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Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

在对硅微机械扭转镜光致动器的光机电特性系统地理论研究的基础上提出了硅微机械扭转镜光致动器的结构设计准则。3、提出了单轴双梁厚度差分结构、单轴双柔性折叠梁结构、单轴双梁垂直扭转梳齿结构、双轴四梁差动复合微镜结构以及以上四种基本结构组合后的衍生结构等五种工艺加工技术兼容的新型的硅微机械扭转镜光致动器，对器件关键结构薄厚度、高耐疲劳扭转梁进行了局部加强的变形补偿设计，建立了器件的三维实体模型以及两维降阶模型，对提出的新结构硅微机械扭转镜光致动器进行了系统的静力学、动力学、静电场、力电耦合和流体固体耦合的建模仿真与优化设计，同时设计并分析了三种可实现单芯片集成的弹性光纤定位夹紧结构。4、提出了组合体硅微加工技术与表面硅微加工技术、兼容同一套光刻版图、可分别基于SOI 晶片和普通Si 晶片、适应于制造提出的各种新结构单晶硅和多晶硅硅微机械扭转镜光致动器的三套柔性加工工艺流程，开展了一系列重要工艺步骤的单项工艺试验，对工艺流程与工艺参数进行了优化，针对加工过程中出现的具有普遍意义的典型工艺问题进行了讨论和分析，并提出了解决方法。5、创新性地将模糊图像合成技术、频闪图像匹配技术、频闪Mirau 显微干涉技术与显微激光多普勒测振技术有机结合，建立起了一套周期运动测量与瞬态运动测量相结合、单点运动测量与全视场运动测量相结合、满足不同MEMS 器件各种动态测试要求的集成的MEMS 三维六自由度微运动精密测量系统。

In this process, educational, independent, progressive, and systematic principles should be followed, with general education and personal guidance combined, comprehensive education and process instruction combined, conventional education and particular education combined, campus education and extramural education combined, to effectively implement career development education via curriculum teaching, theme activity, social practice and so on.

应该遵循教育性、主体性、递进性、系统性等原则，采取一般教育和个别指导相结合、全面教育和过程指导相结合、常规教育与专门指导相结合、校内教育与校外教育相结合等方法，通过课程教学、主题活动、社会实践等途径，有效实施大学生职业发展教育。

Based on consider hereinbefore, this dissertation discusses several aspects on the problem of the sustainable and optimum exploitation of groundwater resources as follows:①reviewed entirely the origin and evolvement of the concept "sustainable development", stated and commented the study status in queue on"sustainable development"around national and international range, thorough discussed the science connotation about the concept "sustainable development";②looked back and commented across-the aboard some furthest basic concept and proposition related to groundwater resources, put forward self opinions on a few existent mistake points of view and chaos understandings;③expatiated entirely on the content and meaning of the theory of changeable groundwater resources system, contrast with the traditional methods of groundwater resources calculation and evaluation, combined example to show the application of this theory;④thorough analyzed the difficult and complexity to forecast the groundwater resources, fully stated the traditional methods of groundwater resources forecasting, pointed out the characteristic and applying condition of these forecasting method, introduced the main ideas and methods of wavelet analysis developed recently, and the MATLAB software be known as the fifths era computer language, and its accessory wavelet analysis toolbox, applied these methods and tools to analyze the groundwater dynamic curve, adopted the B-J method and Morte-Carlo method, combined with the theory of changeable groundwater resources system, discussed the new view on the forecast of groundwater resources;⑤synthetically analyzed the characteristics and limitations of the present all kind of groundwater manage model, combined mathematical programming, mathematical statistics, random process and the theory of variation system of groundwater resources on the unite optimum attempter of surface water and groundwater, emphasized how to make the model more nicety, more simple, more practicality;⑥analyzed the inside condition and outside condition to assure the sustainable and optimum exploitation of groundwater resources, the inside conditions are the follows: correct resources idea, scientific methods of resources calculation and evaluation, credible forecast methods of resources, exercisable measures of resources management, the outside conditions are the follows: the development idea of high layer, the transform of manage system, the matched policy and rule of law, the adjusted of economy lever, the improve of cultural diathesis, the boosting up of water-saving consciousness and detail measures, the control of population rising, the prevention and cure of water pollute, the renew and rebuild of ecology;⑦scan the sustainable and optimum exploitation of groundwater resources from the high level of metagalaxy, earth system science, and philosophy;⑧point out the more directions on groundwater resources.

