、放电点火装置、燃气通道等各部件的结构尺寸，并最终得到光刻用掩膜版图形，最后分别采用光刻、淀积、干法刻蚀、湿法刻蚀、剥离等硅微加工技术完成了实验用微燃烧室的制作。

Parabolic relation between the etching rate of AlGaAsSb materials and their Al content was found, unselective etching could be performed for GaSb and AlGaAsSb material with certain Al content.

实验中发现该腐蚀液对AlGaAsSb的腐蚀速率与其Al组份呈抛物线关系，在合适的Al组份下可对AlGaAsSb和GaSb两种材料进行非选择性的刻蚀。

A process of etching capable of producing several tones by varying the etching time of different areas of a copper plate so that the resulting print resembles the flat tints of an ink or wash drawing .

细点腐蚀制板一种，通过改变铜版不同区域的时间可产生多种色度，以致使印迹类似于墨水画或淡彩画的无明暗之分的色度

A process of etching capable of producing several tones by varying the etching of different areas of a copper so that the resulting print resembles the flat tints of an ink or wash drawing .

细点腐蚀制法一种蚀刻法，通过改变铜版不同区域的蚀刻时间可产生多种，以致使印迹类似于墨水画或淡彩画的无明暗之分的

Experiment results show as follows in the processing of semiconductor etching, chemical heat centers in the semiconductor material, and is convected gradiently in all directions; the vertical heat convection velocity is obviously swifter than the horizontal; the process of heat convection can be real- timely recorded, and the heat convection situation can be gotten in any small area at any time by infrared camera which makes the analyse and understanding of heat convection characteristic in the processing of wet etching more intuitionistic.

实验结果表明：在半导体腐蚀过程中，化学热以半导体材料为中心，向四周梯度状对流；向上的热对流速率明显大于水平的热对流速率；红外热像仪可以实时纪录热对流过程，并获得任意时刻、任意小区域的热对流情况，使得对湿法腐蚀过程中热对流特性的分析和理解更加直观。

First of all, from the material costs, ink than stamping or etching of metal coil; Secondly, low prices from material consumption, stamping or lot metal etching, and conductive ink business card printing and membership card making an antenna or a circuit speeds, a cost-efficient.

首先，从材料成本上，油墨要比冲压或蚀刻金属线圈的价格低；其次，从材料耗用量上说，冲压或蚀刻要消耗大量金属，而导电油墨制卡和会员卡制作天线或电路速度高、成本低、效率高。

The present invention generally provides methods for employing a focused particle beam system in the removal of an excess portion from a workpiece having an opaque film patterned on a substrate and more particularly provides methods of gas-assisted etching using an etching gas including bromine and water vapor.

本发明提供一种使用聚焦粒子束系统从其衬底上有不透明薄膜图形的工件中去除多余部分的方法，更具体地提供了使用含溴的刻蚀气体的气体辅助刻蚀方法。

Neither the killing of Mr Zarqawi nor any breakthrough on the political front will stop the insurgency and the fratricidal murders in their tracks.

在对危险的南部地区访问时，他斥责什叶派民兵领导人对中央集权的挑衅行为。

In fact,I've got him on the satellite mobile right now.

实际上 我们已接通卫星可视电话了