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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器,对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计,建立了器件的三维实体模型以及两维降阶模型,对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计,同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程,开展了一系列重要工艺步骤的单项工艺试验,对工艺流程与工艺参数进行了优化,针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析,并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合,建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

Pointed out that turned out to be dot matrix business card printing and membership card producers with on-demand business card printing and membership card.

指出,原来是点阵制卡和会员卡制作商提供了这种按需制卡和会员卡制作。

You can have a wonky nose and a crooked mouth and a double chin and stick-out teech,but if you have good thoughts they will shine out of your face like sunbeams and you will always look lovely.

你可以长着一个扭曲的鼻子,歪嘴巴,双下巴和一口刨牙,但如果你有美好的思想,你的脸上会有阳光般的光彩,看起来也可爱多了

In this I should remind a friend, if you want to had done website of a store to be able to consider to go up, clean out treasure, still have ZhongGuanCun online, still have several, I did not come out one, this double-dealing it is more typical.

在这我要提醒一个朋友,假如你想做好一个商城网站可以去研究一上,淘宝,还有中关村在线,还有好几个,我都不一一例出来了,这两面三刀个是比较典型的。

Histochemical, immunochemical and in situ hybridizative methods and technique of computer image analysis were used in this study to investigate the variable trends of expression and correlation of some proteins and genes interrelated with abnormal proliferation of hepatocyte during periods of hepatocarcinogenesis induced by diethylnitrosamine, and the effect of Ganfujian Granule, which is composed of drug-food double-duty herbs, taking"jian-pi-shu-gan"(invagorating spleen and soothing liver) as therapeutic principle and manufactured by our department. The purpose of the study is to screen out an applicable and effective liver cancer preventive agent of traditional Chinese medicine, to offer academic foundation for further clinic study and to spread out its application.

本课题通过组织化学、免疫组化、原位杂交等方法及计算机图像分析等技术,检测了化学致癌物二乙基亚硝胺诱导大鼠肝癌形成过程中与肝细胞异常增殖相关的部分蛋白、基因表达的动态变化和相互关系及我科研制的以"健脾疏肝"立法的药食两用中药制剂肝复健冲剂对诱发肝癌各时期上述因素异常变化的影响,旨在筛选适用、有效的中药肝癌预防制剂,并为进一步的临床试验及推广应用提供一定的理论依据。

Meanwhile, he also struck out four times in the doubleheader, three times as the leadoff hitter in the second game, leaving his average at .242 and seemingly putting to rest Joe Torre's stated belief that Abreu was ready to break out.

同时,他也在日夜两场中被三振四次,三次是当他担任第一棒先锋的夜场比赛中,使他的打击率成为2成42,让托瑞说他相信阿不已经准备好突破低潮的说法又被摆一边。

We're not sure we find the tale of 1,001 Arabian Nights to be all that "insipiring"(in it a king murders one of his many wives each night out of paranoid jealousy), but five Taiwanese jewelry designers have set out to design 1,001 rings in one month—and what do you know, one happens to be a Bluetooth headset vaguely reminiscent of something right in between a scarab and a doubloon.

我们不确定灵感是否全都来自於一千零一夜的故事(由於猜忌与偏执,国王每个晚上杀害一位自己的妻子),然而五个来自台湾的珠宝设计师,仿效古代阿拉伯名著「天方夜谭─一千零一夜」,在一个月内开始设计一千零一个指环。

And the LORD was with Judah; and he drave out the inhabitants of the mountain; but could not drive out the inhabitants of the valley, because they had chariots of iron.

1:19 耶和华与犹大同在,犹大就赶出山地的居民,只是不能赶出平原的居民,因为他们有铁车。

And the LORD was with Judah; and he drave out the inhabitants of the mountai but could not drive out the inhabitants of the valley, because they had chariots of iron.

1:19 耶和华与犹大同在,犹大就赶出山地的居民,只是不能赶出平原的居民,因为他们有铁车。

Similar resource taxes have undergone drawn-out debate before they were finally rolled out.

与此类似的资源税经历了旷日持久的讨论才最终推出。

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推荐网络例句

The work of this paper is as follows: 1. Looking back the progressing history of the linear motor, introducing the features of the elevator driven by linear induction motor, radicating the topic of this paper "the digital frequency variable control of the elevator bi-side direct driven by linear induction motor". The research of this paper covers the conventional VVVF control, space vector based VVVF control, vector control and DTC.

本文主要开展了以下几个方面的工作: 1 回顾了直线电机发展历史,电机的驱动技术演变,特别是针对直线电机的驱动,简要介绍了直线感应电机驱动电梯的优点和不同结构类型,对传统的v/f控制,基于空间矢量法的v/f控制,矢量控制,和基于电压空间矢量的直接转矩控制进行了比较,确立了本课题的研究主题:直线感应电机双边直推式驱动电梯的全数字变频控制。

The article combines with the treatment of a superficial civil air defense work to introduce how the grouting method to improve the performance of the backfill soil.

文章从治理漂浮人防工事的角度提出了注浆技术在改善回填土性质方面的应用,并详细阐述了注浆技术的施工流程。

I knew nor shyness nor fear, my life was boisterous.

我不懂得羞怯和惧怕,我的