它将为制定水资源的可持续发展目标和战略决策提供科学依据，为制定社会、经济可持续发展战略提供理论基础。基于以上考虑，论文主要从以下几方面对地下水资源可持续开发问题进行了比较深入的探讨：①全面回顾了"可持续发展"概念的由来与演变，对国内外"可持续发展"的研究现状进行了述评，并对"可持续发展"概念的科学内涵进行了深入探讨；②对涉及地下水资源的一些最基本的概念和命题进行了全面的回顾和评述，对目前仍然存在的一些错误观点和混乱认识提出了自己的见解；③全面阐述了地下水资源变值系统理论的内容和意义，并与传统的地下水资源计算评价方法进行了对比分析，结合实例具体说明了方法的应用；④深入分析了地下水资源预测预报工作的极端重要性和复杂性，对传统的地下水资源动态预测方法进行了全面的评述，指出了各类预测预报方法的特点及适用条件，对最近二十多年刚发展起来的小波分析技术的主要思想和方法及其应用范围，以及号称第五代计算机语言的MATLAB软件和附带的小波分析工具箱进行了介绍，并应用于地下水动态过程线的分析，采用时间序列中的B-J法，蒙特卡罗方法，与地下水资源变值系统理论相结合，探讨了地下水动态资料分析和地下水资源预测预报的新思路；⑤综合分析了现今各类地下水管理模型的特点及缺陷，将数学规划、数理统计、随机过程等与地下水变值系统理论相结合进行地表水地下水或多水源的联合优化调度，使模型更准确、更实用；⑥对保证地下水资源可持续开发的内部条件和外部条件进行了分析，内部条件主要是正确的资源观，科学的资源计算与评价方法，可靠的资源预测预报技术，可操作的资源管理措施，外部条件主要是高层发展思路、管理体制的变革、配套的政策法规、经济杠杆的调节、人文素质的提高、节水意识的增强及具体节水措施、人口增长的控制、水体污染的防治、生态的恢复和重建等；⑦从宇宙科学、地球系统科学及哲学的高度审视地下水资源的可持续开发；⑧指出了地下水资源可持续开发的进一步研究方向。

Kempers' study , the more layers the mesh screen type had, its resistance against gravity was higher, but its heat resistance and flow resistance were comparatively augmented. As mentioned in the preceding paragraph, it is extremely difficult for a single micro structure based on any of the three types to possess both low flow resistance and strong capillary force. Faced with this fact, the researchers have tried to mix the three micro structures in Table 2 into as many combinations as possible so that a composite micro structure with low flow resistance and great capillary force may be fabricated. After a thorough analysis, the groove combined with sintered metal or mesh screen has been found to be a better alternative. However, the groove combined with sintered metal will raise the flow resistance of the channel, and the aluminum substrate employed in this research cannot be sintered into a micro structure. As a result, the groove combined with mesh screen is finally chosen as the composite structure to enhance its capillary force and at the same time maintain its high permeability. In this way, the heat pipe will not fail due to the working angles.

Kempers 的研究当中提到，当网格结构越多层时，其对抗重力的能力也越强，但相对的其热阻以及流阻也越高，就如同前段所述，我们很难在单一结构当中找出一流阻低且毛细力之微结构；因此本研究便以表2中之三种微结构进行组合，找出一低流阻且毛细力强之复合式结构，经分析发现，沟槽搭配烧结以及沟槽搭配网格为较佳之组合方式，但由于烧结搭沟槽构造将会提高流道之流阻，且本研究使用铝做为基材，并无法使用烧结最为其微结构，故将采用网格搭配沟槽之复合式结构提高结构的毛细力，并维持沟槽结构的高渗透性，解决因角度造成热管失效的问题。

Cross-stitch may also be combined with other work, such as canvaswork or drawn thread work .

十字绣也可以结合其他工作，如canvaswork或绘制线程的工作。

Cross-stitch may also be combined with other work, such as canvaswork or drawn thread work.

十字绣也可以结合其他工作，如canvaswork或绘制线工作。

Cross-stitch ma y also be combined with other work, such as canvaswork or drawn thread work .

十字绣也可以结合其他工作，如canvaswork或绘制线程的工作。

Cross-stitch ma y also be combined with other work, such as canvaswork or drawn thread work.

十字绣也可以结合其他工作，如canvaswork或绘制线工作。

Cro ss -stitch may also be combined with other work, such as canvaswork or drawn thread work.

十字绣也可以结合其他工作，如canvaswork或绘制线工作。

Radical steps in the field of nuclear disarmament should be combined with a set of wideranging, concrete measures aimed at easing military tension and building confidence.

在核裁军领域内所采取的重大措施必须同一套旨在减缓军事紧张局势和建立信任的广泛具体措施结合起来。

According to the clear water experiment, aeration performance of the new equipment is good with high total oxygen transfer coefficient and oxygen utilization ratio.

曝气设备的动力效率在叶轮转速为120rpm～150rpm时取得最大值，此时氧利用率和充氧能力也具有较高值。

The environmental stability of that world - including its crushing pressures and icy darkness - means that some of its most famous inhabitants have survived for eons as evolutionary throwbacks, their bodies undergoing little change.

稳定的海底环境─包括能把人压扁的压力和冰冷的黑暗─意谓海底某些最知名的栖居生物已以演化返祖的样态活了万世，形体几无变化。