查询词典 Ion

High transmission, low energy beamline architecture for ion implanter

用于离子注入器的高传输，低能量离子束管线结构

Using virtual prototype technology to study high temperature rotation scanning target in this paper, it not only obtained a certain achievement, but also laid the foundation for applying virtual field technology in other key parts even and all of the high-current oxygen ion implanter.

本文应用虚拟样机技术来研究高温旋转扫描靶，取得了一定的成果，为今后将虚拟样机技术推广到强流氧离子注入机其它关键部件乃至整机的研究奠定了基础。

7 MV tandem accelerator, a 200kV ion implanter, and a TEM linked by a beam transport system.

7MV串列加速器、一台国产200kV离子注入机和一台日立H800型透射电子显微镜组成，并通过联机传输系统实现联机。

The gas supply system may be coupled to a gas-consuming unit in a semiconductor manufacturing facility, e.g., an ion implanter, an etch chamber, or a chemical vapor deposition reactor.

该供气体系统可以连接半导体加工设备中的气体消耗装置使用，如离子注入机、腐蚀室或化学气相沉积反应器。

In the classification part, we propose a Hybrid Classification Tree with learning capability to classify the recipe of a working wafer in the ion implanter, and a k-fold cross validation error is treated as the accuracy of the classification result.

在分类部分，我们提出具有学习能力的混合型分类树，针对离子植入机里正在运作晶圆的配方进行分类，所得到的k-交叠相互验证错误率则用来作为分类结果的准确性。

Improvements on the component facilities were made, and effective steps were taken to minimize mechanical vibration transmission from the ion beam line to the TEM. No obvious wobbling of the TEM image was observed, showing that the TEM works normally while the tandem and the implanter as well as the vacuum pumps are in operation.

对主要设备进行了改造，并采取有效措施解决了联机装置的隔震问题。2台加速器和所有的真空泵都运行时，电镜仍可正常工作，观察到的图像质量不受振动影响。

Ion implanter ; vertical scanner ; differential vacuum seal ; vacuum

离子注入机；垂直扫描机构；差分密封；真空

The implanter equipped with intense current, pulsed cathodic arc metal plasma sources which have both strong coating function and gas and metal ion implantation function. Its pulse high voltage power supply can provide big output current. It can acquire very good implantation dose uniformity.

第三代多功能等离子体浸没离子注入装置的强流脉冲阴极弧金属等离子体源既具有强的镀膜功能，同时也具有强的金属离子注入功能；它的脉冲高压电源能输出大的电流；并可获得高的注入剂量均匀性。

A new-type composite gaseous-metallic ion implanter was developed for fully pulsate circuit by introducing the gaseous plasma induced by the pulse which is restrained by megnetic field so as to realize the gaseous and metallic arc discharge.

本文报道了新型全脉冲电路气体－金属复合离子注入源的结构和特性，采用在磁场约束条件下的脉冲引发的气体等离子体，分别引发气体放电和金属弧放电。

The first tandem-implanter-TEM interface system in China, consisting of a 2×1.7 MV tandem accelerator, a 200 kV ion implanter, a H800 transmission electron microscope and the beam transport system, was established recently.

建立了由2×1.7 MV串列加速器、200kV离子注入机、H800型透射电子显微镜和联机传输系统组成的我国第1套串列加速器－离子注入机－透射电子显微镜联机装置。

This one mode pays close attention to network credence foundation of the businessman very much.

这一模式非常关注商人的网络信用基础。

Cell morphology of bacterial ghost of Pasteurella multocida was observed by scanning electron microscopy and inactivation ratio was estimated by CFU analysi.

扫描电镜观察多杀性巴氏杆菌细菌幽灵和菌落形成单位评价遗传灭活率。